NO308052B1 - FremgangsmÕte og apparat for tilbakekopling av en asymmetrisk differensialtrykkføler - Google Patents

FremgangsmÕte og apparat for tilbakekopling av en asymmetrisk differensialtrykkføler

Info

Publication number
NO308052B1
NO308052B1 NO943787A NO943787A NO308052B1 NO 308052 B1 NO308052 B1 NO 308052B1 NO 943787 A NO943787 A NO 943787A NO 943787 A NO943787 A NO 943787A NO 308052 B1 NO308052 B1 NO 308052B1
Authority
NO
Norway
Prior art keywords
feedback
pressure sensor
differential pressure
asymmetric differential
asymmetric
Prior art date
Application number
NO943787A
Other languages
English (en)
Norwegian (no)
Other versions
NO943787L (no
NO943787D0 (no
Inventor
Tapani Ryhonen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of NO943787D0 publication Critical patent/NO943787D0/no
Publication of NO943787L publication Critical patent/NO943787L/no
Publication of NO308052B1 publication Critical patent/NO308052B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/004—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces
    • G01L11/008—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces electrostatic or electromagnetic counterbalancing forces

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
NO943787A 1993-10-08 1994-10-07 FremgangsmÕte og apparat for tilbakekopling av en asymmetrisk differensialtrykkføler NO308052B1 (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI934434A FI93580C (fi) 1993-10-08 1993-10-08 Menetelmä ja laitteisto epäsymmetrisen paine-eroanturin takaisinkytkemiseksi

Publications (3)

Publication Number Publication Date
NO943787D0 NO943787D0 (no) 1994-10-07
NO943787L NO943787L (no) 1995-04-10
NO308052B1 true NO308052B1 (no) 2000-07-10

Family

ID=8538733

Family Applications (1)

Application Number Title Priority Date Filing Date
NO943787A NO308052B1 (no) 1993-10-08 1994-10-07 FremgangsmÕte og apparat for tilbakekopling av en asymmetrisk differensialtrykkføler

Country Status (7)

