NL9001451A - THREE-WAY VALVE. - Google Patents
THREE-WAY VALVE. Download PDFInfo
- Publication number
- NL9001451A NL9001451A NL9001451A NL9001451A NL9001451A NL 9001451 A NL9001451 A NL 9001451A NL 9001451 A NL9001451 A NL 9001451A NL 9001451 A NL9001451 A NL 9001451A NL 9001451 A NL9001451 A NL 9001451A
- Authority
- NL
- Netherlands
- Prior art keywords
- way valve
- valve according
- bearing
- shut
- valve
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
- F16K11/14—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by one actuating member, e.g. a handle
- F16K11/16—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by one actuating member, e.g. a handle which only slides, or only turns, or only swings in one plane
- F16K11/163—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by one actuating member, e.g. a handle which only slides, or only turns, or only swings in one plane only turns
- F16K11/165—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by one actuating member, e.g. a handle which only slides, or only turns, or only swings in one plane only turns with the rotating spindles parallel to the closure members
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanically-Actuated Valves (AREA)
- Fluid-Driven Valves (AREA)
Description
Titel: Driewegklep.Title: Three-way valve.
De uitvinding heeft betrekking op een driewegklep voorzien van een huis met een kamer waarin een drietal poorten uitmonden, in welke kamer middelen zijn opgenomen voor het telkens afsluiten van ten minste één poort, en welke middelen van buiten af bedienbaar zijn.The invention relates to a three-way valve provided with a house with a chamber into which three gates open, in which chamber means are included for closing at least one gate in each case, and which means can be operated from the outside.
Dergelijke algemeen bekende driewegkleppen hebben het nadeel dat steeds twee poorten met elkaar in verbinding staan, dat wil zeggen dat er slechts één tegelijkertijd is afgesloten. Bovendien bestaat een ander nadeel daaruit dat bij enkele van de bekende driewegkleppen tijdens de bediening van de poortafsluitmiddelen alle drie poorten met elkaar in verbinding staan.Such generally known three-way valves have the drawback that two ports are always connected to each other, i.e. only one is closed at a time. In addition, another drawback is that in some of the known three-way valves, all three ports are connected to each other during the operation of the gate closing means.
De uitvinding beoogt genoemde nadelen op te heffen en een driewegklep te verschaffen waarbij is gewaarborgd dat telkens slechts twee poorten met elkaar in verbinding staan en waarbij is gewaarborgd dat nooit de mogelijkheid aanwezig is om alle drie poorten ten opzichte van elkaar te openen.The object of the invention is to eliminate the drawbacks mentioned and to provide a three-way valve, whereby it is ensured that only two gates are connected to each other and that it is ensured that the possibility of opening all three gates relative to each other is never present.
Hiertoe vertoont de driewegklep volgens de uitvinding het kenmerk, dat genoemde middelen zodanig zijn uitgevoerd, dat in wezen drie standen mogelijk zijn nl. een gesloten midden- of ruststand, alsmede een tweede stand waarin een toe- en afvoer met elkaar in verbinding staan en een derde stand, waarin een andere toe- en afvoer met elkaar in verbinding staan, en waarbij de overgang van de ene naar de andere stand alleen via een gesloten tussenstand kan plaatsvinden.To this end, the three-way valve according to the invention is characterized in that said means are designed in such a way that essentially three positions are possible, namely a closed middle or rest position, as well as a second position in which an inlet and outlet are connected and a third position, in which another inlet and outlet are connected to each other, and the transition from one position to the other can only take place via a closed intermediate position.
Door deze maatregel wordt een optimale veiligheidswaarborg verkregen, waarbij wordt voorkomen dat ongewenste toe- of afvoeropeningen met elkaar in verbinding kunnen worden gebracht. Dit is in het bijzonder van belang wanneer met dergelijke kleppen gassen worden gestuurd die bij vermenging kans op explosies tot gevolg hebben.This measure provides an optimum safety guarantee, whereby it is prevented that undesired supply or discharge openings can be connected to each other. This is of particular importance when such valves are used to send gases which, when mixed, cause explosions.
