PL336365A1 - Composition for chemically removing metal ions and atoms from surfaces - Google Patents
Composition for chemically removing metal ions and atoms from surfacesInfo
- Publication number
- PL336365A1 PL336365A1 PL33636599A PL33636599A PL336365A1 PL 336365 A1 PL336365 A1 PL 336365A1 PL 33636599 A PL33636599 A PL 33636599A PL 33636599 A PL33636599 A PL 33636599A PL 336365 A1 PL336365 A1 PL 336365A1
- Authority
- PL
- Poland
- Prior art keywords
- atoms
- composition
- metal ions
- removing metal
- chemically removing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL99336365A PL188424B1 (en) | 1999-10-29 | 1999-10-29 | Composition for chemically removing metal ions and atoms from surfaces |
| PCT/PL2000/000077 WO2001031696A1 (en) | 1999-10-29 | 2000-10-25 | Composition for chemical purification of surfaces off adsorbed metal ions and atoms |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL99336365A PL188424B1 (en) | 1999-10-29 | 1999-10-29 | Composition for chemically removing metal ions and atoms from surfaces |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| PL336365A1 true PL336365A1 (en) | 2001-05-07 |
| PL188424B1 PL188424B1 (en) | 2005-01-31 |
Family
ID=20075380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL99336365A PL188424B1 (en) | 1999-10-29 | 1999-10-29 | Composition for chemically removing metal ions and atoms from surfaces |
Country Status (2)
| Country | Link |
|---|---|
| PL (1) | PL188424B1 (en) |
| WO (1) | WO2001031696A1 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5127984A (en) * | 1991-05-02 | 1992-07-07 | Avantek, Inc. | Rapid wafer thinning process |
| RU2052868C1 (en) * | 1995-02-03 | 1996-01-20 | Акционерное общество "Научно-производственное предприятие "Сапфир" | Galvanomagnetic converter |
-
1999
- 1999-10-29 PL PL99336365A patent/PL188424B1/en not_active IP Right Cessation
-
2000
- 2000-10-25 WO PCT/PL2000/000077 patent/WO2001031696A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| PL188424B1 (en) | 2005-01-31 |
| WO2001031696A1 (en) | 2001-05-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Decisions on the lapse of the protection rights |
Effective date: 20101029 |