NO303595B1 - System og fremgangsmÕte for bestemmelse av romlige koordinater - Google Patents

System og fremgangsmÕte for bestemmelse av romlige koordinater

Info

Publication number
NO303595B1
NO303595B1 NO963047A NO963047A NO303595B1 NO 303595 B1 NO303595 B1 NO 303595B1 NO 963047 A NO963047 A NO 963047A NO 963047 A NO963047 A NO 963047A NO 303595 B1 NO303595 B1 NO 303595B1
Authority
NO
Norway
Prior art keywords
measuring probe
control points
contact unit
coordinate system
spatial coordinates
Prior art date
Application number
NO963047A
Other languages
English (en)
Norwegian (no)
Other versions
NO963047D0 (no
NO963047L (no
Inventor
Alf Pettersen
Iyvind Rotvold
Original Assignee
Metronor Asa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metronor Asa filed Critical Metronor Asa
Priority to NO963047A priority Critical patent/NO303595B1/no
Publication of NO963047D0 publication Critical patent/NO963047D0/no
Priority to AT97933077T priority patent/ATE290201T1/de
Priority to PCT/NO1997/000189 priority patent/WO1998004881A1/en
Priority to US09/230,259 priority patent/US6389158B1/en
Priority to AU36365/97A priority patent/AU3636597A/en
Priority to EP97933077A priority patent/EP1015845B1/de
Priority to DE69732666T priority patent/DE69732666T2/de
Publication of NO963047L publication Critical patent/NO963047L/no
Publication of NO303595B1 publication Critical patent/NO303595B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
    • G01C11/02—Picture taking arrangements specially adapted for photogrammetry or photographic surveying, e.g. controlling overlapping of pictures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/58—Wireless transmission of information between a sensor or probe and a control or evaluation unit
NO963047A 1996-07-22 1996-07-22 System og fremgangsmÕte for bestemmelse av romlige koordinater NO303595B1 (no)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NO963047A NO303595B1 (no) 1996-07-22 1996-07-22 System og fremgangsmÕte for bestemmelse av romlige koordinater
AT97933077T ATE290201T1 (de) 1996-07-22 1997-07-21 Vorrichtung zur raumkoordinatenbestimmung und verfahren zu deren kalibrierung
PCT/NO1997/000189 WO1998004881A1 (en) 1996-07-22 1997-07-21 System and method for determining spatial coordinates
US09/230,259 US6389158B1 (en) 1996-07-22 1997-07-21 System and method for determining spatial coordinates
AU36365/97A AU3636597A (en) 1996-07-22 1997-07-21 System and method for determining spatial coordinates
EP97933077A EP1015845B1 (de) 1996-07-22 1997-07-21 Vorrichtung zur raumkoordinatenbestimmung und verfahren zu deren kalibrierung
DE69732666T DE69732666T2 (de) 1996-07-22 1997-07-21 Vorrichtung zur raumkoordinatenbestimmung und verfahren zu deren kalibrierung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO963047A NO303595B1 (no) 1996-07-22 1996-07-22 System og fremgangsmÕte for bestemmelse av romlige koordinater

Publications (3)

Publication Number Publication Date
NO963047D0 NO963047D0 (no) 1996-07-22
NO963047L NO963047L (no) 1998-01-23
NO303595B1 true NO303595B1 (no) 1998-08-03

Family

ID=19899637

Family Applications (1)

Application Number Title Priority Date Filing Date
NO963047A NO303595B1 (no) 1996-07-22 1996-07-22 System og fremgangsmÕte for bestemmelse av romlige koordinater

Country Status (7)

Country Link
US (1) US6389158B1 (de)
EP (1) EP1015845B1 (de)
AT (1) ATE290201T1 (de)
AU (1) AU3636597A (de)
DE (1) DE69732666T2 (de)
NO (1) NO303595B1 (de)
WO (1) WO1998004881A1 (de)

