PL2280407T3 - Urządzenie napylające posiadające katodę z obrotowymi źródłami i powiązana z nim metoda - Google Patents
Urządzenie napylające posiadające katodę z obrotowymi źródłami i powiązana z nim metodaInfo
- Publication number
- PL2280407T3 PL2280407T3 PL10170789T PL10170789T PL2280407T3 PL 2280407 T3 PL2280407 T3 PL 2280407T3 PL 10170789 T PL10170789 T PL 10170789T PL 10170789 T PL10170789 T PL 10170789T PL 2280407 T3 PL2280407 T3 PL 2280407T3
- Authority
- PL
- Poland
- Prior art keywords
- apparatus including
- sputtering apparatus
- related method
- including cathode
- rotatable targets
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/342—Hollow targets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/3442—Applying energy to the substrate during sputtering using an ion beam
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3417—Arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
- H01J37/3429—Plural materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3432—Target-material dispenser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/461,130 US10586689B2 (en) | 2009-07-31 | 2009-07-31 | Sputtering apparatus including cathode with rotatable targets, and related methods |
EP10170789.1A EP2280407B1 (en) | 2009-07-31 | 2010-07-26 | Sputtering apparatus including cathode with rotatable targets, and related method |
Publications (1)
Publication Number | Publication Date |
---|---|
PL2280407T3 true PL2280407T3 (pl) | 2019-02-28 |
Family
ID=43242628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL10170789T PL2280407T3 (pl) | 2009-07-31 | 2010-07-26 | Urządzenie napylające posiadające katodę z obrotowymi źródłami i powiązana z nim metoda |
Country Status (5)
Country | Link |
---|---|
US (2) | US10586689B2 (pl) |
EP (1) | EP2280407B1 (pl) |
ES (1) | ES2707557T3 (pl) |
PL (1) | PL2280407T3 (pl) |
TR (1) | TR201901436T4 (pl) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10586689B2 (en) * | 2009-07-31 | 2020-03-10 | Guardian Europe S.A.R.L. | Sputtering apparatus including cathode with rotatable targets, and related methods |
CN101988189B (zh) * | 2009-08-07 | 2012-10-10 | 鸿富锦精密工业(深圳)有限公司 | 磁控溅射靶及采用该磁控溅射靶的磁控溅射装置 |
CN103282542A (zh) * | 2011-04-12 | 2013-09-04 | 株式会社爱发科 | 靶及靶的制造方法 |
JP5882934B2 (ja) * | 2012-05-09 | 2016-03-09 | シーゲイト テクノロジー エルエルシー | スパッタリング装置 |
US9809876B2 (en) * | 2014-01-13 | 2017-11-07 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique (C.R.V.C.) Sarl | Endblock for rotatable target with electrical connection between collector and rotor at pressure less than atmospheric pressure |
EP3526810B1 (en) * | 2016-10-14 | 2021-11-10 | Evatec AG | Sputtering source |
DE102016125278A1 (de) * | 2016-12-14 | 2018-06-14 | Schneider Gmbh & Co. Kg | Vorrichtung, Verfahren und Verwendung zur Beschichtung von Linsen |
JP2019189913A (ja) * | 2018-04-26 | 2019-10-31 | 京浜ラムテック株式会社 | スパッタリングカソード、スパッタリングカソード集合体およびスパッタリング装置 |
Family Cites Families (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
LU52106A1 (pl) * | 1966-10-05 | 1968-05-07 | ||
US3756939A (en) * | 1971-10-14 | 1973-09-04 | Materials Research Corp | Target mounting device for sequential sputtering |
US4806220A (en) * | 1986-12-29 | 1989-02-21 | Ppg Industries, Inc. | Method of making low emissivity film for high temperature processing |
