NO942865D0 - - Google Patents
Info
- Publication number
- NO942865D0 NO942865D0 NO942865A NO942865A NO942865D0 NO 942865 D0 NO942865 D0 NO 942865D0 NO 942865 A NO942865 A NO 942865A NO 942865 A NO942865 A NO 942865A NO 942865 D0 NO942865 D0 NO 942865D0
- Authority
- NO
- Norway
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
- C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
- C09C1/40—Compounds of aluminium
- C09C1/407—Aluminium oxides or hydroxides
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
- C09K3/1418—Abrasive particles per se obtained by division of a mass agglomerated by sintering
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/51—Particles with a specific particle size distribution
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07759594A JP3416855B2 (ja) | 1994-04-15 | 1994-04-15 | 研磨用組成物および研磨方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
NO942865D0 true NO942865D0 (es) | 1994-08-02 |
NO942865L NO942865L (no) | 1995-10-16 |
Family
ID=13638318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO942865A NO942865L (no) | 1994-04-15 | 1994-08-02 | Lappeblanding |
Country Status (5)
Country | Link |
---|---|
US (1) | US5527370A (es) |
EP (1) | EP0677562B1 (es) |
JP (1) | JP3416855B2 (es) |
DE (1) | DE69424529T2 (es) |
NO (1) | NO942865L (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5964953A (en) * | 1998-05-26 | 1999-10-12 | Memc Electronics Materials, Inc. | Post-etching alkaline treatment process |
US6270395B1 (en) | 1998-09-24 | 2001-08-07 | Alliedsignal, Inc. | Oxidizing polishing slurries for low dielectric constant materials |
KR100481651B1 (ko) * | 2000-08-21 | 2005-04-08 | 가부시끼가이샤 도시바 | 화학 기계 연마용 슬러리 및 반도체 장치의 제조 방법 |
JP2003229392A (ja) * | 2001-11-28 | 2003-08-15 | Shin Etsu Handotai Co Ltd | シリコンウエーハの製造方法及びシリコンウエーハ並びにsoiウエーハ |
JP5381701B2 (ja) * | 2007-02-27 | 2014-01-08 | 日立化成株式会社 | 金属用研磨液及び研磨方法 |
US8123828B2 (en) * | 2007-12-27 | 2012-02-28 | 3M Innovative Properties Company | Method of making abrasive shards, shaped abrasive particles with an opening, or dish-shaped abrasive particles |
TWI547552B (zh) * | 2012-03-19 | 2016-09-01 | 福吉米股份有限公司 | 硏光加工用硏磨材及使用此之基板的製造方法 |
US9340706B2 (en) | 2013-10-10 | 2016-05-17 | Cabot Microelectronics Corporation | Mixed abrasive polishing compositions |
WO2020160286A1 (en) | 2019-01-31 | 2020-08-06 | Eminess Technologies, LLC | Multi-modal diamond abrasive package or slurry for polishing hard substrates |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3121623A (en) * | 1961-03-17 | 1964-02-18 | Nesin Asher | Method of making crystalline alumina lapping powder |
DE2850064B1 (de) * | 1978-11-18 | 1980-05-08 | Giulini Chemie | Hexagonale tafelfoermige alpha-Aluminiumoxid-Einkristalle und Verfahren zu ihrer Herstellung |
JPH01121164A (ja) * | 1987-11-05 | 1989-05-12 | Shin Etsu Chem Co Ltd | 微粉研摩材 |
US5296085A (en) * | 1989-09-21 | 1994-03-22 | Atochem | Macrocrystalline α-alumina hexagonal platelets |
FR2652075B1 (fr) * | 1989-09-21 | 1991-12-06 | Atochem | Macrocristaux d'alumine alpha sous forme de plaquettes et procede d'obtention. |
JPH06104816B2 (ja) * | 1990-02-09 | 1994-12-21 | 日本研磨材工業株式会社 | 焼結アルミナ砥粒及びその製造方法 |
JPH0781132B2 (ja) * | 1990-08-29 | 1995-08-30 | 株式会社フジミインコーポレーテッド | 研磨剤組成物 |
JPH06104817B2 (ja) * | 1990-10-09 | 1994-12-21 | 日本研磨材工業株式会社 | アルミナ―ジルコニア系ラップ研磨材とその製造方法及び研磨用組成物 |
US5277702A (en) * | 1993-03-08 | 1994-01-11 | St. Gobain/Norton Industrial Ceramics Corp. | Plately alumina |
US5300130A (en) * | 1993-07-26 | 1994-04-05 | Saint Gobain/Norton Industrial Ceramics Corp. | Polishing material |
-
1994
- 1994-04-15 JP JP07759594A patent/JP3416855B2/ja not_active Expired - Fee Related
- 1994-06-17 US US08/261,428 patent/US5527370A/en not_active Expired - Fee Related
- 1994-07-05 DE DE69424529T patent/DE69424529T2/de not_active Expired - Fee Related
- 1994-07-05 EP EP94304945A patent/EP0677562B1/en not_active Expired - Lifetime
- 1994-08-02 NO NO942865A patent/NO942865L/no unknown
Also Published As
Publication number | Publication date |
---|---|
DE69424529D1 (de) | 2000-06-21 |
US5527370A (en) | 1996-06-18 |
NO942865L (no) | 1995-10-16 |
JP3416855B2 (ja) | 2003-06-16 |
EP0677562A1 (en) | 1995-10-18 |
DE69424529T2 (de) | 2001-01-18 |
JPH07278527A (ja) | 1995-10-24 |
EP0677562B1 (en) | 2000-05-17 |