PL261871A2 - Closure arrangement for an epitaxy reactor - Google Patents
Closure arrangement for an epitaxy reactorInfo
- Publication number
- PL261871A2 PL261871A2 PL26187186A PL26187186A PL261871A2 PL 261871 A2 PL261871 A2 PL 261871A2 PL 26187186 A PL26187186 A PL 26187186A PL 26187186 A PL26187186 A PL 26187186A PL 261871 A2 PL261871 A2 PL 261871A2
- Authority
- PL
- Poland
- Prior art keywords
- closure arrangement
- epitaxy reactor
- epitaxy
- reactor
- closure
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CS755685A CS249050B1 (en) | 1985-10-22 | 1985-10-22 | Closure for epitaxial reactor |
Publications (2)
Publication Number | Publication Date |
---|---|
PL261871A2 true PL261871A2 (en) | 1987-10-19 |
PL147427B2 PL147427B2 (en) | 1989-06-30 |
Family
ID=5424942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL26187186A PL147427B2 (en) | 1985-10-22 | 1986-10-15 | Closure arrangement for an epitaxy reactor |
Country Status (3)
Country | Link |
---|---|
CS (1) | CS249050B1 (en) |
PL (1) | PL147427B2 (en) |
SU (1) | SU1663061A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10145021B2 (en) | 2010-07-28 | 2018-12-04 | Slt Technologies, Inc. | Apparatus for processing materials at high temperatures and pressures |
-
1985
- 1985-10-22 CS CS755685A patent/CS249050B1/en unknown
-
1986
- 1986-09-17 SU SU867774273A patent/SU1663061A1/en active
- 1986-10-15 PL PL26187186A patent/PL147427B2/en unknown
Also Published As
Publication number | Publication date |
---|---|
CS249050B1 (en) | 1987-03-12 |
PL147427B2 (en) | 1989-06-30 |
SU1663061A1 (en) | 1991-07-15 |
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