US5270517A (en) * | 1986-12-29 | 1993-12-14 | Ppg Industries, Inc. | Method for fabricating an electrically heatable coated transparency |
US4898789A (en) * | 1988-04-04 | 1990-02-06 | Ppg Industries, Inc. | Low emissivity film for automotive heat load reduction |
GB8900166D0 (en) * | 1989-01-05 | 1989-03-01 | Glaverbel | Glass coating |
US5317006A (en) * | 1989-06-15 | 1994-05-31 | Microelectronics And Computer Technology Corporation | Cylindrical magnetron sputtering system |
US5262032A (en) * | 1991-05-28 | 1993-11-16 | Leybold Aktiengesellschaft | Sputtering apparatus with rotating target and target cooling |
DE4125110C2 (de) | 1991-07-30 | 1999-09-09 | Leybold Ag | Magnetron-Zerstäubungskathode für Vakuumbeschichtungsanlagen |
US5178980A (en) * | 1991-09-03 | 1993-01-12 | Xerox Corporation | Photoconductive imaging members with a fullerene compound |
JPH05171432A (ja) | 1991-12-26 | 1993-07-09 | Fujitsu Ltd | スパッタ装置 |
US5302449A (en) * | 1992-03-27 | 1994-04-12 | Cardinal Ig Company | High transmittance, low emissivity coatings for substrates |
US5922176A (en) * | 1992-06-12 | 1999-07-13 | Donnelly Corporation | Spark eliminating sputtering target and method for using and making same |
US5248564A (en) * | 1992-12-09 | 1993-09-28 | Bell Communications Research, Inc. | C-axis perovskite thin films grown on silicon dioxide |
US5688585A (en) * | 1993-08-05 | 1997-11-18 | Guardian Industries Corp. | Matchable, heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same |
US5403458A (en) * | 1993-08-05 | 1995-04-04 | Guardian Industries Corp. | Sputter-coating target and method of use |
US5557462A (en) * | 1995-01-17 | 1996-09-17 | Guardian Industries Corp. | Dual silver layer Low-E glass coating system and insulating glass units made therefrom |
US5527439A (en) * | 1995-01-23 | 1996-06-18 | The Boc Group, Inc. | Cylindrical magnetron shield structure |
US5591314A (en) * | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
GB9606281D0 (en) * | 1996-03-26 | 1996-05-29 | Glaverbel | Coated substrate for a transparent assembly with high selectivity |
US5821001A (en) * | 1996-04-25 | 1998-10-13 | Ppg Industries, Inc. | Coated articles |
FR2757151B1 (fr) * | 1996-12-12 | 1999-01-08 | Saint Gobain Vitrage | Vitrage comprenant un substrat muni d'un empilement de couches minces pour la protection solaire et/ou l'isolation thermique |
DE19726966C1 (de) * | 1997-06-25 | 1999-01-28 | Flachglas Ag | Verfahren zur Herstellung einer transparenten Silberschicht mit hoher spezifischer elektrischer Leitfähigkeit , Glasscheibe mit einem Dünnschichtsystem mit einer solchen Silberschicht und deren Verwendung |
US6287685B1 (en) * | 1997-12-09 | 2001-09-11 | 3M Innovative Properties Company | Rubber article capable of bonding to a pressure-sensitive adhesive and method of making |
US6328858B1 (en) * | 1998-10-01 | 2001-12-11 | Nexx Systems Packaging, Llc | Multi-layer sputter deposition apparatus |
US6808606B2 (en) * | 1999-05-03 | 2004-10-26 | Guardian Industries Corp. | Method of manufacturing window using ion beam milling of glass substrate(s) |
US6368664B1 (en) * | 1999-05-03 | 2002-04-09 | Guardian Industries Corp. | Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon |
US6740211B2 (en) * | 2001-12-18 | 2004-05-25 | Guardian Industries Corp. | Method of manufacturing windshield using ion beam milling of glass substrate(s) |
