PL295313A2 - Cathode of a magnetron-type sputtering apparatus - Google Patents

Cathode of a magnetron-type sputtering apparatus

Info

Publication number
PL295313A2
PL295313A2 PL29531392A PL29531392A PL295313A2 PL 295313 A2 PL295313 A2 PL 295313A2 PL 29531392 A PL29531392 A PL 29531392A PL 29531392 A PL29531392 A PL 29531392A PL 295313 A2 PL295313 A2 PL 295313A2
Authority
PL
Poland
Prior art keywords
magnetron
cathode
sputtering apparatus
type sputtering
type
Prior art date
Application number
PL29531392A
Other versions
PL168601B1 (en
Inventor
Krzysztof Miernik
Original Assignee
Miedzyresortowe Ct Naukowe Eks
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miedzyresortowe Ct Naukowe Eks filed Critical Miedzyresortowe Ct Naukowe Eks
Priority to PL29531392A priority Critical patent/PL168601B1/en
Publication of PL295313A2 publication Critical patent/PL295313A2/en
Publication of PL168601B1 publication Critical patent/PL168601B1/en

Links

PL29531392A 1992-07-15 1992-07-15 Cathode of a magnetron-type sputtering apparatus PL168601B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL29531392A PL168601B1 (en) 1992-07-15 1992-07-15 Cathode of a magnetron-type sputtering apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL29531392A PL168601B1 (en) 1992-07-15 1992-07-15 Cathode of a magnetron-type sputtering apparatus

Publications (2)

Publication Number Publication Date
PL295313A2 true PL295313A2 (en) 1993-05-04
PL168601B1 PL168601B1 (en) 1996-03-29

Family

ID=20058118

Family Applications (1)

Application Number Title Priority Date Filing Date
PL29531392A PL168601B1 (en) 1992-07-15 1992-07-15 Cathode of a magnetron-type sputtering apparatus

Country Status (1)

Country Link
PL (1) PL168601B1 (en)

Also Published As

Publication number Publication date
PL168601B1 (en) 1996-03-29

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