PL187859B1 - Tool with a system of protective layers - Google Patents

Abstract

I A tool consisting of a body and a system of resistant layers for abrasive wear, the tool being one from a solid carbide finishing cutter, full carbide milling cutter with a ball head, circular cutter cemented carbides and the layer system comprises at least one layer of MeX wherein Me comprises titanium 1 aluminum and X is at least one of nitrogen and carbon, furthermore this layer has a Qr value defined as the ratio of the intensities diffractions of I (200) to I (111), assigned to the planes respectively (200) and (111) in material X-ray diffraction using the 0-20 method, characterized in that the value Qr is chosen such that it is Qr <I, and the intensity value diffraction I (111) is at least 20 times greater than the average noise intensity value II A method of manufacturing a tool comprising a body and an abrasion resistant layer system, comprising at least one layer of hard material in which is applied by the PVD method using a reactive CO gas at least one MeX layer per tool body is selected specific process parameter values for overlay by the PVD method in addition to at least the initial body tension tools against a specific reference potential and making at least one MeX layer as desired Qr values, with the Qr value being defined as the ratio diffraction intensities I (200) to I (III) assigned respectively planes (200) and (111) in the material X-ray diffraction using the 0-20 method where appropriate the Qr value is obtained by adjusting the voltage value an initial tool body, characterized by. that he chooses specific process parameter values for the overlap by PVD method in addition to partial pressure

Description

The present invention relates to a tool comprising a body and an array of wear-resistant layers, and a method of making a tool comprising a body and an array of wear-resistant layers, in particular protective layers.

It is known in the field of tool protection to provide abrasion resistant layer systems that include at least one hard material layer, designated MeX.

From the publication of I. Petrow and others entitled "Average energy applied to the hydrogen: universal parameter for describing ion-assisted film growth ?, Applied Physics Letters, Vol 63, No. 1 5 July 1993., Pages 36-38 it is known layering Ti0 5,5Al _j () 5, 5N onto an amorphous SiO2 substrate by magnetron sputtering using a reactive gas. In this way, the preferred orientation of the layer according to the X-ray diffraction intensity I of the material can be altered by changing the ion flux, the average deposition energy per atom, including the initial substrate tension. Also described is the differentiation of the average energy Ed applied to an atom by changing the ionic energy E1 or the ratio J [/ J _m e of the random accelerated ion flux to the thermal particle flux.

In Japanese Patent Reference Summary, Vol. 096, No. 012, December 26, 1996. and Japanese Patent No. JP-A-08209335 disclose a PVD or CVD method for making hard members coated with carbides, nitrides or carbonitrides in a two-component or three-component system selected from Ti titanium, other than Ti titanium metals from Group IV of the periodic table, metals from Va group and Al aluminum. According to the disclosed method, the peak intensities for the plane (200) in the material I X-ray diffraction model for the plane (111) were determined to be at least 1.5. The value of this ratio can be adjusted by the value of the starting voltage. This reduces the stress4

And the load limit of the coated hard member is improved as well as the degree of adhesion of the coating.

EP 0701982 discloses a layered film of very fine particles which has more than two layers, each consisting of a compound consisting mainly of carbides, nitrides, carbonitrides or oxides of at least one of the elements selected from the group consisting of group IVa elements of the periodic table, group V of elements, group VI of elements', aluminum Al, silicon Si and boron B. Also disclosed is a high hardness composite material for use in tool coatings wherein at least the cutting portion of the tool substrate surface is coated with a layer composed of very fine particles.

Methods used to measure surface structures by means of X-ray diffraction are known. In such measurements, the following terms and quantities are known.

The concept of Q _r , which is defined as the ratio of the diffraction intensities I (200) to I (111) assigned to planes (200) and (111), respectively, in the material X-ray diffraction using the 0-20 method. Hence, the relationship Qr = 1 (200), / 1 (111) is true. The intensity values are measured with the following equipment with the following settings:

Siemens Diffractometer D500,

Power:

Aperture diaphragms:

Detector iris: Time constant: Angular velocity 2υ: Radiation:

Working voltage: 30 kV Working current: 25 mA Potoe.erne diaphragm I: 1 °

Diaphragm position II: 0.1 °

Soller Rift 4 sec

0.05 ° / min

Cu-Ka (0.15406 nm)

Where reference is made to "measured according to MSX", it is referring to the equipment described above and the settings given above. All quantitative results for Qr and I in the present description were obtained by MS. The term "tool body" as used herein means an uncoated tool.