Daarbij kunnen de genoemde middelen zijn voorzien van een excentrisch in de bedieningsmiddelen opgesteld lager. Dit lager kan daarbij werkzaam zijn verbonden met een tweetal poortafsluitkleppen.The said means can herein be provided with a bearing arranged eccentrically in the operating means. This bearing can then be operatively connected to two gate closing valves.
De poortafsluitkleppen kunnen daarbij zijn voorzien van klepstelen die op zich onder invloed staan van het excentrisch opgestelde lager.The gate closing valves can herein be provided with valve stems which are themselves influenced by the eccentrically arranged bearing.
Daarbij kan zich tussen het excentrisch opgestelde lager en elke klepsteel een tuimelaar bevinden.In addition, a rocker arm may be located between the eccentrically arranged bearing and each valve stem.
Doordat het huis in wezen bestaat uit een bovenblok en een onderblok welke van elkaar zijn gescheiden door een flensplaat of soortgelijk afsluitorgaan en de poorten uitmonden in het onderblok wordt gewaarborgd dat de omgeving vrij blijft van het te verwerken fluïdum.Since the housing essentially consists of an upper block and a lower block which are separated from each other by a flange plate or similar closing member and the ports open into the lower block, it is ensured that the environment remains free of the fluid to be processed.
In dit opzicht wordt een verdere verbetering verkregen wanneer het zich in het onderblok bevindende deel van elke klepsteel is omgeven door een fluïdumdichte balg.In this regard, a further improvement is obtained when the lower block portion of each valve stem is surrounded by a fluid-tight bellows.
Verbetering van de werking van de inrichting wordt verkregen wanneer elke klepsteel is omgeven door een veer die zodanig is afgesteund dat de betreffende klep naar de gesloten stand wordt gedrongen. Genoemde veer kan zich daarbij in het bovenblok bevinden.Improvement of the operation of the device is obtained when each valve stem is surrounded by a spring which is supported in such a way that the relevant valve is forced to the closed position. The said spring can be located in the top block.
Een verdere waarborg voor een fluïdumdichte constructie wordt verkregen door elke afsluitklep door middel van een lasverbinding te verbinden met de betreffende klepsteelzijde. Daarbij kan de klepsteelonderzijde zijn voorzien van een koppelstuk waaraan zowel de afsluitklep als de fluïdumdichte balg door lassen zijn verbonden. Op deze wijze wordt een eenvoudige, doch gewaarborgde fluïdumdichte verbinding verkregen .A further guarantee for a fluid-tight construction is obtained by welding each shut-off valve to the relevant valve stem side by means of a welded connection. The valve stem underside can herein be provided with a coupling piece to which both the shut-off valve and the fluid-tight bellows are connected by welding. In this way a simple, yet guaranteed fluid-tight connection is obtained.
Ter verduidelijking van de uitvinding zal thans, onder verwijzing naar de tekening een uitvoeringsvoorbeeld van de driewegklep worden beschreven. In de tekening toont: fig. 1 een schematische dwarsdoorsnede van de driewegklep volgens de uitvinding; fig. 2 een doorsnede volgens de lijn II-II in fig. 1; fig. 3 een doorsnede volgens de lijn III-III in fig. 1; en fig. 4 een schematisch aanzicht van een andere uitvoeringsvorm van de driewegklep.To clarify the invention, an exemplary embodiment of the three-way valve will now be described with reference to the drawing. In the drawing: Fig. 1 shows a schematic cross-section of the three-way valve according to the invention; fig. 2 shows a section according to the line II-II in fig. 1; fig. 3 shows a section according to the line III-III in fig. 1; and Fig. 4 is a schematic view of another embodiment of the three-way valve.
Volgens de tekening is een driewegklep voorzien van een huis 1 bestaande uit een bovenblok 2 en een onderblok 3.According to the drawing, a three-way valve is provided with a housing 1 consisting of an upper block 2 and a lower block 3.
Tussen het boven- en onderblok bevindt zich een flensplaat 4 uitgerust met een afdichtring 5 welke zorgt voor een fluïdum-dichte afsluiting. Aan de bovenzijde van het huis bevindt zich een draaibare bedieningsknop 6, die door middel van een schroef 7 draaibaar is verbonden met het bovenblok 2. Het bovenblok 2 bevat een uitsparing 8 waarin zich een excentrisch aangebrachte naaf 9 uitstrekt. Op genoemd excentrisch opgestelde naaf 9 is een lager 10 gemonteerd.(zie fig. 3).Between the top and bottom block there is a flange plate 4 equipped with a sealing ring 5 which provides a fluid-tight seal. At the top of the housing there is a rotatable operating button 6, which is rotatably connected to the top block 2 by means of a screw 7. The top block 2 contains a recess 8 in which an eccentrically arranged hub 9 extends. A bearing 10 is mounted on said eccentrically arranged hub 9 (see fig. 3).
Genoemd lager 10 kan in een weergegeven uitvoerings-voorbeeld samenwerken met een tweetal diametraal tegenover elkaar opgestelde tuimelaars»11,12 die door middel van assen 13 resp. 14 draaibaar in de uitsparing 8 zijn opgesteld.In a shown exemplary embodiment, said bearing 10 can cooperate with two diametrically opposed tumblers »11, 12 which are arranged by means of shafts 13 and 12, respectively. 14 are rotatably arranged in the recess 8.
De van de met het lager 10 samenwerkende einden van de tuimelaars 11,12 afgekeerde einden grijpen telkens onder steunringen 15 resp. 16 bevestigd op klepstelen 17 resp. 18.The ends remote from the ends of the rocker arms 11, 12 cooperating with the bearing 10 each engage under support rings 15 and 12, respectively. 16 mounted on valve stems 17 and 16, respectively. 18.
De klepstelen 17 resp. 18 reiken in langsrichting door de in zijn algemeenheid met 19 aangeduide kamer aangebracht in het huis 1.The valve stems 17 resp. 18 extend in the longitudinal direction through the chamber generally indicated by 19 arranged in the housing 1.
Aan de klepstelen 17 resp. 18 bevindt zich ter plaatse van het ondereinde van het zich in het bovenblok 2 bevindende deel een kraag 20 resp. 40. Tussen deze kraag en het boveneinde van de kamer 19 bevindt zich telkens een veer 21 resp. 22 teneinde de klepsteel in de naar beneden gerichte stand te dringen.On the valve stems 17 resp. 18, at the location of the lower end of the part located in the top block 2, there is a collar 20, respectively. 40. A spring 21 and resp. 22 to urge the valve stem into the downward position.
De klepsteel is aan de onderzijde voorzien van een afsluitklep 23 resp. 24 ingericht voor samenwerking met kleppoorten 25 resp. 26. Op de buitenwaarts gerichte einden van de kleppoorten 25 resp. 26 sluiten aansluitnippels 27 resp. 28 aan, terwijl op de derde poort 29 een aansluit-nippel 30 aansluit (zie fig. 2).The valve stem is provided at the bottom with a shut-off valve 23 resp. 24 arranged for cooperation with flap ports 25 resp. 26. On the outwardly directed ends of the valve ports 25 resp. 26 close connection nipples 27 resp. 28, while a connecting nipple 30 connects to the third port 29 (see fig. 2).
De verbinding tussen elke afsluitklep en de klepsteel wordt telkens gevormd door een koppelstuk 31 dat op eenvoudige wijze door middel van een schroefverbinding met de onderzijde van de betreffende klepsteel is verbonden: daar dit geheel zich telkens binnen een afdichtingsbalg 32 bevindt behoeft deze verbinding niet fluïdumdicht te zijn. De respectieve afsluitkleppen 23,24 zijn telkens door schroeven aan het koppelstuk bevestigd. Teneinde een fluïdumdichte afsluiting te verkrijgen is rond de klepsteel tussen de flensplaat 4 en een kraag van het koppelstuk genoemde afdichtingsbalg 32 aangebracht . De bevestigingen van de balg bestaan daarbij telkens uit lasnaden.The connection between each shut-off valve and the valve stem is in each case formed by a coupling piece 31 which is simply connected to the underside of the relevant valve stem by means of a screw connection: since this unit is always located within a sealing bellows 32, this connection need not be fluid-tight. to be. The respective shut-off valves 23, 24 are each attached to the coupling piece by screws. In order to obtain a fluid-tight seal, said sealing bellows 32 is arranged around the valve stem between the flange plate 4 and a collar of the coupling piece. The bellows' fixings consist of weld seams.
