NO168970C - Anordning ved et halvlederakselerometer - Google Patents

Anordning ved et halvlederakselerometer

Info

Publication number
NO168970C
NO168970C NO900329A NO900329A NO168970C NO 168970 C NO168970 C NO 168970C NO 900329 A NO900329 A NO 900329A NO 900329 A NO900329 A NO 900329A NO 168970 C NO168970 C NO 168970C
Authority
NO
Norway
Prior art keywords
shelter
meter
semiconductor
shelter meter
semiconductor shelter
Prior art date
Application number
NO900329A
Other languages
English (en)
Other versions
NO168970B (no
NO900329D0 (no
NO900329L (no
Inventor
Henrik Jakobsen
Terje Kvisteroey
Original Assignee
Sensonor As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensonor As filed Critical Sensonor As
Priority to NO900329A priority Critical patent/NO168970C/no
Publication of NO900329D0 publication Critical patent/NO900329D0/no
Priority to PCT/NO1991/000008 priority patent/WO1991011722A1/en
Publication of NO900329L publication Critical patent/NO900329L/no
Publication of NO168970B publication Critical patent/NO168970B/no
Publication of NO168970C publication Critical patent/NO168970C/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
NO900329A 1990-01-24 1990-01-24 Anordning ved et halvlederakselerometer NO168970C (no)

Priority Applications (2)

Application Number Priority Date Filing Date Title
NO900329A NO168970C (no) 1990-01-24 1990-01-24 Anordning ved et halvlederakselerometer
PCT/NO1991/000008 WO1991011722A1 (en) 1990-01-24 1991-01-24 An arrangement in a semiconductor accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO900329A NO168970C (no) 1990-01-24 1990-01-24 Anordning ved et halvlederakselerometer

Publications (4)

Publication Number Publication Date
NO900329D0 NO900329D0 (no) 1990-01-24
NO900329L NO900329L (no) 1991-07-25
NO168970B NO168970B (no) 1992-01-13
NO168970C true NO168970C (no) 1992-04-29

Family

ID=19892820

Family Applications (1)

Application Number Title Priority Date Filing Date
NO900329A NO168970C (no) 1990-01-24 1990-01-24 Anordning ved et halvlederakselerometer

Country Status (2)

Country Link
NO (1) NO168970C (no)
WO (1) WO1991011722A1 (no)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06186249A (ja) * 1992-12-16 1994-07-08 Mitsubishi Electric Corp 容量式加速度検出装置
US5503016A (en) * 1994-02-01 1996-04-02 Ic Sensors, Inc. Vertically mounted accelerometer chip
EP0702221A3 (en) * 1994-09-14 1997-05-21 Delco Electronics Corp Sensor integrated on a chip
DE59603812D1 (de) * 1996-08-30 2000-01-05 Fraunhofer Ges Forschung Beschleunigungsgrenzwertsensor
JP2000510244A (ja) * 1996-12-31 2000-08-08 ヒュンダイ モーター カンパニー 対称的接合質量形の加速度係及びその製造方法
DE19806754A1 (de) * 1998-02-18 1999-09-02 Telefunken Microelectron Sensorelement
DE102013217094B4 (de) 2013-08-28 2021-11-04 Robert Bosch Gmbh Mikromechanisches Bauelement und entsprechendes Prüfverfahren für ein mikromechanisches Bauelement

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62213280A (ja) * 1986-03-14 1987-09-19 Nissan Motor Co Ltd 半導体加速度センサ
DE3742385A1 (de) * 1987-12-14 1989-06-22 Siemens Ag Beschleunigungsempfindliches elektronisches bauelement

Also Published As

Publication number Publication date
NO168970B (no) 1992-01-13
NO900329D0 (no) 1990-01-24
NO900329L (no) 1991-07-25
WO1991011722A1 (en) 1991-08-08

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