NL9301656A - Geintegreerde optische polarisatie-omzetter met versterkte periodieke koppeling. - Google Patents
Geintegreerde optische polarisatie-omzetter met versterkte periodieke koppeling. Download PDFInfo
- Publication number
- NL9301656A NL9301656A NL9301656A NL9301656A NL9301656A NL 9301656 A NL9301656 A NL 9301656A NL 9301656 A NL9301656 A NL 9301656A NL 9301656 A NL9301656 A NL 9301656A NL 9301656 A NL9301656 A NL 9301656A
- Authority
- NL
- Netherlands
- Prior art keywords
- strip
- waveguide
- sub
- shaped
- mask pattern
- Prior art date
Links
- 230000010287 polarization Effects 0.000 title claims abstract description 41
- 230000000737 periodic effect Effects 0.000 title claims abstract description 20
- 230000008878 coupling Effects 0.000 title claims description 41
- 238000010168 coupling process Methods 0.000 title claims description 41
- 238000005859 coupling reaction Methods 0.000 title claims description 41
- 230000003287 optical effect Effects 0.000 title abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 238000005530 etching Methods 0.000 claims abstract description 34
- 241000826860 Trapezium Species 0.000 claims abstract description 12
- 239000013078 crystal Substances 0.000 claims abstract description 8
- 239000000126 substance Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 35
- 238000006243 chemical reaction Methods 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000002178 crystalline material Substances 0.000 claims description 8
- 238000001312 dry etching Methods 0.000 claims description 8
- 230000001902 propagating effect Effects 0.000 claims description 6
- 238000003631 wet chemical etching Methods 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims 1
- 230000000295 complement effect Effects 0.000 abstract description 3
- 108700041286 delta Proteins 0.000 abstract 4
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 235000012239 silicon dioxide Nutrition 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 239000010453 quartz Substances 0.000 description 13
- 238000013016 damping Methods 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- 239000004020 conductor Substances 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 8
- 230000007704 transition Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000002902 bimodal effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- OEDMOCYNWLHUDP-UHFFFAOYSA-N bromomethanol Chemical compound OCBr OEDMOCYNWLHUDP-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical group O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL9301656A NL9301656A (nl) | 1993-09-24 | 1993-09-24 | Geintegreerde optische polarisatie-omzetter met versterkte periodieke koppeling. |
| ES94202591T ES2127883T3 (es) | 1993-09-24 | 1994-09-09 | Convertidor de polarizacion optica integrado con acoplamiento periodico aumentado. |
| DE69415455T DE69415455T2 (de) | 1993-09-24 | 1994-09-09 | Integrierter optischer Polarisationswandler mit erhöhter periodischer Kopplung |
| EP94202591A EP0645650B1 (de) | 1993-09-24 | 1994-09-09 | Integrierter optischer Polarisationswandler mit erhöhter periodischer Kopplung |
| AT94202591T ATE175031T1 (de) | 1993-09-24 | 1994-09-09 | Integrierter optischer polarisationswandler mit erhöhter periodischer kopplung |
| JP6265973A JP2934719B2 (ja) | 1993-09-24 | 1994-09-26 | 周期結合を強化した集積光学偏光変換器 |
| US08/485,653 US5539845A (en) | 1993-09-24 | 1995-06-07 | Integrated optical polarization converter with enhanced periodic coupling and method of fabricating same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL9301656A NL9301656A (nl) | 1993-09-24 | 1993-09-24 | Geintegreerde optische polarisatie-omzetter met versterkte periodieke koppeling. |
| NL9301656 | 1993-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL9301656A true NL9301656A (nl) | 1995-04-18 |
Family
ID=19862924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL9301656A NL9301656A (nl) | 1993-09-24 | 1993-09-24 | Geintegreerde optische polarisatie-omzetter met versterkte periodieke koppeling. |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5539845A (de) |
| EP (1) | EP0645650B1 (de) |
| JP (1) | JP2934719B2 (de) |
| AT (1) | ATE175031T1 (de) |
| DE (1) | DE69415455T2 (de) |
| ES (1) | ES2127883T3 (de) |
| NL (1) | NL9301656A (de) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW347597B (en) * | 1994-01-31 | 1998-12-11 | Mitsubishi Chem Corp | Method of forming a groove in a semiconductor laser diode and a semiconductor laser diode |
| NL1000759C2 (nl) * | 1995-07-07 | 1997-01-08 | Nederland Ptt | Geïntegreerde optische modus-omzetter. |
| NL1001777C2 (nl) * | 1995-11-29 | 1997-05-30 | Nederland Ptt | Werkwijze voor het vervaardigen van scherpe golfgeleider-vertakkingen in geïntegreerde optische circuits. |
| US5799119A (en) * | 1996-07-03 | 1998-08-25 | Northern Telecom Limited | Coupling of strongly and weakly guiding waveguides for compact integrated mach zehnder modulators |
| US5796906A (en) * | 1996-08-27 | 1998-08-18 | Lucent Technologies Inc. | Optical planar waveguide notch filters |
| US5973833A (en) * | 1997-08-29 | 1999-10-26 | Lightware, Inc. | High efficiency polarizing converter |
| FR2781577B1 (fr) * | 1998-07-06 | 2000-09-08 | Alsthom Cge Alcatel | Procede de fabrication d'un circuit optique integre |
| US6809420B1 (en) * | 2000-02-29 | 2004-10-26 | Intel Corporation | Characterization of induced shift on an overlay target using post-etch artifact wafers |
| US6373630B1 (en) | 2000-05-05 | 2002-04-16 | Chih-Kung Lee | Light beam polarization converter |
| US6539150B2 (en) | 2000-12-13 | 2003-03-25 | Alcatel Optronics Uk Limited | Segmented waveguide flattening the passband of a phasar |
| GB2384319A (en) * | 2002-01-19 | 2003-07-23 | Marconi Optical Components Ltd | Polarisation converter for photonic crystal waveguide |
| US6973110B2 (en) | 2002-02-22 | 2005-12-06 | Infineon Technologies Ag | Monolithic laser configuration |
| DE10209063C1 (de) * | 2002-02-22 | 2003-10-30 | Infineon Technologies Ag | Verfahren zur Herstellung einer monolithischen Laseranordnung |
| US7218814B2 (en) | 2002-05-28 | 2007-05-15 | Optun (Bvi) Ltd. | Method and apparatus for optical mode conversion |
| US7321705B2 (en) | 2002-05-28 | 2008-01-22 | Optun (Bvi) Ltd. | Method and device for optical switching and variable optical attenuation |
| US7609918B2 (en) | 2002-05-28 | 2009-10-27 | Optun (Bvi) Ltd. | Method and apparatus for optical mode division multiplexing and demultiplexing |
| US20040096136A1 (en) * | 2002-11-18 | 2004-05-20 | Harmeet Singh | Integrated polarization rotator |
| EP1473576A1 (de) * | 2003-05-02 | 2004-11-03 | ThreeFive Photonics B.V. | Integrierte optische Wellenleiter |
| US7792403B1 (en) * | 2005-09-08 | 2010-09-07 | Infinera Corporation | Adiabatic polarization converter |
| DE102007004043A1 (de) * | 2007-01-22 | 2008-07-31 | Universität Karlsruhe (Th) | Herstellungsverfahren für halbleiterbasierte optische Wellenleiterstrukturen mit speziellen geometrischen Formen |
| US7565041B2 (en) * | 2007-10-26 | 2009-07-21 | Infinera Corporation | Symmetric optical circuit with integrated polarization rotator |
| CN101320113B (zh) * | 2008-07-15 | 2010-06-09 | 浙江大学 | 一种波导型偏振模式转换器 |
| US9075197B2 (en) | 2011-12-05 | 2015-07-07 | Technische Universiteit Eindhoven | Increased tolerance polarization converters |
| US8854931B2 (en) * | 2013-03-08 | 2014-10-07 | Tdk Corporation | Polarization converter including a jagged diagonal line in plane orthogonal to propagation direction of electromagnetic wave |
| JP6264922B2 (ja) * | 2014-02-13 | 2018-01-24 | 沖電気工業株式会社 | 光波長フィルタ及び合分波素子 |
| JP6402519B2 (ja) * | 2014-07-18 | 2018-10-10 | 沖電気工業株式会社 | 光導波路素子 |
| JP6077076B1 (ja) * | 2015-09-11 | 2017-02-08 | 株式会社東芝 | グラフェン配線構造及びグラフェン配線構造の作製方法 |
| DE102016202634A1 (de) * | 2016-02-19 | 2017-08-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen eines Polarisationskonverters, Polarisationskonverter und Polarisationskonverterelement |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0513919A1 (de) * | 1991-05-16 | 1992-11-19 | Koninklijke KPN N.V. | Modenwandler |
