DE69424529T2 - Zusammensetzung zum Läppen - Google Patents

Zusammensetzung zum Läppen

Info

Publication number
DE69424529T2
DE69424529T2 DE69424529T DE69424529T DE69424529T2 DE 69424529 T2 DE69424529 T2 DE 69424529T2 DE 69424529 T DE69424529 T DE 69424529T DE 69424529 T DE69424529 T DE 69424529T DE 69424529 T2 DE69424529 T2 DE 69424529T2
Authority
DE
Germany
Prior art keywords
lapping composition
lapping
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69424529T
Other languages
English (en)
Other versions
DE69424529D1 (de
Inventor
Masaaki Kubo
Koji Nishikawa
Shinji Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujimi Inc
Original Assignee
Fujimi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujimi Inc filed Critical Fujimi Inc
Application granted granted Critical
Publication of DE69424529D1 publication Critical patent/DE69424529D1/de
Publication of DE69424529T2 publication Critical patent/DE69424529T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/40—Compounds of aluminium
    • C09C1/407—Aluminium oxides or hydroxides
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C09K3/1418—Abrasive particles per se obtained by division of a mass agglomerated by sintering
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE69424529T 1994-04-15 1994-07-05 Zusammensetzung zum Läppen Expired - Fee Related DE69424529T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07759594A JP3416855B2 (ja) 1994-04-15 1994-04-15 研磨用組成物および研磨方法

Publications (2)

Publication Number Publication Date
DE69424529D1 DE69424529D1 (de) 2000-06-21
DE69424529T2 true DE69424529T2 (de) 2001-01-18

Family

ID=13638318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69424529T Expired - Fee Related DE69424529T2 (de) 1994-04-15 1994-07-05 Zusammensetzung zum Läppen

Country Status (5)

Country Link
US (1) US5527370A (de)
EP (1) EP0677562B1 (de)
JP (1) JP3416855B2 (de)
DE (1) DE69424529T2 (de)
NO (1) NO942865L (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5964953A (en) * 1998-05-26 1999-10-12 Memc Electronics Materials, Inc. Post-etching alkaline treatment process
US6270395B1 (en) 1998-09-24 2001-08-07 Alliedsignal, Inc. Oxidizing polishing slurries for low dielectric constant materials
KR100481651B1 (ko) * 2000-08-21 2005-04-08 가부시끼가이샤 도시바 화학 기계 연마용 슬러리 및 반도체 장치의 제조 방법
JP2003229392A (ja) * 2001-11-28 2003-08-15 Shin Etsu Handotai Co Ltd シリコンウエーハの製造方法及びシリコンウエーハ並びにｓｏｉウエーハ
KR101418626B1 (ko) * 2007-02-27 2014-07-14 히타치가세이가부시끼가이샤 금속용 연마액 및 연마방법
US8123828B2 (en) * 2007-12-27 2012-02-28 3M Innovative Properties Company Method of making abrasive shards, shaped abrasive particles with an opening, or dish-shaped abrasive particles
TWI547552B (zh) * 2012-03-19 2016-09-01 福吉米股份有限公司 硏光加工用硏磨材及使用此之基板的製造方法
US9340706B2 (en) 2013-10-10 2016-05-17 Cabot Microelectronics Corporation Mixed abrasive polishing compositions
EP3918023A4 (de) 2019-01-31 2022-10-05 Pureon Inc. Multimodale diamantschleifverpackung oder aufschlämmung zum polieren von harten substraten

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3121623A (en) * 1961-03-17 1964-02-18 Nesin Asher Method of making crystalline alumina lapping powder
DE2850064B1 (de) * 1978-11-18 1980-05-08 Giulini Chemie Hexagonale tafelfoermige alpha-Aluminiumoxid-Einkristalle und Verfahren zu ihrer Herstellung
JPH01121164A (ja) * 1987-11-05 1989-05-12 Shin Etsu Chem Co Ltd 微粉研摩材
FR2652075B1 (fr) * 1989-09-21 1991-12-06 Atochem Macrocristaux d'alumine alpha sous forme de plaquettes et procede d'obtention.
US5296085A (en) * 1989-09-21 1994-03-22 Atochem Macrocrystalline α-alumina hexagonal platelets
JPH06104816B2 (ja) * 1990-02-09 1994-12-21 日本研磨材工業株式会社 焼結アルミナ砥粒及びその製造方法
JPH0781132B2 (ja) * 1990-08-29 1995-08-30 株式会社フジミインコーポレーテッド 研磨剤組成物
JPH06104817B2 (ja) * 1990-10-09 1994-12-21 日本研磨材工業株式会社 アルミナ―ジルコニア系ラップ研磨材とその製造方法及び研磨用組成物
US5277702A (en) * 1993-03-08 1994-01-11 St. Gobain/Norton Industrial Ceramics Corp. Plately alumina
US5300130A (en) * 1993-07-26 1994-04-05 Saint Gobain/Norton Industrial Ceramics Corp. Polishing material

Also Published As

Publication number Publication date
EP0677562B1 (de) 2000-05-17
US5527370A (en) 1996-06-18
NO942865L (no) 1995-10-16
JP3416855B2 (ja) 2003-06-16
DE69424529D1 (de) 2000-06-21
EP0677562A1 (de) 1995-10-18
NO942865D0 (de) 1994-08-02
JPH07278527A (ja) 1995-10-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee