PL2481072T3 - Obrazujący filtr energii dla elektrycznie naładowanych cząstek oraz spektroskop z takim filtrem - Google Patents

Obrazujący filtr energii dla elektrycznie naładowanych cząstek oraz spektroskop z takim filtrem

Info

Publication number
PL2481072T3
PL2481072T3 PL10771675T PL10771675T PL2481072T3 PL 2481072 T3 PL2481072 T3 PL 2481072T3 PL 10771675 T PL10771675 T PL 10771675T PL 10771675 T PL10771675 T PL 10771675T PL 2481072 T3 PL2481072 T3 PL 2481072T3
Authority
PL
Poland
Prior art keywords
spectroscope
same
charged particles
electrically charged
energy filter
Prior art date
Application number
PL10771675T
Other languages
English (en)
Inventor
Dietmar Funnemann
Original Assignee
Dietmar Funnemann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dietmar Funnemann filed Critical Dietmar Funnemann
Publication of PL2481072T3 publication Critical patent/PL2481072T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H01J2237/0535—Mirror analyser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
PL10771675T 2009-09-24 2010-08-31 Obrazujący filtr energii dla elektrycznie naładowanych cząstek oraz spektroskop z takim filtrem PL2481072T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009044989A DE102009044989A1 (de) 2009-09-24 2009-09-24 Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen
EP10771675.5A EP2481072B1 (de) 2009-09-24 2010-08-31 Bildgebender energiefilter für elektrisch geladene teilchen sowie spektroskop mit einem solchen
PCT/EP2010/062724 WO2011036038A1 (de) 2009-09-24 2010-08-31 Bildgebender energiefilter für elektrisch geladene teilchen sowie spektroskop mit einem solchen

Publications (1)

Publication Number Publication Date
PL2481072T3 true PL2481072T3 (pl) 2015-02-27

Family

ID=43242814

Family Applications (1)

Application Number Title Priority Date Filing Date
PL10771675T PL2481072T3 (pl) 2009-09-24 2010-08-31 Obrazujący filtr energii dla elektrycznie naładowanych cząstek oraz spektroskop z takim filtrem

Country Status (10)

Country Link
US (1) US8530835B2 (pl)
EP (1) EP2481072B1 (pl)
JP (1) JP5564116B2 (pl)
CN (1) CN102549704B (pl)
DE (1) DE102009044989A1 (pl)
DK (1) DK2481072T3 (pl)
ES (1) ES2464515T3 (pl)
PL (1) PL2481072T3 (pl)
RU (1) RU2529463C2 (pl)
WO (1) WO2011036038A1 (pl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9697984B2 (en) 2015-10-28 2017-07-04 Thermo Electron Scientific Instruments Llc Charged particle filter
LU92980B1 (en) * 2016-02-19 2017-09-08 Luxembourg Inst Science & Tech List Extraction system for charged secondary particles for use in a mass spectrometer or other charged particle device
EP3792950B1 (en) * 2018-05-09 2024-09-04 National University corporation Nara Institute of Science and Technology Variable reduction ratio spherical aberration correction electrostatic lens, wide angle energy analyzer, and two-dimensional electron spectrometer
DE102019107327A1 (de) * 2019-03-21 2020-09-24 Specs Surface Nano Analysis Gmbh Vorrichtung und Verfahren zum Elektronentransfer von einer Probe zu einem Energieanalysator und Elektronen-Spektrometervorrichtung
GB201910880D0 (en) * 2019-07-30 2019-09-11 Vg Systems Ltd A spectroscopy and imaging system
WO2021202562A1 (en) * 2020-04-01 2021-10-07 Thermo Electron Scientific Instruments Llc Wide field-of-view charged particle filter
CN112147667A (zh) * 2020-09-11 2020-12-29 兰州空间技术物理研究所 一种用于空间低能离子探测的传感器
DE102020133974B3 (de) 2020-12-17 2022-03-17 SURFACE CONCEPT GmbH Energieanalysator für elektrisch geladene Teilchen

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1352167A (fr) 1962-11-28 1964-02-14 Ct Nat De La Rech Scient Et Cs Nouveau dispositif de microanalyse par émission ionique secondaire
GB1332207A (en) * 1971-05-07 1973-10-03 Ass Elect Ind Apparatus for charged particle spectroscopy
SU1647700A1 (ru) * 1988-08-24 1991-05-07 Объединенный Институт Ядерных Исследований Тороидальный электростатический энергоанализатор зар женных частиц
JPH03155030A (ja) * 1989-11-10 1991-07-03 Jeol Ltd 時間／エネルギー分解型電子分光器
DE4129403A1 (de) * 1991-09-04 1993-03-11 Zeiss Carl Fa Abbildungssystem fuer strahlung geladener teilchen mit spiegelkorrektor
DE4310559A1 (de) * 1993-03-26 1994-09-29 Zeiss Carl Fa Abbildendes Elektronenenergiefilter
DE69402283T2 (de) * 1993-05-21 1997-09-18 Philips Electronics Nv Energiefilter mit Korrektur von chromatischen Aberrationen zweiter ordnung
GB9718012D0 (en) * 1997-08-26 1997-10-29 Vg Systems Ltd A spectrometer and method of spectroscopy
US6522056B1 (en) * 1999-07-02 2003-02-18 Coincident Beams Licensing Corporation Method and apparatus for simultaneously depositing and observing materials on a target
JP4662610B2 (ja) * 2000-06-29 2011-03-30 株式会社アルバック 立体収束質量分離器
US6501076B1 (en) 2000-10-11 2002-12-31 Fei Company Electron analyzer having an integrated low pass filter
DE10252129A1 (de) * 2002-11-04 2004-05-27 Omicron Nano Technology Gmbh Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters
US7348566B2 (en) * 2006-02-28 2008-03-25 International Business Machines Corporation Aberration-correcting cathode lens microscopy instrument
US7453062B2 (en) 2006-02-28 2008-11-18 International Business Machines Corporation Energy-filtering cathode lens microscopy instrument
RU2364004C1 (ru) 2008-03-17 2009-08-10 Вячеслав Данилович Саченко Энергофильтр для корпускулярно-оптической системы формирования и передачи изображения

Also Published As

Publication number Publication date
WO2011036038A1 (de) 2011-03-31
US8530835B2 (en) 2013-09-10
EP2481072A1 (de) 2012-08-01
CN102549704B (zh) 2015-09-09
DE102009044989A1 (de) 2011-03-31
US20120261571A1 (en) 2012-10-18
RU2529463C2 (ru) 2014-09-27
ES2464515T3 (es) 2014-06-03
EP2481072B1 (de) 2014-04-16
CN102549704A (zh) 2012-07-04
JP5564116B2 (ja) 2014-07-30
RU2012116206A (ru) 2013-10-27
JP2013506238A (ja) 2013-02-21
DK2481072T3 (da) 2014-07-14

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