NO319740B1 - Fremgangsmate og anordning for a generere en laserstrale - Google Patents
Fremgangsmate og anordning for a generere en laserstrale Download PDFInfo
- Publication number
- NO319740B1 NO319740B1 NO19964149A NO964149A NO319740B1 NO 319740 B1 NO319740 B1 NO 319740B1 NO 19964149 A NO19964149 A NO 19964149A NO 964149 A NO964149 A NO 964149A NO 319740 B1 NO319740 B1 NO 319740B1
- Authority
- NO
- Norway
- Prior art keywords
- pulse
- laser device
- voltage
- range
- gas
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000007789 gas Substances 0.000 claims description 68
- 229910052736 halogen Inorganic materials 0.000 claims description 16
- 150000002367 halogens Chemical class 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 13
- 230000036961 partial effect Effects 0.000 claims description 13
- 238000004140 cleaning Methods 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 5
- 230000005865 ionizing radiation Effects 0.000 claims description 5
- 239000012159 carrier gas Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 210000002381 plasma Anatomy 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 150000002366 halogen compounds Chemical class 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
- H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
- Particle Accelerators (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL9500197A NL9500197A (nl) | 1995-02-02 | 1995-02-02 | Werkwijze en inrichting voor het opwekken van een laserbundel. |
| PCT/NL1996/000050 WO1996024181A1 (fr) | 1995-02-02 | 1996-02-01 | Procede et dispositif de production d'un faisceau laser |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO964149D0 NO964149D0 (no) | 1996-09-30 |
| NO964149L NO964149L (no) | 1996-11-05 |
| NO319740B1 true NO319740B1 (no) | 2005-09-12 |
Family
ID=19865535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO19964149A NO319740B1 (no) | 1995-02-02 | 1996-09-30 | Fremgangsmate og anordning for a generere en laserstrale |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5818864A (fr) |
| EP (1) | EP0754360B1 (fr) |
| JP (1) | JP3038015B2 (fr) |
| AT (1) | ATE239989T1 (fr) |
| AU (1) | AU692068B2 (fr) |
| CA (1) | CA2186959C (fr) |
| DE (1) | DE69627936T2 (fr) |
| NL (1) | NL9500197A (fr) |
| NO (1) | NO319740B1 (fr) |
| WO (1) | WO1996024181A1 (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1066666B1 (fr) * | 1999-02-03 | 2008-08-06 | TRUMPF LASERTECHNIK GmbH | Laser muni d'un dispositif pour modifier la repartition de l'intensite de la lumiere laser sur la section transversale du faisceau laser |
| US20020107510A1 (en) * | 2001-02-05 | 2002-08-08 | Andrews Robert R. | Laser apparatus useful for myocardial revascularization |
| US8081214B2 (en) | 2004-10-12 | 2011-12-20 | Enforcement Video, Llc | Method of and system for mobile surveillance and event recording |
| US7633989B2 (en) * | 2005-06-27 | 2009-12-15 | Cymer, Inc. | High pulse repetition rate gas discharge laser |
| WO2009102477A1 (fr) | 2008-02-15 | 2009-08-20 | Enforcement Video, Llc | Système et procédé pour un stockage haute résolution d'images |
| US9349648B2 (en) * | 2014-07-22 | 2016-05-24 | Applied Materials, Inc. | Hybrid wafer dicing approach using a rectangular shaped two-dimensional top hat laser beam profile or a linear shaped one-dimensional top hat laser beam profile laser scribing process and plasma etch process |
| US10341605B1 (en) | 2016-04-07 | 2019-07-02 | WatchGuard, Inc. | Systems and methods for multiple-resolution storage of media streams |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3783403A (en) * | 1972-09-22 | 1974-01-01 | Trw Inc | Double pulse laser |
| US4393505A (en) * | 1978-07-24 | 1983-07-12 | Gte Sylvania Incorporated | Gas discharge laser having a buffer gas of neon |
| US4629611A (en) * | 1985-04-29 | 1986-12-16 | International Business Machines Corporation | Gas purifier for rare-gas fluoride lasers |
| US4679203A (en) * | 1985-06-17 | 1987-07-07 | Canadian Patents And Development Limited | Magnetically induced pulser laser excitation system |
| US5313487A (en) * | 1991-05-23 | 1994-05-17 | Mitsubishi Denki Kabushiki Kaisha | Discharge excitation gas laser apparatus |
| US5309462A (en) * | 1993-02-17 | 1994-05-03 | National Research Council Of Canada | Magnetic spiker gas laser excitation circuit |
| US5592488A (en) * | 1995-06-07 | 1997-01-07 | Micron Technology, Inc. | Method and apparatus for pipelined multiplexing employing analog delays for a multiport interface |
-
1995
- 1995-02-02 NL NL9500197A patent/NL9500197A/nl active Search and Examination
-
1996
- 1996-02-01 DE DE69627936T patent/DE69627936T2/de not_active Expired - Fee Related
- 1996-02-01 WO PCT/NL1996/000050 patent/WO1996024181A1/fr active IP Right Grant
- 1996-02-01 US US08/716,307 patent/US5818864A/en not_active Expired - Fee Related
- 1996-02-01 AT AT96904335T patent/ATE239989T1/de not_active IP Right Cessation
- 1996-02-01 JP JP08523435A patent/JP3038015B2/ja not_active Expired - Fee Related
- 1996-02-01 CA CA002186959A patent/CA2186959C/fr not_active Expired - Fee Related
- 1996-02-01 AU AU48460/96A patent/AU692068B2/en not_active Ceased
- 1996-02-01 EP EP96904335A patent/EP0754360B1/fr not_active Expired - Lifetime
- 1996-09-30 NO NO19964149A patent/NO319740B1/no not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10505713A (ja) | 1998-06-02 |
| CA2186959A1 (fr) | 1996-08-08 |
| EP0754360A1 (fr) | 1997-01-22 |
| AU692068B2 (en) | 1998-05-28 |
| DE69627936D1 (de) | 2003-06-12 |
| NO964149D0 (no) | 1996-09-30 |
| NO964149L (no) | 1996-11-05 |
| ATE239989T1 (de) | 2003-05-15 |
| EP0754360B1 (fr) | 2003-05-07 |
| DE69627936T2 (de) | 2004-05-19 |
| JP3038015B2 (ja) | 2000-05-08 |
| CA2186959C (fr) | 2006-01-24 |
| WO1996024181A1 (fr) | 1996-08-08 |
| US5818864A (en) | 1998-10-06 |
| NL9500197A (nl) | 1996-09-02 |
| AU4846096A (en) | 1996-08-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM1K | Lapsed by not paying the annual fees |