NO20001539L - Framgangsmåte og anordning for måling av mikroskopisk vibrasjon - Google Patents

Framgangsmåte og anordning for måling av mikroskopisk vibrasjon

Info

Publication number
NO20001539L
NO20001539L NO20001539A NO20001539A NO20001539L NO 20001539 L NO20001539 L NO 20001539L NO 20001539 A NO20001539 A NO 20001539A NO 20001539 A NO20001539 A NO 20001539A NO 20001539 L NO20001539 L NO 20001539L
Authority
NO
Norway
Prior art keywords
microscopic vibration
measuring microscopic
measuring
vibration
microscopic
Prior art date
Application number
NO20001539A
Other languages
English (en)
Other versions
NO314323B1 (no
NO20001539D0 (no
Inventor
Eiolf Vikhagen
Original Assignee
Optonor As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optonor As filed Critical Optonor As
Priority to NO20001539A priority Critical patent/NO314323B1/no
Publication of NO20001539D0 publication Critical patent/NO20001539D0/no
Priority to JP2001571048A priority patent/JP2003529063A/ja
Priority to AU2001246957A priority patent/AU2001246957A1/en
Priority to EP01920011A priority patent/EP1266186A1/en
Priority to PCT/NO2001/000125 priority patent/WO2001073373A1/en
Priority to US10/221,161 priority patent/US6970251B2/en
Publication of NO20001539L publication Critical patent/NO20001539L/no
Publication of NO314323B1 publication Critical patent/NO314323B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
NO20001539A 2000-03-24 2000-03-24 Framgangsmåte og interferometer for måling av mikroskopisk vibrasjon NO314323B1 (no)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NO20001539A NO314323B1 (no) 2000-03-24 2000-03-24 Framgangsmåte og interferometer for måling av mikroskopisk vibrasjon
JP2001571048A JP2003529063A (ja) 2000-03-24 2001-03-22 振動測定方法及び干渉計
AU2001246957A AU2001246957A1 (en) 2000-03-24 2001-03-22 Method for vibration measurement and interferometer
EP01920011A EP1266186A1 (en) 2000-03-24 2001-03-22 Method for vibration measurement and interferometer
PCT/NO2001/000125 WO2001073373A1 (en) 2000-03-24 2001-03-22 Method for vibration measurement and interferometer
US10/221,161 US6970251B2 (en) 2000-03-24 2001-03-22 Method for vibration measurement and interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20001539A NO314323B1 (no) 2000-03-24 2000-03-24 Framgangsmåte og interferometer for måling av mikroskopisk vibrasjon

Publications (3)

Publication Number Publication Date
NO20001539D0 NO20001539D0 (no) 2000-03-24
NO20001539L true NO20001539L (no) 2001-09-25
NO314323B1 NO314323B1 (no) 2003-03-03

Family

ID=19910928

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20001539A NO314323B1 (no) 2000-03-24 2000-03-24 Framgangsmåte og interferometer for måling av mikroskopisk vibrasjon

Country Status (6)

Country Link
US (1) US6970251B2 (no)
EP (1) EP1266186A1 (no)
JP (1) JP2003529063A (no)
AU (1) AU2001246957A1 (no)
NO (1) NO314323B1 (no)
WO (1) WO2001073373A1 (no)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6827247B1 (en) 1999-12-08 2004-12-07 Asm Technology Singapore Pte Ltd. Apparatus for detecting the oscillation amplitude of an oscillating object
AU2003269872A1 (en) * 2002-05-15 2003-12-31 Glaxo Group Limited Microelectromechanical system and method for determining temperature and moisture profiles within pharmaceutical packaging
US7123363B2 (en) * 2003-01-03 2006-10-17 Rose-Hulman Institute Of Technology Speckle pattern analysis method and system
FR2915077B1 (fr) * 2007-04-19 2010-09-10 Inst Radioprot Et De Surete Nu Dispositif d'aide au diagnostic et pronostic de modifications physiopathologiques des tissus.
KR101734628B1 (ko) * 2011-09-09 2017-05-11 벤타나 메디컬 시스템즈, 인코포레이티드 에러 신호를 이용한 포커스 및 이미징 시스템 및 기법들
US9052331B2 (en) 2012-08-31 2015-06-09 Dantec Dynamics A/S Optical velocimetry systems and methods for determining the velocity of a body using fringes generated by a spatial light modulator
NO20121458A1 (no) * 2012-12-05 2014-05-19 Optonor As Fremgangsmåte for vibrasjonsmåling og interferometer
US10466460B2 (en) * 2014-08-13 2019-11-05 Surgivance Inc. Line-scanning, sample-scanning, multimodal confocal microscope
CN104457581B (zh) * 2014-08-28 2017-03-22 深圳奥比中光科技有限公司 一种全场z向位移测量系统
GB2544727A (en) * 2015-11-16 2017-05-31 Optonor As Optical interferometry
JP6805930B2 (ja) * 2017-03-29 2020-12-23 株式会社島津製作所 振動測定装置
WO2020129209A1 (ja) * 2018-12-20 2020-06-25 株式会社島津製作所 欠陥検査装置および欠陥検査方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9118294D0 (en) * 1991-08-24 1991-10-09 Sira Ltd White light interferometry
JPH08114412A (ja) * 1994-10-18 1996-05-07 Toshio Honda 耐振動型干渉計
US5827971A (en) * 1996-05-31 1998-10-27 Lockheed Martin Idaho Technologies Company Optical vibration detection spectral analysis assembly and method for detecting vibration in an object of interest
AU6538298A (en) * 1997-02-26 1998-09-18 Lockheed Martin Idaho Technologies Company Imaging photorefractive optical vibration measurement method and device
US6175411B1 (en) * 1998-02-25 2001-01-16 Bechtel Bwxt Idaho, Llc Apparatus and method for measuring and imaging traveling waves
FR2780794B1 (fr) * 1998-07-06 2007-09-28 Centre Nat Rech Scient Velocimetre holographique dynamique pour la mesure de vibrations
AU6036599A (en) * 1998-09-09 2000-03-27 Lockheed Martin Idaho Technologies Company Method and apparatus for assessing material properties of sheet-like materials
US6587212B1 (en) * 2000-10-31 2003-07-01 Agere Systems Inc. Method and apparatus for studying vibrational modes of an electro-acoustic device

Also Published As

Publication number Publication date
WO2001073373A1 (en) 2001-10-04
US20030037616A1 (en) 2003-02-27
EP1266186A1 (en) 2002-12-18
NO314323B1 (no) 2003-03-03
NO20001539D0 (no) 2000-03-24
US6970251B2 (en) 2005-11-29
JP2003529063A (ja) 2003-09-30
AU2001246957A1 (en) 2001-10-08

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