In de tekening is verder de ene klep in de geopende en de andere klep in de gesloten stand weergegeven.The drawing also shows one valve in the opened and the other valve in the closed position.
De werking van de driewegklep zal duidelijk zijn. Door draaiing van de bedieningsknop zal, als gevolg van de excentrische opstelling van de naaf in de bedieningsknop, elke tuimelaar worden bewogen, dat wil zeggen hetzij naar de geopende stand hetzij naar de gesloten stand van de afsluitklep. De constructie is hierbij zodanig dat het openen van een klep eerst dan plaatsvindt wanneer de andere, met de afsluitklep samenwerkende kleppoort is gesloten. Tussen de geopende respectievelijk gesloten stand bevindt zich altijd een neutrale stand waarin, in het onderhavige geval beide afsluitkleppen de respectieve poorten gesloten zullen houden.The operation of the three-way valve will be clear. Rotation of the control knob will cause each rocker arm to be moved, i.e., either to the open position or to the closed position of the shutoff valve, due to the eccentric arrangement of the hub in the control knob. The construction is such that the opening of a valve only takes place when the other valve port cooperating with the shut-off valve is closed. Between the opened or closed position there is always a neutral position in which, in the present case, both shut-off valves will keep the respective ports closed.
In de hiervoor beschreven uitvoeringsvorm is in wezen sprake van een mechanische constructie, doch het zal duidelijk zijn dat ook andere constructies mogelijk zijn, zo zal b.v. ook een pneumatische, hydraulische, elektronische of andere oplossing kunnen worden gekozen om het beoogde doel te bereiken: als voorbeeld hiervan wordt gewezen op de bijgaande figuur 4 waarin zeer schematisch een mogelijke uitvoeringsvorm is weergegeven : details zijn niet weergegeven, daar deze ook zeer wel bekend zijn bij soortgelijke inrichtingen.In the embodiment described above, there is essentially a mechanical construction, but it will be clear that other constructions are also possible, e.g. a pneumatic, hydraulic, electronic or other solution can also be chosen to achieve the intended goal: as an example of this, reference is made to the accompanying figure 4 in which a possible embodiment is shown very schematically: details are not shown, as they are also very well known at similar establishments.
Bij de in fig. 4 weergegeven andere uitvoeringsvorm voor het bedienen van een driewegklep wordt uitgegaan van een cilinder 50 met een tweetal fluidumaansluitingen 51 resp. 52. In de cilinder 50 bevindt zich een zuiger 53 met een doorlopende zuigerstang 54 die zowel naar de ene als naar de andere zijde toe uitsteekt. De uitstekende einden van de zuigerstang 54 bedienen op hun beurt haakse hefbomen 55 resp. 56. De hefbomen 55 resp. 56 zijn elk met het freem verbonden ter plaatse van rotatieassen 57 resp. 58 en bedienen daarbij klepstelen 59, 60, die vergelijkbaar zijn met de klepstelen 17 resp. 18 die hiervoor aan de hand van fign. 1 t/m 3 zijn beschreven.The other embodiment for operating a three-way valve shown in Fig. 4 is based on a cylinder 50 with two fluid connections 51 and 51, respectively. 52. In the cylinder 50 there is a piston 53 with a continuous piston rod 54 which protrudes to one side as well as to the other. The projecting ends of the piston rod 54, in turn, actuate right-angle levers 55, respectively. 56. The levers 55 resp. 56 are each connected to the frame at rotational axes 57, respectively. 58 and thereby operate valve stems 59, 60, which are comparable to the valve stems 17 and 60, respectively. 18 which has been described above with reference to Figs. 1 to 3 are described.
Rond de klepstelen bevinden zich dan ook op soortgelijke wijze als aan de hand van de fign.1-3 beschreven veren 61 resp. 62, die de klepstelen telkens naar de gesloten kiepstand dringen.The valve stems are therefore located in a similar manner to springs 61 and 61, respectively, described with reference to Figs. 1-3. 62, which each push the valve stems to the closed tilting position.
Daar de overige benodigde elementen volledig gelijk kunnen zijn aan die welke hiervoor aan de hand van de fign. 1-3 zijn beschreven, zullen deze hier niet verder worden weergegeven.Since the other required elements can be completely the same as those previously required on the basis of Figs. 1-3 will not be shown here.
Het zal duidelijk zijn dat binnen het raam van de uitvin-dingsgedachte een groot aantal wijzigingen mogelijk is: zo kan het aantal poorten en afsluitkleppen worden vergroot zonder dat telkens meer dan twee poorten met elkaar in verbinding staan. Indien echter gewenst zouden ook meer dan drie poorten kunnen worden aangebracht.It will be clear that within the scope of the inventive idea a large number of changes are possible: for instance, the number of gates and shut-off valves can be increased without more than two gates being connected to each other. If desired, however, more than three ports could also be provided.
Claims (12)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL9001451A NL9001451A (en) | 1990-06-25 | 1990-06-25 | THREE-WAY VALVE. |
PCT/NL1991/000108 WO1992000477A1 (en) | 1990-06-25 | 1991-06-25 | Three-way valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL9001451 | 1990-06-25 | ||
NL9001451A NL9001451A (en) | 1990-06-25 | 1990-06-25 | THREE-WAY VALVE. |
Publications (1)
Publication Number | Publication Date |
---|---|
NL9001451A true NL9001451A (en) | 1992-01-16 |
Family
ID=19857314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL9001451A NL9001451A (en) | 1990-06-25 | 1990-06-25 | THREE-WAY VALVE. |
Country Status (2)
Country | Link |
---|---|
NL (1) | NL9001451A (en) |
WO (1) | WO1992000477A1 (en) |
Families Citing this family (228)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
HUT69337A (en) * | 1991-03-19 | 1995-09-28 | Welsh Water Enterprises Ltd | Method, device and monitoring system for dermining organic contens in a liquid sample |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102532607B1 (en) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and method of operating the same |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
KR102546317B1 (en) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Gas supply unit and substrate processing apparatus including the same |
KR20180068582A (en) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
KR102700194B1 (en) | 2016-12-19 | 2024-08-28 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
KR20190009245A (en) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Methods for forming a semiconductor device structure and related semiconductor device structures |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
KR102491945B1 (en) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
WO2019103610A1 (en) | 2017-11-27 | 2019-05-31 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
JP7214724B2 (en) | 2017-11-27 | 2023-01-30 | エーエスエム アイピー ホールディング ビー.ブイ. | Storage device for storing wafer cassettes used in batch furnaces |
US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
TWI799494B (en) | 2018-01-19 | 2023-04-21 | 荷蘭商Asm 智慧財產控股公司 | Deposition method |
CN111630203A (en) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | Method for depositing gap filling layer by plasma auxiliary deposition |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
JP7124098B2 (en) | 2018-02-14 | 2022-08-23 | エーエスエム・アイピー・ホールディング・ベー・フェー | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
KR102636427B1 (en) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing method and apparatus |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
KR102646467B1 (en) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
KR102596988B1 (en) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | Method of processing a substrate and a device manufactured by the same |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
TWI840362B (en) | 2018-06-04 | 2024-05-01 | 荷蘭商Asm Ip私人控股有限公司 | Wafer handling chamber with moisture reduction |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
KR102568797B1 (en) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing system |
TW202409324A (en) | 2018-06-27 | 2024-03-01 | 荷蘭商Asm Ip私人控股有限公司 | Cyclic deposition processes for forming metal-containing material |
WO2020003000A1 (en) | 2018-06-27 | 2020-01-02 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
KR102707956B1 (en) | 2018-09-11 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | Method for deposition of a thin film |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
TWI844567B (en) | 2018-10-01 | 2024-06-11 | 荷蘭商Asm Ip私人控股有限公司 | Substrate retaining apparatus, system including the apparatus, and method of using same |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102592699B1 (en) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same |
KR102605121B1 (en) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
KR102546322B1 (en) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (en) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and substrate processing apparatus including the same |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
KR102636428B1 (en) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | A method for cleaning a substrate processing apparatus |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
JP7504584B2 (en) | 2018-12-14 | 2024-06-24 | エーエスエム・アイピー・ホールディング・ベー・フェー | Method and system for forming device structures using selective deposition of gallium nitride - Patents.com |
TWI819180B (en) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
KR20200091543A (en) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | Semiconductor processing device |
CN111524788B (en) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | Method for topologically selective film formation of silicon oxide |
KR102626263B1 (en) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | Cyclical deposition method including treatment step and apparatus for same |
JP2020136678A (en) | 2019-02-20 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | Method for filing concave part formed inside front surface of base material, and device |