US6576349B2 (en) * | 2000-07-10 | 2003-06-10 | Guardian Industries Corp. | Heat treatable low-E coated articles and methods of making same |
US7344782B2 (en) * | 2000-07-10 | 2008-03-18 | Guardian Industries Corp. | Coated article with low-E coating including IR reflecting layer(s) and corresponding method |
US6887575B2 (en) * | 2001-10-17 | 2005-05-03 | Guardian Industries Corp. | Heat treatable coated article with zinc oxide inclusive contact layer(s) |
US6445503B1 (en) * | 2000-07-10 | 2002-09-03 | Guardian Industries Corp. | High durable, low-E, heat treatable layer coating system |
US7462397B2 (en) * | 2000-07-10 | 2008-12-09 | Guardian Industries Corp. | Coated article with silicon nitride inclusive layer adjacent glass |
US6625875B2 (en) * | 2001-03-26 | 2003-09-30 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Method of attaching bus bars to a conductive coating for a heatable vehicle window |
US6605540B2 (en) * | 2001-07-09 | 2003-08-12 | Texas Instruments Incorporated | Process for forming a dual damascene structure |
US6936347B2 (en) * | 2001-10-17 | 2005-08-30 | Guardian Industries Corp. | Coated article with high visible transmission and low emissivity |
JP2003147519A (ja) * | 2001-11-05 | 2003-05-21 | Anelva Corp | スパッタリング装置 |
AU2003234484A1 (en) * | 2002-05-06 | 2003-11-11 | Guardian Industries Corp. | Sputter coating apparatus including ion beam source(s), and corresponding method |
US6632491B1 (en) * | 2002-05-21 | 2003-10-14 | Guardian Industries Corp. | IG window unit and method of making the same |
US7140204B2 (en) * | 2002-06-28 | 2006-11-28 | Guardian Industries Corp. | Apparatus and method for bending glass using microwaves |
US6974976B2 (en) * | 2002-09-30 | 2005-12-13 | Miasole | Thin-film solar cells |
JP3920802B2 (ja) * | 2003-03-28 | 2007-05-30 | Jsr株式会社 | 配線、電極およびそれらの形成方法 |
US6989023B2 (en) * | 2003-07-08 | 2006-01-24 | Oralum, Llc | Hygienic treatments of body structures |
US7217460B2 (en) * | 2004-03-11 | 2007-05-15 | Guardian Industries Corp. | Coated article with low-E coating including tin oxide interlayer |
US7150916B2 (en) * | 2004-03-11 | 2006-12-19 | Centre Luxembourg De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Coated article with low-E coating including tin oxide interlayer for high bend applications |
US7311975B2 (en) * | 2004-06-25 | 2007-12-25 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method |
US7229533B2 (en) * | 2004-06-25 | 2007-06-12 | Guardian Industries Corp. | Method of making coated article having low-E coating with ion beam treated and/or formed IR reflecting layer |
US7550067B2 (en) * | 2004-06-25 | 2009-06-23 | Guardian Industries Corp. | Coated article with ion treated underlayer and corresponding method |
US7563347B2 (en) * | 2004-06-25 | 2009-07-21 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus |
US7183559B2 (en) * | 2004-11-12 | 2007-02-27 | Guardian Industries Corp. | Ion source with substantially planar design |
US7405411B2 (en) * | 2005-05-06 | 2008-07-29 | Guardian Industries Corp. | Ion source with multi-piece outer cathode |
KR101213888B1 (ko) * | 2006-05-08 | 2012-12-18 | 엘지디스플레이 주식회사 | 스퍼터링 장치, 그 구동 방법 및 이를 이용한 패널 제조방법 |