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NO313113B1 (no) * 1999-07-13 2002-08-12 Metronor Asa System for scanning av store objekters geometri
DE10012273B4 (de) * 2000-03-14 2006-09-28 Daimlerchrysler Ag Anlage zur messtechnischen räumlichen 3D-Lageerfassung von Oberflächenpunkten
EP1285224A1 (de) * 2000-05-16 2003-02-26 Steinbichler Optotechnik Gmbh Verfahren und vorrichtung zum bestimmen der 3d-form eines objektes
US20020122117A1 (en) * 2000-12-26 2002-09-05 Masamichi Nakagawa Camera device, camera system and image processing method
JP4877891B2 (ja) * 2001-08-03 2012-02-15 株式会社トプコン 校正用被写体
US7289230B2 (en) * 2002-02-06 2007-10-30 Cyberoptics Semiconductors, Inc. Wireless substrate-like sensor
US20050233770A1 (en) * 2002-02-06 2005-10-20 Ramsey Craig C Wireless substrate-like sensor
US20050224902A1 (en) * 2002-02-06 2005-10-13 Ramsey Craig C Wireless substrate-like sensor
DE10303551A1 (de) * 2003-01-29 2004-08-12 Dr. Johannes Heidenhain Gmbh Verfahren zum Übertragen von Steuerbefehlen von einem Sendeelement zu einem Messtaster
EP1447644A1 (de) * 2003-02-14 2004-08-18 Metronor ASA Messung von räumlichen Koordinaten
EP1498688B1 (de) * 2003-07-17 2005-09-21 AXIOS 3D Services GmbH Lokator und optisches Messsystem
US6950775B2 (en) * 2003-12-01 2005-09-27 Snap-On Incorporated Coordinate measuring system and field-of-view indicators therefor
US7403295B2 (en) * 2004-10-25 2008-07-22 Hoya Corporation Position-detecting system
DE202006020719U1 (de) 2006-01-25 2009-08-27 Axios 3D Services Gmbh Positionsbestimmungssystem
KR101259218B1 (ko) * 2006-02-21 2013-04-29 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 반도체 처리 툴의 용량성 거리 감지 장치 및 방법
US7893697B2 (en) * 2006-02-21 2011-02-22 Cyberoptics Semiconductor, Inc. Capacitive distance sensing in semiconductor processing tools
WO2008042199A2 (en) 2006-09-29 2008-04-10 Cyberoptics Semiconductor, Inc. Particles sensor integrated with substrate
US7778793B2 (en) * 2007-03-12 2010-08-17 Cyberoptics Semiconductor, Inc. Wireless sensor for semiconductor processing systems
US20080246493A1 (en) * 2007-04-05 2008-10-09 Gardner Delrae H Semiconductor Processing System With Integrated Showerhead Distance Measuring Device
US20090015268A1 (en) * 2007-07-13 2009-01-15 Gardner Delrae H Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment
ES2758734T3 (es) * 2009-05-05 2020-05-06 Kapsch Trafficcom Ag Procedimiento para calibrar la imagen de una cámara
DE102009032262A1 (de) * 2009-07-08 2011-01-13 Steinbichler Optotechnik Gmbh Verfahren zur Bestimmung der 3D-Koordinaten eines Objekts
FR2980844B1 (fr) * 2011-10-03 2014-05-09 Renault Sa Procede d'etalonnage d'une barre de mise a l'echelle
EP2586396A1 (de) 2011-10-26 2013-05-01 Metronor AS System zur Sicherstellung der Präzision bei medizinischen Behandlungen
EP2698596A1 (de) * 2012-08-16 2014-02-19 Hexagon Technology Center GmbH Verfahren und System zur Bestimmung der räumlichen Koordinaten mit einer mobilen Koordinatenmessmaschine
CN103389072B (zh) * 2013-07-22 2015-04-22 北京信息科技大学 一种基于直线拟合的像点定位精度评估方法
JP6325896B2 (ja) 2014-03-28 2018-05-16 株式会社キーエンス 光学式座標測定装置
JP6325871B2 (ja) 2014-03-28 2018-05-16 株式会社キーエンス 光学式座標測定装置
JP6325877B2 (ja) 2014-04-18 2018-05-16 株式会社キーエンス 光学式座標測定装置
EP3141864B1 (de) * 2014-04-30 2019-06-05 Shinano Kenshi Co., Ltd. Messvorrichtung
JP6002275B2 (ja) 2014-04-30 2016-10-05 シナノケンシ株式会社 計測装置
JP6316663B2 (ja) 2014-05-30 2018-04-25 株式会社キーエンス 座標測定装置
CN105423912A (zh) * 2015-11-05 2016-03-23 天津大学 光笔跟踪系统
US10024760B2 (en) * 2015-12-17 2018-07-17 General Electric Company Methods for monitoring turbine components
EP3203179B1 (de) * 2016-02-05 2019-04-03 Hexagon Technology Center GmbH Messmaschine auf grundlage einer deltaroboteranordnung
DE102016118617B4 (de) * 2016-09-30 2019-02-28 Carl Zeiss Industrielle Messtechnik Gmbh Messsystem
DE102018123815A1 (de) * 2018-09-26 2020-03-26 Ebm-Papst Mulfingen Gmbh & Co. Kg Verfahren zur Positionsbestimmung in einem Raum
US10955236B2 (en) * 2019-04-05 2021-03-23 Faro Technologies, Inc. Three-dimensional measuring system

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO174025C (no) * 1991-10-11 1994-03-02 Metronor Sa System for punktvis maaling av romlige koordinater
US5175601A (en) 1991-10-15 1992-12-29 Electro-Optical Information Systems High-speed 3-D surface measurement surface inspection and reverse-CAD system
US5305091A (en) * 1992-12-07 1994-04-19 Oreo Products Inc. Optical coordinate measuring system for large objects
JP3000819B2 (ja) * 1993-03-15 2000-01-17 松下電器産業株式会社 三次元測定用プローブ及び形状測定方法
US5557410A (en) 1994-05-26 1996-09-17 Lockheed Missiles & Space Company, Inc. Method of calibrating a three-dimensional optical measurement system
NO301999B1 (no) * 1995-10-12 1998-01-05 Metronor As Kombinasjon av laser tracker og kamerabasert koordinatmåling

Also Published As

Publication number Publication date
EP1015845A1 (de) 2000-07-05
NO963047D0 (no) 1996-07-22
EP1015845B1 (de) 2005-03-02
ATE290201T1 (de) 2005-03-15
DE69732666T2 (de) 2005-12-29
DE69732666D1 (de) 2005-04-07
US6389158B1 (en) 2002-05-14
AU3636597A (en) 1998-02-20
WO1998004881A1 (en) 1998-02-05
NO963047L (no) 1998-01-23

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