The term "hard material" in this specification denotes a material with which tools, mechanically and thermally stressed during operation, are coated in order to render them abrasion resistant. Preferred examples of such materials are given below as materials generally designated MeX.

A tool comprising a body and an abrasion resistant layer system, the tool being one of a solid carbide finishing cutter, a solid carbide ball head cutter, a carbide disk cutter, and the plies include at least one MeX layer, Me comprises titanium and aluminum and X is at least one of nitrogen and carbon, furthermore this layer has a Qr value defined as the ratio of the diffraction intensities of I (200) to I (111) assigned to planes (200) and (111) respectively in diffraction X-ray imaging of a material using the 0-20 method according to the invention is characterized in that the Qr value is chosen such that it is Qr <1, and the diffraction intensity value I (111) is at least 20 times greater than the average noise intensity value.

Preferably, the value of Q _r satisfies the relationship Qr <0.5, preferably Qr <0.2 and most preferably Qr <0.1.

Preferably, the material of the MeX layer belongs to the group consisting of titanium aluminum nitride, titanium aluminum carbonitride, titanium aluminum boron nitride.

Preferably, Me further comprises at least one further element from the group consisting of boron, zirconium, hafnium, yttrium, silicon, tungsten, chromium, preferably at least one of yttrium, silicon and boron.

Preferably, the content of this further element in Me is i, where i is 0.05% < i < 60%, taking the content of titanium Ti and aluminum Al as 100%.

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Preferably, the tool further comprises a further layer of titanium nitride disposed between at least one said MeX layer and the tool body, this further layer having a thickness d, for which the relationship is true: 0.05 µm <d <5.0 µm.

Preferably, the tool comprises a layer system formed by at least one MeX layer and this further layer.

Preferably, the stress σ inside at least one MeX layer is 2 GPa <σ <8 GPa, preferably 4 GPa <σ <6 GPa.

Preferably, the content of x titanium Ti in Me is 70%> x> 40%, preferably 65%> x> 55%.

Preferably, the y content of aluminum Al in Me is 30% <y <60%, preferably 35% <y <45%.

A method for producing a tool comprising a body and a wear-resistant layer system comprising at least one hard material layer in which at least one MeX layer is applied to the tool body by the PVD method using a reactive gas, specific process parameters are selected for the application by PVD in addition to at least the initial tension of the tool body relative to the specified reference potential, and at least one MeX layer with the desired Q _r value is made, the Qr value being defined as the ratio of the diffraction intensities 1 (200) to 1 (111) assigned to the planes ( 200) and (111) in X-ray diffraction of the material using the Θ-2Θ method, the corresponding Qr value being obtained by setting the initial voltage value of the tool body, according to the invention, it is characterized in that certain process parameter values for PVD deposition are selected in addition to partial pressure re the active gas in the vacuum chamber and / or the initial tension of the tool body relative to the specified reference potential, and at least one MeX layer is made with the desired Qr value, taking advantage of the Qr value as a function of the partial pressure and the initial voltage, the partial pressure is reduced to decrease the Qr value or increase the partial pressure to increase the Qr value and / or increase the starting voltage to decrease the Qr value or decrease the starting voltage to increase the Qr value, thereby obtaining values for at least one of the diffraction intensities I (200) and 1 ( 111) at least 20 times the average noise intensity value.

Preferably, the method further comprises performing PVD deposition using a reactive gas by sputtering with a reactive gas.

Preferably, the method further comprises the step of controlling the sputtering magnetically.

Preferably, the method further comprises the step of applying a layer of MeX to the tool body, Me comprising titanium and aluminum, and X being at least one of nitrogen and carbon, and introduced into the PVD deposition process via a reactive gas.

Preferably, a tool is used in the form of one of a solid carbide finishing cutter, a solid carbide ball head cutter, a carbide disk cutter, the value of Q _{r being} selected such that Qr <1 by adjusting at least one of the reactive pressure gas and initial voltage for PVD deposition using reactive gas.

Preferably, the value of Q _r is chosen such that Qr <0.5, preferably Qr <0.2.

Preferably, the value for Qr is chosen such that Q _r <0.1.

