PH12015501241A1 - Device and method for limiting force - Google Patents

Device and method for limiting force

Info

Publication number
PH12015501241A1
PH12015501241A1 PH12015501241A PH12015501241A PH12015501241A1 PH 12015501241 A1 PH12015501241 A1 PH 12015501241A1 PH 12015501241 A PH12015501241 A PH 12015501241A PH 12015501241 A PH12015501241 A PH 12015501241A PH 12015501241 A1 PH12015501241 A1 PH 12015501241A1
Authority
PH
Philippines
Prior art keywords
force exerted
gripper
spring
actuator
force
Prior art date
Application number
PH12015501241A
Other languages
English (en)
Inventor
Roy Philippe
Dromard Pascal
Original Assignee
Ismeca Semiconductor Holding
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ismeca Semiconductor Holding filed Critical Ismeca Semiconductor Holding
Publication of PH12015501241A1 publication Critical patent/PH12015501241A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Measuring Leads Or Probes (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Environmental & Geological Engineering (AREA)
  • Linear Motors (AREA)
PH12015501241A 2012-12-19 2015-06-02 Device and method for limiting force PH12015501241A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH28742012 2012-12-19
PCT/EP2013/077437 WO2014096218A1 (fr) 2012-12-19 2013-12-19 Dispositif et procede de limitation de force

Publications (1)

Publication Number Publication Date
PH12015501241A1 true PH12015501241A1 (en) 2015-08-17

Family

ID=49956136

Family Applications (1)

Application Number Title Priority Date Filing Date
PH12015501241A PH12015501241A1 (en) 2012-12-19 2015-06-02 Device and method for limiting force

Country Status (6)

Country Link
EP (1) EP2936176A1 (fr)
KR (1) KR20150097535A (fr)
CN (1) CN105008941B (fr)
MY (1) MY192591A (fr)
PH (1) PH12015501241A1 (fr)
WO (1) WO2014096218A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3311959A1 (fr) * 2016-10-19 2018-04-25 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Actionneur linéaire de haute précision
EP3757586B1 (fr) * 2019-06-26 2023-07-05 Etel S.A. Procédé et système de mouvement automatique pour commander un dispositif de manipulation de composants

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4163970A (en) * 1975-05-23 1979-08-07 Allinquant F M Pneumatic springs and other telescopic systems
US5422554A (en) * 1993-03-05 1995-06-06 Motorola, Inc. Vacuum nozzle capable of adjustable placing force
JP3225340B2 (ja) * 1995-07-27 2001-11-05 株式会社新川 リードフレームの吸着保持装置
WO2003071288A1 (fr) * 2002-02-20 2003-08-28 Ismeca Semiconductor Holding Sa Actionneur de contacts avec contrôle de la force de contact
US7583100B2 (en) * 2006-11-30 2009-09-01 Sts Instruments, Inc. Test head for testing electrical components
US7839138B2 (en) * 2007-01-29 2010-11-23 Electro Scientific Industries, Inc. Adjustable force electrical contactor
TWI497084B (zh) * 2010-09-30 2015-08-21 Ismeca Semiconductor Holding 電性接點及測試平台
CN103229610B (zh) * 2010-11-30 2016-01-20 上野精机株式会社 电子零件的保持装置、检查装置以及分类装置

Also Published As

Publication number Publication date
WO2014096218A1 (fr) 2014-06-26
KR20150097535A (ko) 2015-08-26
CN105008941A (zh) 2015-10-28
CN105008941B (zh) 2018-12-04
MY192591A (en) 2022-08-29
EP2936176A1 (fr) 2015-10-28

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