| WO1993015423A1 (en) * | 1992-01-30 | 1993-08-05 | Telefonaktiebolaget Lm Ericsson | Device and method for polarization-independent processing of a signal comprising a combined wave-guide and polarisation converter |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3614198A (en) * | 1969-06-23 | 1971-10-19 | Bell Telephone Labor Inc | Thin-film optical devices |
| US3884549A (en) * | 1973-04-30 | 1975-05-20 | Univ California | Two demensional distributed feedback devices and lasers |
| US4359260A (en) * | 1980-06-25 | 1982-11-16 | Bell Telephone Laboratories, Incorporated | Optical polarizer |
| JPS59171187A (ja) * | 1983-03-18 | 1984-09-27 | Hitachi Ltd | 半導体レ−ザ装置 |
| DE3341482A1 (de) * | 1983-11-17 | 1985-05-30 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Magneto-optische wellenleiterstruktur mit kuenstlicher optischer anisotropie |
| FR2584825B1 (fr) * | 1985-07-11 | 1987-10-09 | Labo Electronique Physique | Structure separatrice, element de commutation optique incluant de telles structures et matrice de commutation optique formee de ces elements de commutation |
| FR2584826B1 (fr) * | 1985-07-11 | 1987-10-09 | Labo Electronique Physique | Element de commutation optique entre deux guides de lumiere et matrice de commutation optique formee de ces elements de commutation |
| GB2187566A (en) * | 1986-03-07 | 1987-09-09 | Philips Electronic Associated | Device for doubling the frequency of electromagnetic radiation |
| JPH01183184A (ja) * | 1988-01-18 | 1989-07-20 | Canon Inc | 半導体レーザーとその製造方法 |
| FR2634905B1 (fr) * | 1988-07-05 | 1990-10-05 | Labo Electronique Physique | Dispositif semiconducteur optoelectronique integre incluant un separateur des polarisations te/tm |
| JPH0422904A (ja) * | 1990-05-18 | 1992-01-27 | Omron Corp | リブ形光導波路 |
| US4974931A (en) * | 1989-11-13 | 1990-12-04 | At&T Bell Laboratories | Wavelength selective mode couplers |
| JPH03288104A (ja) * | 1990-04-04 | 1991-12-18 | Agency Of Ind Science & Technol | 一方向性モード変換器およびそれを用いた光アイソレータ |
| US5078516A (en) * | 1990-11-06 | 1992-01-07 | Bell Communications Research, Inc. | Tapered rib waveguides |
| FR2850661A1 (fr) * | 2003-02-04 | 2004-08-06 | Atofina | Procede de preparation d'un materiau composite comprenant un polymere et des nanoparticules metalliques |
-
1993
- 1993-09-24 NL NL9301656A patent/NL9301656A/nl not_active Application Discontinuation
-
1994
- 1994-09-09 DE DE69415455T patent/DE69415455T2/de not_active Expired - Lifetime
- 1994-09-09 ES ES94202591T patent/ES2127883T3/es not_active Expired - Lifetime
- 1994-09-09 EP EP94202591A patent/EP0645650B1/de not_active Expired - Lifetime
- 1994-09-09 AT AT94202591T patent/ATE175031T1/de not_active IP Right Cessation
- 1994-09-26 JP JP6265973A patent/JP2934719B2/ja not_active Expired - Lifetime
-
1995
- 1995-06-07 US US08/485,653 patent/US5539845A/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0513919A1 (de) * | 1991-05-16 | 1992-11-19 | Koninklijke KPN N.V. | Modenwandler |
| WO1993015423A1 (en) * | 1992-01-30 | 1993-08-05 | Telefonaktiebolaget Lm Ericsson | Device and method for polarization-independent processing of a signal comprising a combined wave-guide and polarisation converter |
Non-Patent Citations (1)
| Title |
|---|
| A. POHL ET AL.: "Fabrication and Measurement of Fiber-Matched InP Rib Waveguides", FREQUENZ, vol. 47, no. 1/2, February 1993 (1993-02-01), BERLIN DE, pages 12 - 16 * |
Also Published As
| Publication number | Publication date |
|---|---|
| ES2127883T3 (es) | 1999-05-01 |
| JPH07168045A (ja) | 1995-07-04 |
| ATE175031T1 (de) | 1999-01-15 |
| EP0645650B1 (de) | 1998-12-23 |
| DE69415455D1 (de) | 1999-02-04 |
| DE69415455T2 (de) | 1999-06-10 |
| US5539845A (en) | 1996-07-23 |
| EP0645650A1 (de) | 1995-03-29 |
| JP2934719B2 (ja) | 1999-08-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A1B | A search report has been drawn up | ||
| BV | The patent application has lapsed |