An advantage of the present invention is that the service life of such coated tools is significantly extended. It mainly results from selecting for at least one layer the Qr value for which there is a true relationship

Q _r <2, the tool being a fixed carbide finishing cutter or a solid carbide ball head cutter or a circular cemented carbide cutting tool. Moreover, the diffraction intensity value 1 (111) is greater by a factor of at least 20 than the average noise intensity level when measured by MS.

In accordance with the present invention, it has been found, as shown, that the Qr values lead to a surprisingly high improvement in the wear resistance and thus the service life of the tool, if such a tool is of the type described in the invention.

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Until now, the wear-resistant MeX hard material layer system has been used irrespective of the interaction between the material of the tool body and the mechanical and thermal stresses that the tool is subjected to in operation. According to the present invention, it has been based on the fact that a surprising improvement in wear resistance is obtained when selectively a specific Qr value is combined with a specific type of tool and the diffraction intensity I (111) is greater by a factor of at least 20 than the average noise level, both measured by MS.

The improvement obtained according to the invention is even greater when the Qr is no more than 1, and an even further improvement is obtained by choosing a Qr of no more than 0.5, and even no more than 0.2. The greatest improvement is obtained when the Qr is no more than 0.1. It should be noted that the Qr value can drop to zero if a material with a particular specific crystal orientation is considered in accordance with the declining diffraction intensity 1 (200). Thus, there is no lower limit to the value of Q _r , which is only set on a practical (according to practice) basis.

As is known to those skilled in the art, there is a correlation between the hardness of a layer and the stress involved therein. The higher the stress, the greater the hardness. However, with increasing stress, the adhesion of the layer to the tool body tends to decrease.

For the tool of the present invention, high hardness is more important than the highest possible adhesion. Thus, the stress of the MeX layer is preferably selected at the upper end of the stress range given below. This selection limits the applicable Qr value in practice.

In a preferred embodiment of the tool according to the invention, the MeX material used for the tool is titanium aluminum nitride, titanium aluminum carbonitride or titanium aluminum boron nitride, the first two materials mentioned being currently preferred over titanium aluminum nitride. boric.

In further embodiments of the tool according to the invention, Me, the material of the MeX layer may additionally be at least one of the following elements: boron, zirconium, hafnium, yttrium, silicon, tungsten, chromium, of which it is preferable to use yttrium, optionally silicon or possibly boron. . Such an additional element to titanium and aluminum is introduced into the layer material, preferably with an "i" content, for which there is a real relationship:

0.05% < and < 60% taking Me as 100%.

A further improvement regarding all different solutions of at least one MeX layer is obtained by introducing an additional "d" thickness titanium nitride layer between the MeX layer and the tool body, for which there is a true relationship:

0.05 pm <d <5 pm

In view of the overall objective of the invention, which is to provide a tool according to the invention that can be manufactured at the lowest possible cost and therefore the most economical, it is furthermore recommended that the tool has only one layer of MeX material and an additional layer which is placed between the MeX layer and tool body.

Moreover, the stress "o" in MeX is preferably chosen such that 2 GPa <σ <8 GPa, and in particular

GPa <σ <6 GPa.

The content of titanium "x" in the Me component of the MeX layer is preferably selected so that 70%> x> 40%, and in a preferred embodiment

65%> x> 55%.

On the other hand, the "y" aluminum content in the Me component of the MeX layer material is preferably selected such that

30% < y < 60%, and especially even in a particularly preferred embodiment

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35% <y <45%.

In a further preferred preferred embodiment, both of these relationships are satisfied, i.e. the specific "x" and "y" content limits for titanium and aluminum, respectively.

The deposition, especially of the MeX layer, can be carried out by any known vacuum deposition technique, in particular by the PVD deposition technique using a reactive gas, such as for example sputtering with a reactive gas or vapor deposition using a reactive gas. _{The range of Q r} values used according to the invention is achieved by appropriate control of the process parameters which influence the thickness of the coating.

In order to obtain perfect and reproducible adhesion of the layers to the tool body, the plasma etching technology is used as a preparatory step, based on argon plasma. This technology is disclosed in WO 97/34315, which document is incorporated herein by reference to such etching and subsequent coating. This document is consistent with US Patent Application No. 08 / 710,095, which is also provided by reference.

