PL2540858T3 - Osadzania za pomocą łuku katodowego - Google Patents

Osadzania za pomocą łuku katodowego

Info

Publication number
PL2540858T3
PL2540858T3 PL11005342T PL11005342T PL2540858T3 PL 2540858 T3 PL2540858 T3 PL 2540858T3 PL 11005342 T PL11005342 T PL 11005342T PL 11005342 T PL11005342 T PL 11005342T PL 2540858 T3 PL2540858 T3 PL 2540858T3
Authority
PL
Poland
Prior art keywords
cathodic arc
arc deposition
deposition
cathodic
arc
Prior art date
Application number
PL11005342T
Other languages
English (en)
Inventor
Johan Böhlmark
Hermann Curtins
Original Assignee
Lamina Tech Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lamina Tech Sa filed Critical Lamina Tech Sa
Publication of PL2540858T3 publication Critical patent/PL2540858T3/pl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/52—Means for observation of the coating process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3476—Testing and control
PL11005342T 2011-06-30 2011-06-30 Osadzania za pomocą łuku katodowego PL2540858T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP11005342.8A EP2540858B1 (en) 2011-06-30 2011-06-30 Cathodic arc deposition

Publications (1)

Publication Number Publication Date
PL2540858T3 true PL2540858T3 (pl) 2015-06-30

Family

ID=45062671

Family Applications (1)

Application Number Title Priority Date Filing Date
PL11005342T PL2540858T3 (pl) 2011-06-30 2011-06-30 Osadzania za pomocą łuku katodowego

Country Status (9)

Country Link
US (1) US9587305B2 (pl)
EP (1) EP2540858B1 (pl)
JP (1) JP6129830B2 (pl)
KR (1) KR102021623B1 (pl)
CN (1) CN103732785B (pl)
ES (1) ES2532898T3 (pl)
IL (1) IL230169A (pl)
PL (1) PL2540858T3 (pl)
WO (1) WO2013000990A1 (pl)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102037910B1 (ko) * 2017-03-27 2019-10-30 세메스 주식회사 코팅 장치 및 코팅 방법
CN108504997A (zh) * 2018-03-13 2018-09-07 国宏工具系统（无锡）股份有限公司 一种高光刀电弧涂层工艺
CN110643953B (zh) * 2019-10-14 2021-04-30 四川大学 一种适合铣削加工用的氧化铝/钛铝氮复合涂层及其制备方法
CN110643935B (zh) * 2019-10-14 2021-04-30 四川大学 一种抗月牙洼磨损的氮化铝钛/氧化铝复合涂层及其制备方法
GB202014592D0 (en) * 2020-09-16 2020-10-28 Spts Technologies Ltd Deposition method

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0439561B1 (de) * 1989-06-27 1994-02-16 Hauzer Holding B.V. Verfahren und vorrichtung zur beschichtung von substraten
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5380421A (en) * 1992-11-04 1995-01-10 Gorokhovsky; Vladimir I. Vacuum-arc plasma source
CH688863A5 (de) * 1994-06-24 1998-04-30 Balzers Hochvakuum Verfahren zum Beschichten mindestens eines Werkstueckes und Anlage hierfuer.
DE19609647A1 (de) * 1996-03-12 1997-09-18 Univ Sheffield Hartstoffschicht
JP2000080466A (ja) * 1998-09-01 2000-03-21 Kobe Steel Ltd 真空アーク蒸着装置
US6645354B1 (en) * 2000-04-07 2003-11-11 Vladimir I. Gorokhovsky Rectangular cathodic arc source and method of steering an arc spot
DE10127013A1 (de) * 2001-06-05 2002-12-12 Gabriel Herbert M Lichtbogen-Verdampfungsvorrichtung
DE10347981A1 (de) 2003-10-15 2005-07-07 Gühring, Jörg, Dr. Verschleißschutzschicht für spanabhebende Werkzeuge, insbesondere für rotierende Zerspanungswerkzeuge
SE528789C2 (sv) 2004-09-10 2007-02-13 Sandvik Intellectual Property PVD-belagt skär av hårdmetall samt sätt att tillverka detta
AT7941U1 (de) * 2004-12-02 2005-11-15 Ceratizit Austria Gmbh Werkzeug zur spanabhebenden bearbeitung
WO2006099754A1 (de) 2005-03-24 2006-09-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht
US9997338B2 (en) * 2005-03-24 2018-06-12 Oerlikon Surface Solutions Ag, Pfäffikon Method for operating a pulsed arc source
SE530756C2 (sv) 2006-09-15 2008-09-02 Sandvik Intellectual Property Sätt att tillverka ett belagt skärverktyg av hårdmetall, ett belagt skär och ett belagt roterande skärverktyg
JP4878020B2 (ja) * 2007-09-27 2012-02-15 株式会社神戸製鋼所 真空アーク蒸発源
US8968830B2 (en) * 2007-12-06 2015-03-03 Oerlikon Trading Ag, Trubbach PVD—vacuum coating unit
EP2159821B1 (de) * 2008-09-02 2020-01-15 Oerlikon Surface Solutions AG, Pfäffikon Beschichtungsvorrichtung zum Beschichten eines Substrats, sowie ein Verfahren zum Beschichten eines Substrats

Also Published As

Publication number Publication date
EP2540858B1 (en) 2014-12-17
US9587305B2 (en) 2017-03-07
JP6129830B2 (ja) 2017-05-17
CN103732785A (zh) 2014-04-16
EP2540858A1 (en) 2013-01-02
WO2013000990A1 (en) 2013-01-03
ES2532898T3 (es) 2015-04-01
CN103732785B (zh) 2016-03-16
IL230169A (en) 2016-05-31
JP2014525984A (ja) 2014-10-02
KR102021623B1 (ko) 2019-09-16
US20150034478A1 (en) 2015-02-05
KR20140057253A (ko) 2014-05-12

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