PL253475A2 - Epitaxial reactor - Google Patents

Epitaxial reactor

Info

Publication number
PL253475A2
PL253475A2 PL25347585A PL25347585A PL253475A2 PL 253475 A2 PL253475 A2 PL 253475A2 PL 25347585 A PL25347585 A PL 25347585A PL 25347585 A PL25347585 A PL 25347585A PL 253475 A2 PL253475 A2 PL 253475A2
Authority
PL
Poland
Prior art keywords
epitaxial reactor
epitaxial
reactor
Prior art date
Application number
PL25347585A
Other versions
PL140064B2 (en
Inventor
Marek Tlaczala
Marek Panek
Marek Ratuszek
Original Assignee
Politechnika Wroclawska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Politechnika Wroclawska filed Critical Politechnika Wroclawska
Priority to PL25347585A priority Critical patent/PL140064B2/en
Publication of PL253475A2 publication Critical patent/PL253475A2/en
Publication of PL140064B2 publication Critical patent/PL140064B2/en

Links

PL25347585A 1985-05-17 1985-05-17 Horizontal epitaxial reactor PL140064B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL25347585A PL140064B2 (en) 1985-05-17 1985-05-17 Horizontal epitaxial reactor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL25347585A PL140064B2 (en) 1985-05-17 1985-05-17 Horizontal epitaxial reactor

Publications (2)

Publication Number Publication Date
PL253475A2 true PL253475A2 (en) 1986-03-25
PL140064B2 PL140064B2 (en) 1987-03-31

Family

ID=20026679

Family Applications (1)

Application Number Title Priority Date Filing Date
PL25347585A PL140064B2 (en) 1985-05-17 1985-05-17 Horizontal epitaxial reactor

Country Status (1)

Country Link
PL (1) PL140064B2 (en)

Also Published As

Publication number Publication date
PL140064B2 (en) 1987-03-31

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