The subject of the invention is explained in the drawing in which Fig. 1 shows a graph of the partial pressure of nitrogen versus the initial tension of the tool body according to the invention, Fig. 2 - a graph of the value of the diffraction intensity as a function of the diffraction angle 2Θ for the method according to the invention, Fig. 3 - diagram values of diffraction intensity as a function of diffraction angle 20 in another embodiment of the method of the invention; and Fig. 4 is a plot of the value of diffraction intensity as a function of diffraction angle 20 for the embodiment of Fig. 1.

A tool comprising a body and an abrasion resistant layer system, in a preferred embodiment of the invention is a solid carbide finishing cutter or a solid carbide ball head cutter or a circular carbide cutter and comprises a layer system including at least one MeX layer in which Me comprises titanium and aluminum, and X is at least one of nitrogen and carbon, the MeX layer having a Qr value defined as the ratio of the diffraction intensities of I (200) to I (111) assigned to planes (200) and (111), respectively X-ray diffraction of the material using a 0-20 method selected such that Qr <1. The diffraction intensity value I (111) defined above is at least 20 times greater than the average noise intensity value, and the preferred MeX layer material includes titanium aluminum nitride, titanium aluminum carbonitride, titanium aluminum boron nitride, preferably titanium aluminum nitride or titanium aluminum carbonitride. Me may preferably further include at least one further element such as boron, zirconium, hafnium, yttrium, silicon, tungsten and / or chromium. Further preferred embodiments of the tool according to the invention are shown below in Examples 1-5.

The method of manufacturing a tool comprising a body and an abrasion resistant layer system in a preferred embodiment of the invention comprises applying to the tool body at least one hard material layer by PVD using a reactive gas, Titanium and aluminum being selected as Me and X at least one of nitrogen and carbon. In the preferred method, specific process parameter values for PVD deposition are selected in addition to at least one of two parameters including the partial pressure of the reactive gas in the vacuum chamber and the initial tension of the tool body relative to the specified reference potential, and at least one of partial pressure and voltage are set. initial so as to obtain a MeX layer with the desired Qr <1, and also obtain values of at least one of the diffraction intensities I (200) and I (111) at least 20 times greater than the average noise intensity value. Further detailed embodiments of the inventive method are shown below in the following Examples 1-5.

Example 1

An arc ion plating device using magnetically controlled arc sources (as described in WO 97/34315) was used to operate as shown in Table 1 to apply a MeX layer, as also shown in Table 1, over the complete 10 mm diameter carbide end milling cutters with z = 6. The thickness of the applied MeX layer was always 3 µm. So in samples 1 to 5 reals8

The Q _r values according to the invention were determined, while for comparison in samples 6 to 10 this condition was not met. The diffraction intensity value I (111) was always significantly greater than the 20-fold average noise intensity value as measured by MS. The coated finish cutters were used for milling under the conditions below to establish the achievable milling depth until an average side wear width of 0.20 mm was achieved. The obtained milling depth in accordance with the period of use of such tools is also presented in Table 1.

Check Cutting Conditions:

- tool: full carbide end milling cutter, diameter (0) 10 mm, z = 6

- cut material: AISI D2 (DIN 1.2379)

- cutting parameters: Vc = 20 m / min ft = 0.031 mm ap = 15 mm ae = 1 mm climb milling, dry

The following cutting parameters were determined: z - number of teeth, V _c - cutting speed, ft - feed rate per tooth, ap - axial depth of cut and ac - radial depth of cut.

From Table 1, it is easy to see that the finishing cutters coated according to the present invention are much better protected against delamination and abrasive wear than the finishing cutters coated under the comparative conditions.

187 859

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187 859

Cutting distance is defined as the distance or length that has been cut by a suitable tool until the indicated abrasive wear of that tool is achieved, e.g. 0.2 mm.

Example 2

The apparatus that was used to coat in Example 1 was also used to coat samples Nos. 11 to 20 in Table 2. The coated tools and test conditions were identical to Example 1. The layer thicknesses are shown in Table 2.

Note that in addition to the coating of Example 1, a titanium nitride intermediate layer was applied between the MeX layer and the tool body and the outermost layer of the material as shown in Table 2. The condition for the diffraction intensity I (111) and the average value was largely met. noise level as measured by MS.

