FR2978549B1 - Determination des teneurs en dopants dans un echantillon de silicium compense - Google Patents

Determination des teneurs en dopants dans un echantillon de silicium compense

Info

Publication number
FR2978549B1
FR2978549B1 FR1102355A FR1102355A FR2978549B1 FR 2978549 B1 FR2978549 B1 FR 2978549B1 FR 1102355 A FR1102355 A FR 1102355A FR 1102355 A FR1102355 A FR 1102355A FR 2978549 B1 FR2978549 B1 FR 2978549B1
Authority
FR
France
Prior art keywords
determination
doping content
compensation sample
silicon
silicon compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1102355A
Other languages
English (en)
Other versions
FR2978549A1 (fr
Inventor
Sebastien Dubois
Nicolas Enjalbert
Jordi Veirman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1102355A priority Critical patent/FR2978549B1/fr
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to KR1020147005159A priority patent/KR20140058582A/ko
Priority to EP12748737.9A priority patent/EP2737304A1/fr
Priority to CN201280046820.3A priority patent/CN103842806A/zh
Priority to BR112014001722A priority patent/BR112014001722A2/pt
Priority to US14/235,327 priority patent/US20140167731A1/en
Priority to PCT/FR2012/000298 priority patent/WO2013014341A1/fr
Priority to JP2014522126A priority patent/JP2014531380A/ja
Publication of FR2978549A1 publication Critical patent/FR2978549A1/fr
Application granted granted Critical
Publication of FR2978549B1 publication Critical patent/FR2978549B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/20—Investigating the presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Silicon Compounds (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR1102355A 2011-07-27 2011-07-27 Determination des teneurs en dopants dans un echantillon de silicium compense Expired - Fee Related FR2978549B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1102355A FR2978549B1 (fr) 2011-07-27 2011-07-27 Determination des teneurs en dopants dans un echantillon de silicium compense
EP12748737.9A EP2737304A1 (fr) 2011-07-27 2012-07-20 Détermination des teneurs en dopants dans un échantillon de silicium compensé
CN201280046820.3A CN103842806A (zh) 2011-07-27 2012-07-20 确定补偿硅样品的掺杂剂含量
BR112014001722A BR112014001722A2 (pt) 2011-07-27 2012-07-20 determinação dos teores em dopantes em amostra de silício compensado
KR1020147005159A KR20140058582A (ko) 2011-07-27 2012-07-20 보상된 실리콘 샘플의 도펀트 내용 결정
US14/235,327 US20140167731A1 (en) 2011-07-27 2012-07-20 Determining the dopant content of a compensated silicon sample
PCT/FR2012/000298 WO2013014341A1 (fr) 2011-07-27 2012-07-20 Détermination des teneurs en dopants dans un échantillon de silicium compensé
JP2014522126A JP2014531380A (ja) 2011-07-27 2012-07-20 補償シリコンサンプルのドーパント含有量の特定

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1102355A FR2978549B1 (fr) 2011-07-27 2011-07-27 Determination des teneurs en dopants dans un echantillon de silicium compense

Publications (2)

Publication Number Publication Date
FR2978549A1 FR2978549A1 (fr) 2013-02-01
FR2978549B1 true FR2978549B1 (fr) 2014-03-28

Family

ID=46717884

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1102355A Expired - Fee Related FR2978549B1 (fr) 2011-07-27 2011-07-27 Determination des teneurs en dopants dans un echantillon de silicium compense

Country Status (8)

Country Link
US (1) US20140167731A1 (fr)
EP (1) EP2737304A1 (fr)
JP (1) JP2014531380A (fr)
KR (1) KR20140058582A (fr)
CN (1) CN103842806A (fr)
BR (1) BR112014001722A2 (fr)
FR (1) FR2978549B1 (fr)
WO (1) WO2013014341A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3005740B1 (fr) * 2013-05-14 2015-06-12 Commissariat Energie Atomique Determination des concentrations en dopants accepteurs et donneurs
CN106126901B (zh) * 2016-06-17 2019-03-26 华南理工大学 一种多维度信息融合的变压器可用状态在线评估方法
US10954606B2 (en) 2018-06-27 2021-03-23 Globalwafers Co., Ltd. Methods for modeling the impurity concentration of a single crystal silicon ingot
US11047066B2 (en) * 2018-06-27 2021-06-29 Globalwafers Co., Ltd. Growth of plural sample rods to determine impurity build-up during production of single crystal silicon ingots
US11585010B2 (en) 2019-06-28 2023-02-21 Globalwafers Co., Ltd. Methods for producing a single crystal silicon ingot using boric acid as a dopant and ingot puller apparatus that use a solid-phase dopant
US11795569B2 (en) 2020-12-31 2023-10-24 Globalwafers Co., Ltd. Systems for producing a single crystal silicon ingot using a vaporized dopant
US11866844B2 (en) 2020-12-31 2024-01-09 Globalwafers Co., Ltd. Methods for producing a single crystal silicon ingot using a vaporized dopant
JP2023093983A (ja) * 2021-12-23 2023-07-05 グローバルウェーハズ・ジャパン株式会社 高抵抗シリコンウェーハの厚さ測定方法及び平坦度測定方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1170152C (zh) * 2002-09-10 2004-10-06 西安电子科技大学 应变硅锗薄膜材料掺杂浓度测试方法
NO333319B1 (no) * 2003-12-29 2013-05-06 Elkem As Silisiummateriale for fremstilling av solceller
JP4442446B2 (ja) * 2005-01-27 2010-03-31 信越半導体株式会社 選択エッチング方法
US20090039478A1 (en) * 2007-03-10 2009-02-12 Bucher Charles E Method For Utilizing Heavily Doped Silicon Feedstock To Produce Substrates For Photovoltaic Applications By Dopant Compensation During Crystal Growth
CN101446563A (zh) * 2007-11-26 2009-06-03 北京有色金属研究总院 一种鉴别和测量半导体材料中掺杂元素的方法
CN102007394B (zh) * 2008-04-25 2013-06-26 S.O.I.Tec绝缘体上硅技术公司 特别用于应变或应力硅材料的刻蚀组合物、表征这种材料表面上的缺陷的方法，和用刻蚀组合物处理这种表面的工艺
CA2673621A1 (fr) 2009-07-21 2009-12-11 Silicium Becancour Inc. Methode d'evaluation de compenseation du silicium a mise a niveau de qualite metallurgique (umg)
EP2567217B1 (fr) * 2010-05-03 2019-07-03 Aurora Solar Technologies (Canada) Inc. Mesure sans contact de la teneur en dopant de couches semi-conductrices

Also Published As

Publication number Publication date
KR20140058582A (ko) 2014-05-14
CN103842806A (zh) 2014-06-04
WO2013014341A1 (fr) 2013-01-31
JP2014531380A (ja) 2014-11-27
BR112014001722A2 (pt) 2017-03-21
US20140167731A1 (en) 2014-06-19
EP2737304A1 (fr) 2014-06-04
FR2978549A1 (fr) 2013-02-01

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20160331