PL278991A2 - Cathode of a magnetron-type sputtering equipment - Google Patents

Cathode of a magnetron-type sputtering equipment

Info

Publication number
PL278991A2
PL278991A2 PL27899189A PL27899189A PL278991A2 PL 278991 A2 PL278991 A2 PL 278991A2 PL 27899189 A PL27899189 A PL 27899189A PL 27899189 A PL27899189 A PL 27899189A PL 278991 A2 PL278991 A2 PL 278991A2
Authority
PL
Poland
Prior art keywords
magnetron
cathode
sputtering equipment
type sputtering
type
Prior art date
Application number
PL27899189A
Other versions
PL153335B2 (en
Inventor
Krzysztof Miernik
Original Assignee
Miedzyresortowe Ct Naukowe Eks
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miedzyresortowe Ct Naukowe Eks filed Critical Miedzyresortowe Ct Naukowe Eks
Priority to PL27899189A priority Critical patent/PL153335B2/en
Publication of PL278991A2 publication Critical patent/PL278991A2/en
Publication of PL153335B2 publication Critical patent/PL153335B2/en

Links

PL27899189A 1989-04-18 1989-04-18 Cathode of a magnetron-type sputtering equipment PL153335B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL27899189A PL153335B2 (en) 1989-04-18 1989-04-18 Cathode of a magnetron-type sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL27899189A PL153335B2 (en) 1989-04-18 1989-04-18 Cathode of a magnetron-type sputtering equipment

Publications (2)

Publication Number Publication Date
PL278991A2 true PL278991A2 (en) 1990-01-22
PL153335B2 PL153335B2 (en) 1991-04-30

Family

ID=20047071

Family Applications (1)

Application Number Title Priority Date Filing Date
PL27899189A PL153335B2 (en) 1989-04-18 1989-04-18 Cathode of a magnetron-type sputtering equipment

Country Status (1)

Country Link
PL (1) PL153335B2 (en)

Also Published As

Publication number Publication date
PL153335B2 (en) 1991-04-30

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