It should be noted that the arrangement of the intermediate layer between the MeX layer and the tool body always resulted in a further improvement. An additional improvement is obtained by providing the outermost layer of one of the materials such as titanium carbonitride, titanium aluminum nitride, and especially the outermost layer of alumina. It was again observed that by implementing the Qr values determined according to the invention, compared to the comparative samples 16 to 20, a significant improvement was obtained. The outermost 0.3 µm thick alumina layer was applied by plasma chemical vapor deposition. As stated above, the coated finishing mills were tested under the same cutting conditions as in Example 1 and the Qr value was measured by MS.

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187 859

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187 859

Example 3

The solid carbide post-processing milling cutters were coated with the MeX layer as shown in Table 3 by the apparatus of Example 1, while still meeting the inventive Q _r value conditions and (hereinafter) the diffraction intensity ratio 1 (111) versus the average noise level as measured by MS. Thus, one of the metals zirconium, hafnium, yttrium, silicon and chromium was introduced into Me in the amounts indicated above.

The coated finish cutters were kept in an air oven at 750 ° C for 30 minutes to oxidize. Then the obtained thickness of the oxide layer was measured. These results are also shown in Table 3. For comparison, inserts coated according to the invention with various Me compounds of the MeX layer material were also tested. It becomes apparent that by adding the elements to Me according to samples 23 to 32, the thickness of the resulting oxide film is much smaller. With regard to oxidation, the best results are obtained by adding silicon or yttrium.

It should be mentioned, and it is known to those skilled in the art, that in the case of MeX abrasion resistant layers it is correct to state that the better the oxidation resistance is, and therefore the thinner the resulting oxide layer, the better the cutting data achieved.

187 859

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187 859

Example 4

The coating apparatus and method of Example 1 were used. 10 mm diameter solid carbide end mills with 6 teeth were coated with a 3.0 µm MeX layer, and a 0.08 µm thick titanium nitride interlayer was placed between the MeX layer and the tool body. The test conditions for the finishing cutters were as follows: Tool: full high end milling cutter diameter 10 mm, z = 6

Material: AISID2 w acc. To DNi 1.2379)

HRC

Cutting parameters: Vz = 20 m / mm ft = 0.031 mm ap = 15 mm ae = 1 mm dry climb milling

Solid carbide finishing cutters were used until an average side wear width of 0.20 mm was achieved. The result is presented in Table 4. And again the condition of the ratio of the diffraction intensity I (111) to the value of the mean noise level, measured according to MS, was clearly met for the sample No. 35, and for the sample No. 34 the diffraction intensity ratio 1 (200) to the value of the average noise level.

187 859

Distance cutting 17rn 32m Stress | residual (GPa) 2.2 kT J— ( OI 5.0 0.05 ^> 1 about k Ό X 0, 6 1 ABOUT ω 2 4-> IN M. r5 ! 5 r * H. Ή Η WITH i-ł < • H σ5 » 4_J (U (0 cn in -H M '(fl £ Ό 0 S CU £ WITH -H 00 & HO ABOUT e -H OD EH Fr. ABOUT Intensity arc (A) 200 200 Pressure 1 N ₂ 1 Hpa (mbar) OJ flj ¹ CU o X I — 1 OJ K 2 O T. CO m o ą ąj ¹ CU ° X C - ł OJ x S o ą f - ł rH Tension initial (~ V) about <3 * 150 WHAT ³⁵ Comparison Invention 1

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Example 5

The apparatus and method were used according to example 1.

Solid carbide ballhead cutters were 3.1 µm coated with a MeX layer and a titanium nitride TiN interlayer with a thickness of 0.07 µm. The coated tools were tested by milling hardened section steel.

Test conditions:

Tool: pefaiy carbide rrex. with ball head J <77 (Jabro), R4 (fi 8 x 65 mm)

Material: H 11 shaped steel (according to INN

HRC 49.5

Cutting parameters: v _c = 220 m / min ap = 0.5 mm ae = 6 mm no coolant

Tool life was assessed in minutes

187 859

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187 859

Fig. 1 is a linear scale plot of nitrogen partial pressure versus the initial body tension of the tool as used for reactive vapor deposition as the reactive PVD deposition method used to implement the above-discussed examples.

