PL147427B2 - Closure arrangement for an epitaxy reactor - Google Patents

Closure arrangement for an epitaxy reactor

Info

Publication number
PL147427B2
PL147427B2 PL26187186A PL26187186A PL147427B2 PL 147427 B2 PL147427 B2 PL 147427B2 PL 26187186 A PL26187186 A PL 26187186A PL 26187186 A PL26187186 A PL 26187186A PL 147427 B2 PL147427 B2 PL 147427B2
Authority
PL
Poland
Prior art keywords
closure arrangement
epitaxy reactor
epitaxy
reactor
closure
Prior art date
Application number
PL26187186A
Other versions
PL261871A2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of PL261871A2 publication Critical patent/PL261871A2/en
Publication of PL147427B2 publication Critical patent/PL147427B2/en

Links

PL26187186A 1985-10-22 1986-10-15 Closure arrangement for an epitaxy reactor PL147427B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS755685A CS249050B1 (en) 1985-10-22 1985-10-22 Epitaxial reactor closure

Publications (2)

Publication Number Publication Date
PL261871A2 PL261871A2 (en) 1987-10-19
PL147427B2 true PL147427B2 (en) 1989-06-30

Family

ID=5424942

Family Applications (1)

Application Number Title Priority Date Filing Date
PL26187186A PL147427B2 (en) 1985-10-22 1986-10-15 Closure arrangement for an epitaxy reactor

Country Status (3)

Country Link
CS (1) CS249050B1 (en)
PL (1) PL147427B2 (en)
SU (1) SU1663061A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10145021B2 (en) 2010-07-28 2018-12-04 Slt Technologies, Inc. Apparatus for processing materials at high temperatures and pressures

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10145021B2 (en) 2010-07-28 2018-12-04 Slt Technologies, Inc. Apparatus for processing materials at high temperatures and pressures

Also Published As

Publication number Publication date
SU1663061A1 (en) 1991-07-15
PL261871A2 (en) 1987-10-19
CS249050B1 (en) 1987-03-12

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