NO2803985T3 - - Google Patents
Info
- Publication number
- NO2803985T3 NO2803985T3 NO14354008A NO14354008A NO2803985T3 NO 2803985 T3 NO2803985 T3 NO 2803985T3 NO 14354008 A NO14354008 A NO 14354008A NO 14354008 A NO14354008 A NO 14354008A NO 2803985 T3 NO2803985 T3 NO 2803985T3
- Authority
- NO
- Norway
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2648—Characterising semiconductor materials
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1301104A FR3005740B1 (fr) | 2013-05-14 | 2013-05-14 | Determination des concentrations en dopants accepteurs et donneurs |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO2803985T3 true NO2803985T3 (no) | 2018-08-11 |
Family
ID=48771543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO14354008A NO2803985T3 (no) | 2013-05-14 | 2014-05-14 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20140343870A1 (no) |
| EP (1) | EP2803985B1 (no) |
| ES (1) | ES2667400T3 (no) |
| FR (1) | FR3005740B1 (no) |
| NO (1) | NO2803985T3 (no) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3031185B1 (fr) * | 2014-12-24 | 2017-01-20 | Commissariat Energie Atomique | Procede de determination d’une contamination introduite dans un materiau semi-conducteur |
| US10551427B2 (en) * | 2017-02-14 | 2020-02-04 | The United States Of America As Represented By The Secretary Of The Army | Method for multicarrier mobility spectrum analysis |
| FR3069057B1 (fr) | 2017-07-17 | 2019-08-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de determination des concentrations en impuretes dopantes minoritaires et majoritaires |
| US11061083B1 (en) | 2020-05-12 | 2021-07-13 | The United States Of America As Represented By The Secretary Of The Army | Method for maximum-entropy mobility spectrum analysis |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4953983A (en) * | 1988-03-25 | 1990-09-04 | Nicholas Bottka | Non-destructively measuring local carrier concentration and gap energy in a semiconductor |
| US5657335A (en) * | 1993-11-01 | 1997-08-12 | The Regents, University Of California | P-type gallium nitride |
| JP5728574B2 (ja) * | 2010-07-21 | 2015-06-03 | アイメックＩｍｅｃ | 活性ドーパントプロファイルの決定方法 |
| FR2978548A1 (fr) | 2011-07-27 | 2013-02-01 | Commissariat Energie Atomique | Determination des teneurs en dopants dans un echantillon de silicium compense |
| FR2978549B1 (fr) * | 2011-07-27 | 2014-03-28 | Commissariat Energie Atomique | Determination des teneurs en dopants dans un echantillon de silicium compense |
| KR102235595B1 (ko) * | 2013-07-08 | 2021-04-05 | 삼성디스플레이 주식회사 | 주석 산화물 반도체용 조성물 및 주석 산화물 반도체 박막의 형성 방법 |
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2013
- 2013-05-14 FR FR1301104A patent/FR3005740B1/fr not_active Expired - Fee Related
-
2014
- 2014-05-14 US US14/277,512 patent/US20140343870A1/en not_active Abandoned
- 2014-05-14 ES ES14354008.6T patent/ES2667400T3/es active Active
- 2014-05-14 EP EP14354008.6A patent/EP2803985B1/fr not_active Not-in-force
- 2014-05-14 NO NO14354008A patent/NO2803985T3/no unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP2803985A1 (fr) | 2014-11-19 |
| US20140343870A1 (en) | 2014-11-20 |
| FR3005740A1 (fr) | 2014-11-21 |
| EP2803985B1 (fr) | 2018-03-14 |
| FR3005740B1 (fr) | 2015-06-12 |
| ES2667400T3 (es) | 2018-05-10 |