NO20024248D0 - Metode og utstyr for aksellererende strömmende plasma gasskombinasjoner - Google Patents

Metode og utstyr for aksellererende strömmende plasma gasskombinasjoner

Info

Publication number
NO20024248D0
NO20024248D0 NO20024248A NO20024248A NO20024248D0 NO 20024248 D0 NO20024248 D0 NO 20024248D0 NO 20024248 A NO20024248 A NO 20024248A NO 20024248 A NO20024248 A NO 20024248A NO 20024248 D0 NO20024248 D0 NO 20024248D0
Authority
NO
Norway
Prior art keywords
equipment
plasma gas
gas combinations
flowing plasma
accelerating flowing
Prior art date
Application number
NO20024248A
Other languages
English (en)
Inventor
Seppo Konkola
Original Assignee
Seppo Konkola
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seppo Konkola filed Critical Seppo Konkola
Priority to NO20024248A priority Critical patent/NO20024248D0/no
Publication of NO20024248D0 publication Critical patent/NO20024248D0/no
Priority to CA002537935A priority patent/CA2537935A1/en
Priority to AU2003262591A priority patent/AU2003262591A1/en
Priority to EP03793840A priority patent/EP1576863A1/en
Priority to PCT/FI2003/000654 priority patent/WO2004023853A1/en

Links

NO20024248A 2002-09-05 2002-09-05 Metode og utstyr for aksellererende strömmende plasma gasskombinasjoner NO20024248D0 (no)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NO20024248A NO20024248D0 (no) 2002-09-05 2002-09-05 Metode og utstyr for aksellererende strömmende plasma gasskombinasjoner
CA002537935A CA2537935A1 (en) 2002-09-05 2003-09-05 Method and equipment for generating a gas plasma ball
AU2003262591A AU2003262591A1 (en) 2002-09-05 2003-09-05 Method and equipment for generating a gas plasma ball
EP03793840A EP1576863A1 (en) 2002-09-05 2003-09-05 Method and equipment for generating a gas plasma ball
PCT/FI2003/000654 WO2004023853A1 (en) 2002-09-05 2003-09-05 Method and equipment for generating a gas plasma ball

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20024248A NO20024248D0 (no) 2002-09-05 2002-09-05 Metode og utstyr for aksellererende strömmende plasma gasskombinasjoner

Publications (1)

Publication Number Publication Date
NO20024248D0 true NO20024248D0 (no) 2002-09-05

Family

ID=19913972

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20024248A NO20024248D0 (no) 2002-09-05 2002-09-05 Metode og utstyr for aksellererende strömmende plasma gasskombinasjoner

Country Status (5)

Country Link
EP (1) EP1576863A1 (no)
AU (1) AU2003262591A1 (no)
CA (1) CA2537935A1 (no)
NO (1) NO20024248D0 (no)
WO (1) WO2004023853A1 (no)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100428365C (zh) * 2005-09-29 2008-10-22 核工业西南物理研究院 超声气体或团簇注入器
US9275839B2 (en) * 2007-10-19 2016-03-01 Mks Instruments, Inc. Toroidal plasma chamber for high gas flow rate process
SG11202011069RA (en) 2018-06-14 2020-12-30 Mks Instr Inc Radical output monitor for a remote plasma source and method of use

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356892A (en) * 1963-01-10 1967-12-05 Edgar A Bunt Arc plasma generator starting method utilizing a displaceable valve communicating with atmosphere
JPH06507514A (ja) * 1991-05-28 1994-08-25 コンコーラ，セッポ　タネリ チャンバにおいてプラズマ球又は類似の現象を発生させ及び利用するための方法並びにそのチャンバ
US5444208A (en) * 1993-03-29 1995-08-22 Fmc Corporation Multiple source plasma generation and injection device

Also Published As

Publication number Publication date
AU2003262591A1 (en) 2004-03-29
CA2537935A1 (en) 2004-03-18
EP1576863A1 (en) 2005-09-21
WO2004023853A1 (en) 2004-03-18

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NO20024248D0 (no) Metode og utstyr for aksellererende strömmende plasma gasskombinasjoner