NO332873B1 - Temperaturmalende trykksensor - Google Patents
Temperaturmalende trykksensorInfo
- Publication number
- NO332873B1 NO332873B1 NO20082678A NO20082678A NO332873B1 NO 332873 B1 NO332873 B1 NO 332873B1 NO 20082678 A NO20082678 A NO 20082678A NO 20082678 A NO20082678 A NO 20082678A NO 332873 B1 NO332873 B1 NO 332873B1
- Authority
- NO
- Norway
- Prior art keywords
- temperature
- sensor
- pressure sensor
- film structure
- temperature sensor
- Prior art date
Links
- 239000010408 film Substances 0.000 claims description 61
- 239000013078 crystal Substances 0.000 claims description 17
- 239000010409 thin film Substances 0.000 claims description 13
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 238000007639 printing Methods 0.000 claims description 3
- 238000010897 surface acoustic wave method Methods 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims 1
- 239000003292 glue Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 6
- 230000001419 dependent effect Effects 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 238000009529 body temperature measurement Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
- G01L9/085—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20082678A NO332873B1 (no) | 2008-06-10 | 2008-06-10 | Temperaturmalende trykksensor |
| PCT/NO2009/000215 WO2009151338A1 (fr) | 2008-06-10 | 2009-06-10 | Capteur de pression mesurant la température |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20082678A NO332873B1 (no) | 2008-06-10 | 2008-06-10 | Temperaturmalende trykksensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NO20082678L NO20082678L (no) | 2009-12-11 |
| NO332873B1 true NO332873B1 (no) | 2013-01-28 |
Family
ID=40941773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20082678A NO332873B1 (no) | 2008-06-10 | 2008-06-10 | Temperaturmalende trykksensor |
Country Status (2)
| Country | Link |
|---|---|
| NO (1) | NO332873B1 (fr) |
| WO (1) | WO2009151338A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435384B (zh) * | 2011-12-02 | 2013-12-11 | 上海交通大学 | 基于纵横应力调整的saw高温压力传感器温度补偿方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3561832A (en) * | 1969-12-05 | 1971-02-09 | Hewlett Packard Co | Quartz resonator pressure transducer |
| GB0314240D0 (en) * | 2003-06-19 | 2003-07-23 | Schlumberger Holdings | Method for dynamic compensation with temperature in the pressure determination of a pressure gauge |
| KR100555665B1 (ko) * | 2004-06-11 | 2006-03-03 | 삼성전자주식회사 | 복합센서 및 그 제조방법 |
| US8294332B2 (en) * | 2007-07-02 | 2012-10-23 | Schlumberger Technology Corporation | Pressure transducer |
-
2008
- 2008-06-10 NO NO20082678A patent/NO332873B1/no not_active IP Right Cessation
-
2009
- 2009-06-10 WO PCT/NO2009/000215 patent/WO2009151338A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| NO20082678L (no) | 2009-12-11 |
| WO2009151338A1 (fr) | 2009-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM1K | Lapsed by not paying the annual fees |