US7872422B2 (en) * | 2006-07-18 | 2011-01-18 | Guardian Industries Corp. | Ion source with recess in electrode |
US7488951B2 (en) * | 2006-08-24 | 2009-02-10 | Guardian Industries Corp. | Ion source including magnet and magnet yoke assembly |
US10586689B2 (en) * | 2009-07-31 | 2020-03-10 | Guardian Europe S.A.R.L. | Sputtering apparatus including cathode with rotatable targets, and related methods |
-
2009
- 2009-07-31 US US12/461,130 patent/US10586689B2/en active Active
-
2010
- 2010-07-26 EP EP10170789.1A patent/EP2280407B1/en active Active
- 2010-07-26 PL PL10170789T patent/PL2280407T3/pl unknown
- 2010-07-26 ES ES10170789T patent/ES2707557T3/es active Active
- 2010-07-26 TR TR2019/01436T patent/TR201901436T4/tr unknown
-
2020
- 2020-02-18 US US16/792,910 patent/US11094513B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2280407B1 (en) | 2018-11-07 |
ES2707557T3 (es) | 2019-04-04 |
US20200185205A1 (en) | 2020-06-11 |
EP2280407A2 (en) | 2011-02-02 |
EP2280407A3 (en) | 2014-04-30 |
US11094513B2 (en) | 2021-08-17 |
TR201901436T4 (tr) | 2019-02-21 |
US10586689B2 (en) | 2020-03-10 |
US20110024284A1 (en) | 2011-02-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2339046A4 (en) | CYLINDER SPUTTER TARGET AND METHOD FOR THE PRODUCTION THEREOF | |
PL2280407T3 (pl) | Urządzenie napylające posiadające katodę z obrotowymi źródłami i powiązana z nim metoda | |
EP2548993A4 (en) | CATHODIC SPUTTER TARGET AND MANUFACTURING METHOD THEREOF | |
EP2532634A4 (en) | PROCESS FOR PREPARING SINTERED LICOO2 AND SPUTTER TARGET | |
EP2420590A4 (en) | Cu-Ga ALLOY CATHODIC SPUTTERING TARGET AND MANUFACTURING METHOD THEREOF | |
EP2402482A4 (en) | SPUTTERTARGET AND MANUFACTURING METHOD THEREFOR | |
EP2284293A4 (en) | SINTERED OXIDE SPRAY TARGET AND PROCESS FOR PRODUCTION THEREOF | |
GB201105266D0 (en) | Sputtering apparatus and sputtering method | |
EP2586889A4 (en) | CATHODIC SPRAY DEVICE, DEPOSITION METHOD, AND CONTROL DEVICE | |
EP2391988A4 (en) | Visual target tracking | |
EP2459960A4 (en) | Measuring apparatus, measuring method, and program | |
GB201009847D0 (en) | Deposition method, apparatus, printed object and uses | |
EP2509180A4 (en) | Control apparatus and control method | |
EP2524904A4 (en) | MANUFACTURING METHOD FOR LiCoO2 SINTERED BODY AND SPUTTER TARGET MANUFACTURED THEREOF | |
EP2612953A4 (en) | INDUSTRIAL OBJECT AND MANUFACTURING METHOD THEREFOR | |
HK1172376A1 (en) | Magnetic field generator, magnetron cathode, and sputtering device | |
EP2402466A4 (en) | Manufacturing method and heat-treatment device for high-strength, highly-tough thin steel | |
EP2241649A4 (en) | YTTERBIUM SPRAY TARGET AND METHOD OF MANUFACTURING THE TARGET | |
HK1162619A1 (en) | Ring cathode for use in a magnetron sputtering device | |
SG2014009989A (en) | Sputtering target and manufacturing method therefor | |
SG11201405335SA (en) | Fe-co-based alloy sputtering target material, and method ofproducing same | |
EP2546378A4 (en) | Highly oxidation-resistant ferrite stainless steel plate, highly heat-resistant ferrite stainless steel plate, and manufacturing method therefor | |
EP2572261A4 (en) | Control dial method and apparatus | |
EP2602349A4 (en) | High carbon chromium bearing steel, and preparation method thereof | |
EP2535443A4 (en) | ELECTROLYTIC METAL GENERATION SYSTEM AND METHOD OF ELECTROLYTIC METAL PRODUCTION METHOD |