All parameters of the cathodic arc evaporation process, namely: arc current, process temperature, application rate, material vaporized, intensity and configuration of the magnetic field adjacent to the arc source, geometry and size of the process chamber and the workpiece, were kept constant.

In a preferred embodiment according to the invention, the values of these parameters are set, for example, within the following limits: an arc current from 170 A / arc to 200 A / arc; process temperature about 450 ° C, application rate from 0.5 pm / h to 2.4 pm / h. The remaining process parameters, namely the partial pressure of the reactive gas - or the total pressure - and the initial tension of the body of the coated tool as a workpiece, varied and relative to a specific electrical reference potential such as the fundamental potential of the chamber wall.

In this way, titanium aluminum nitride was applied. With regard to the partial pressure of the reactive gas and the initial tension of the tool body, different operating points were established and the obtained Qr values for the deposited hard material layers were measured according to MS.

It turned out that in the diagram of Fig. 1 there is a region P which extends in a first approximation linearly from the at least adjacent origin of the coordinate system, in which the obtained layer leads to very low XRD values of the diffraction intensity I (200) and I (111) . It is obvious that a considerable number of measurements must be made in order to accurately determine the limits of P. In this field, none of the diffraction intensity values 1 (200) and I (111) is 20 times greater than the mean noise level as measured by MS.

On one side of this region P, and as shown in Fig. 1, Qr is greater than 1, and in the other region relative to P, Qr is less than 1. In both of these regions, at least one of the diffraction intensity values I (200), I (111) is greater than 20 times the average noise floor value as measured by MS.

As shown by the arrow in Figure 1, reducing the partial pressure of the reactive gas, or the total pressure if this is practically equal to the partial pressure, and possibly increasing the initial tension of the coated tool body leads to a decrease in Qr. Thus, the method according to the invention for producing a tool having a body and an abrasion-resistant layer system, the system of which comprises at least one layer of hard material, comprises the step of applying the PVD method using a reactive gas of at least one layer of hard material in a vacuum chamber. while pre-selecting process parameter values for the PVD deposition process step in addition to one or both of these process parameters, namely the partial pressure of the reactive gas and the initial tension of the tool body. One or both of these two parameters are then adjusted to achieve the desired Qr values, and thus, according to the present invention, the starting voltage is increased and possibly the partial pressure of the reactive gas is decreased to obtain Qr values which, as explained above, are not more than 2, preferably not more than 1, even more preferably not more than 0.5 or even not more than 0.2. In addition to the Qr value used according to the invention, in this "left region", the diffraction intensity I (111) is greater than P, in particular much greater than 20 times the average noise intensity level measured by MS.

Fig. 2 shows the typical values of diffraction intensity as a function of diffraction angle 2Θ for a hard titanium aluminum nitride material layer superimposed in the region of Qr> 1 in Fig. 1, resulting in a Qr value = 5.4. The average noise level N * is much lower than the quotient of the diffraction value I (200) / 20. The measurement is carried out according to MS

Fig. 3 is a diagram analogous to that of Fig. 1, but the application of titanium aluminum nitride is governed by the initial voltage and the partial pressure of nitrogen, resulting in the invention Qr <1. The resulting value Qr ex22

187 859 is 0.03. In this case, the diffraction intensity value I (111) is again greater than twenty times the average noise intensity level measured by MS.

It should be noted that in Fig. 1, the corresponding values in the respective areas are recorded at each working point measured (by MS).

Fig. 4 shows a graph analogous to that of Figs. 2 and 3 for the operating point P1 in Fig. 1. It can be seen that the diffraction intensities I (200) and I (111) are significantly lower compared to the intensities in the external area. area P. Neither of these diffraction intensity values I (200) and I (111) reaches 20 times the average noise floor value N *.

Thus, by simply adjusting at least one of the two reactive process parameters regulating Qr, namely the partial pressure of the reactive gas and the initial tension of the workpiece body, the value of Qr used according to the invention is adjusted.

1 shows generally the direction of adjustment for lowering Qr by 8Qr <0, and it is evident that in the opposite direction of adjustment of the two adjustable process parameters an increase in Qr is obtained.