Country Link
US (1) US5641911A (ja)
EP (1) EP0647840B1 (ja)
JP (1) JP3339974B2 (ja)
CA (1) CA2133685C (ja)
DE (1) DE69419100T2 (ja)
FI (1) FI93580C (ja)
NO (1) NO308052B1 (ja)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI102783B1 (fi) * 1994-12-22 1999-02-15 Vaisala Oyj Menetelmä virtausnopeusanturin linearisoimiseksi sekä linearisoitu virtauksen nopeuden mittauslaitteisto
US5817943A (en) * 1997-03-24 1998-10-06 General Electric Company Pressure sensors
FI105237B (fi) * 1998-06-24 2000-06-30 Valtion Teknillinen Piimikromekaaninen vaaka
JP4467027B2 (ja) * 2000-10-30 2010-05-26 ミヤチシステムズ株式会社 電気回路の断線検査方法
US20030098699A1 (en) * 2001-11-16 2003-05-29 Lemkin Mark A. Sense interface system with velocity feed-through rejection
US20050224899A1 (en) * 2002-02-06 2005-10-13 Ramsey Craig C Wireless substrate-like sensor
FR2851368B1 (fr) 2003-02-18 2008-03-07 Agence Spatiale Europeenne Composants electroniques comportant des condensateurs micro electromecaniques a capacite ajustable
EP1475642B1 (en) * 2003-05-02 2006-07-19 STMicroelectronics S.r.l. Method and arrangement for measuring the coupling capacitance between two conducting lines
US6877382B1 (en) * 2003-10-20 2005-04-12 Robert D Gourlay Inhalation detector
CN101410690B (zh) * 2006-02-21 2011-11-23 赛博光学半导体公司 半导体加工工具中的电容性距离感测
US7893697B2 (en) * 2006-02-21 2011-02-22 Cyberoptics Semiconductor, Inc. Capacitive distance sensing in semiconductor processing tools
JP5236652B2 (ja) 2006-09-29 2013-07-17 サイバーオプティクス セミコンダクタ インコーポレイテッド 基板と一体化された粒子センサ
CN100498865C (zh) * 2006-10-20 2009-06-10 沈阳中科博微自动化技术有限公司 压力数字化采集前端
US20080246493A1 (en) * 2007-04-05 2008-10-09 Gardner Delrae H Semiconductor Processing System With Integrated Showerhead Distance Measuring Device
US20090015268A1 (en) * 2007-07-13 2009-01-15 Gardner Delrae H Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment
DE102007062713A1 (de) * 2007-12-27 2009-07-16 Robert Bosch Gmbh Drucksensor und Verfahren zu dessen Kalibrierung
US10420374B2 (en) 2009-09-18 2019-09-24 Altria Client Services Llc Electronic smoke apparatus
EP2343507B1 (fr) * 2009-12-24 2012-11-28 EM Microelectronic-Marin SA Procédé de mesure d'un paramètre physique et circuit électronique d'interface d'un capteur capacitif pour sa mise en oeuvre
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8616065B2 (en) * 2010-11-24 2013-12-31 Honeywell International Inc. Pressure sensor
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
TWI447402B (zh) * 2012-03-05 2014-08-01 Mstar Semiconductor Inc 電容偵測裝置及應用該電容偵測裝置之電容式觸控系統
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
US10309997B2 (en) * 2013-03-15 2019-06-04 Infineon Technologies Ag Apparatus and a method for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance
US8960010B1 (en) 2013-12-23 2015-02-24 Fresenius Medical Care Holdings, Inc. Automatic detection and adjustment of a pressure pod diaphragm
DE102014201529A1 (de) 2014-01-28 2015-07-30 Siemens Aktiengesellschaft Verfahren zum Betreiben eines Druckmessumformers sowie Druckmessumformer
US9645029B2 (en) 2014-04-07 2017-05-09 Infineon Technology Ag Force feedback loop for pressure sensors
CA2957067C (en) * 2014-09-26 2019-02-19 Fresenius Medical Care Holdings, Inc. Pressure output device for extracorporeal hemodialysis machine
WO2020159603A2 (en) * 2018-11-19 2020-08-06 Aurigema Andrew Neil System and method for generating forces using asymmetrical electrostatic pressure

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1450709A (en) * 1973-12-31 1976-09-29 Birchall D J Pressure transducers
US4434664A (en) * 1981-07-06 1984-03-06 The Bendix Corporation Pressure ratio measurement system
US4584885A (en) * 1984-01-20 1986-04-29 Harry E. Aine Capacitive detector for transducers
FI872049A (fi) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion foer anvaendning vid tryckgivare.
US5211051A (en) * 1987-11-09 1993-05-18 California Institute Of Technology Methods and apparatus for improving sensor performance
GB8728442D0 (en) * 1987-12-04 1988-01-13 Russell M K Triaxial accelerometers
JPH0672899B2 (ja) * 1988-04-01 1994-09-14 株式会社日立製作所 加速度センサ
US5377524A (en) * 1992-06-22 1995-01-03 The Regents Of The University Of Michigan Self-testing capacitive pressure transducer and method
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi

Also Published As

Publication number Publication date
FI93580B (fi) 1995-01-13
JPH07181094A (ja) 1995-07-18
FI93580C (fi) 1995-04-25
FI934434A0 (fi) 1993-10-08
NO943787L (no) 1995-04-10
JP3339974B2 (ja) 2002-10-28
EP0647840A2 (en) 1995-04-12
CA2133685A1 (en) 1995-04-09
CA2133685C (en) 2006-08-15
US5641911A (en) 1997-06-24
EP0647840B1 (en) 1999-06-16
DE69419100T2 (de) 2000-03-30
NO943787D0 (no) 1994-10-07
EP0647840A3 (en) 1996-01-31
DE69419100D1 (de) 1999-07-22

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