187 859

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187 859

Claims (17)

Patent claims 1. A tool comprising a body and an abrasion resistant layer system, the tool being one of a solid carbide finishing cutter, a solid carbide ball head cutter, a carbide disk cutter, and the plies include at least one MeX layer, with where Me comprises titanium and aluminum and X is at least one of nitrogen and carbon, furthermore this layer has a Q _r value defined as the ratio of the diffraction rates I (200) to I (111) assigned to planes (200) and (111) respectively ) in X-ray diffraction of the material using the 0-20 method, characterized in that the value of Qr is chosen such that it is Qr <1, and the value of the diffraction intensity I (111) is at least 20 times greater than the average value of the noise intensity. 2. The tool according to claim 3. The method according to claim 1, characterized in that the Q _R value satisfies the relationship Qr <0.5, preferably Qr <0.2, in particular Qr <0.1. 3. The tool according to p. The method of claim 1, wherein the MeX layer material belongs to the group consisting of titanium aluminum nitride, titanium aluminum carbonitride, titanium aluminum boron nitride. 4. The tool according to p. The method of claim 1 or 3, characterized in that Me further comprises at least one further element from the group consisting of boron, zirconium, hafnium, yttrium, silicon, tungsten, chromium, preferably at least one of yttrium, silicon and boron. 5. The tool according to p. 4. The method of claim 4, characterized in that the content of said further element in Me is i, where i is 0.05% <i <60%, taking the content of titanium Ti and aluminum Al as 100%. 6. The tool according to p. The method of claim 1, further comprising a further layer of titanium nitride disposed between at least one said MeX layer and the tool body, the further layer having a thickness d, for which the relationship is true: 0.05 pm <d <5.0 pm. Tool according to p. The method of claim 6, characterized in that it comprises a layer system formed by at least one MeX layer and the further layer. 8. The tool according to p. 3. The interior of the at least one MeX layer is 2 GPa <σ <8 GPa, preferably 4 GPa <σ <6 GPa. The tool according to p. 1 or 2 or 3 or 5 or 6 or 7, characterized in that the content x of titanium Ti in Me is 70%> x> 40%, preferably 65%> x> 55%. The tool according to p. 1, 2, 3, 5, 6 or 7 characterized in that the y content of aluminum Al in Me is 30% < y < 60%, preferably 35% < y < 45%. 11. A method for producing a tool comprising a body and an abrasion-resistant layer system, including at least one hard material layer, in which at least one MeX layer is applied to the tool body by the PVD method using a reactive gas, the process parameters are selected for specific values for PVD deposition in addition to at least the initial tension of the tool body relative to the specified reference potential, and at least one MeX layer is made with the desired Qr value, the Q _r value being defined as the ratio of the diffraction intensities I (200) to I (111) assigned respectively planes (200) and (111) in the X-ray diffraction of the material using the 0-20 method, the corresponding Qr value is obtained by setting the initial voltage value of the tool body, characterized in that specific values of the process parameters for the PVD deposition are selected in addition to the partial reactive gas pressure in the chamber e vacuum and / or initial tension 187 859 of the tool body with respect to a defined reference potential, and at least one MeX layer with the desired Qr value is made, whereby, given that the Qr value is a function of the partial pressure and the initial voltage, the partial pressure is reduced to decrease the Qr value or the pressure is increased partial to increase the Qr value and / or increase the starting voltage to decrease the Qr value or decrease the starting voltage to increase the Qr value, thereby obtaining values of at least one of the diffraction intensities I (200) and I (111) at least 20 times greater than the average noise intensity value. 12. The method according to p. The process of claim 11, further comprising performing PVD deposition with a reactive gas by sputtering with a reactive gas. 13. The method according to p. The process of claim 12, further comprising the step of controlling sputtering magnetically. 14. The method according to p. The method of claim 11, 12 or 13, further comprising the step of applying a layer of MeX to the tool body, Me comprising titanium and aluminum, and X being at least one of nitrogen and carbon, and being introduced into the PVD deposition process via a reactive gas. 15. The method according to p. The tool of claim 14, wherein the tool is one of a solid carbide finishing cutter, a solid carbide ball head cutter, a carbide disk cutter, Qr being selected such that Qr <1 by adjusting at least one parameter from reactive gas pressure and initial voltage for PVD deposition using reactive gas. 16. The method according to p. The method of claim 15, characterized in that the Qr value is chosen such that Qr <0.5, preferably Qr <0.2. 17. The method according to p. The method of claim 16, wherein the Qr value is selected such that Qr <0.1.