KR20200102357A (en) | 2019-02-20 | 2020-08-31 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for plug fill deposition in 3-d nand applications |
TWI845607B (en) | 2019-02-20 | 2024-06-21 | 荷蘭商Asm Ip私人控股有限公司 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
TWI842826B (en) | 2019-02-22 | 2024-05-21 | 荷蘭商Asm Ip私人控股有限公司 | Substrate processing apparatus and method for processing substrate |
KR20200108242A (en) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer |
KR20200108243A (en) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | Structure Including SiOC Layer and Method of Forming Same |
US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
KR20200116033A (en) | 2019-03-28 | 2020-10-08 | 에이에스엠 아이피 홀딩 비.브이. | Door opener and substrate processing apparatus provided therewith |
KR20200116855A (en) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | Method of manufacturing semiconductor device |
KR20200123380A (en) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | Layer forming method and apparatus |
KR20200125453A (en) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Gas-phase reactor system and method of using same |
KR20200130121A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Chemical source vessel with dip tube |
KR20200130118A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Method for Reforming Amorphous Carbon Polymer Film |
KR20200130652A (en) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing material onto a surface and structure formed according to the method |
JP2020188254A (en) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | Wafer boat handling device, vertical batch furnace, and method |
JP2020188255A (en) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | Wafer boat handling device, vertical batch furnace, and method |
USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141003A (en) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | Gas-phase reactor system including a gas detector |
KR20200143254A (en) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method |
USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
KR20210005515A (en) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | Temperature control assembly for substrate processing apparatus and method of using same |
JP7499079B2 (en) | 2019-07-09 | 2024-06-13 | エーエスエム・アイピー・ホールディング・ベー・フェー | Plasma device using coaxial waveguide and substrate processing method |
CN112216646A (en) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | Substrate supporting assembly and substrate processing device comprising same |
KR20210010307A (en) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
KR20210010816A (en) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Radical assist ignition plasma system and method |
KR20210010820A (en) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Methods of forming silicon germanium structures |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
KR20210010817A (en) | 2019-07-19 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Method of Forming Topology-Controlled Amorphous Carbon Polymer Film |
TWI839544B (en) | 2019-07-19 | 2024-04-21 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming topology-controlled amorphous carbon polymer film |
CN112309843A (en) | 2019-07-29 | 2021-02-02 | Asm Ip私人控股有限公司 | Selective deposition method for achieving high dopant doping |
CN112309900A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
CN112309899A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
CN118422165A (en) | 2019-08-05 | 2024-08-02 | Asm Ip私人控股有限公司 | Liquid level sensor for chemical source container |
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
JP2021031769A (en) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | Production apparatus of mixed gas of film deposition raw material and film deposition apparatus |
USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
KR20210024423A (en) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for forming a structure with a hole |
USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
KR20210024420A (en) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210029090A (en) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | Methods for selective deposition using a sacrificial capping layer |
KR20210029663A (en) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (en) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process |
KR20210042810A (en) | 2019-10-08 | 2021-04-20 | 에이에스엠 아이피 홀딩 비.브이. | Reactor system including a gas distribution assembly for use with activated species and method of using same |
TWI846953B (en) | 2019-10-08 | 2024-07-01 | 荷蘭商Asm Ip私人控股有限公司 | Substrate processing device |
KR20210043460A (en) | 2019-10-10 | 2021-04-21 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming a photoresist underlayer and structure including same |
US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
TWI834919B (en) | 2019-10-16 | 2024-03-11 | 荷蘭商Asm Ip私人控股有限公司 | Method of topology-selective film formation of silicon oxide |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (en) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for selectively etching films |
KR20210050453A (en) | 2019-10-25 | 2021-05-07 | 에이에스엠 아이피 홀딩 비.브이. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (en) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | Structures with doped semiconductor layers and methods and systems for forming same |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (en) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
KR20210065848A (en) | 2019-11-26 | 2021-06-04 | 에이에스엠 아이피 홀딩 비.브이. | Methods for selectivley forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
CN112951697A (en) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
CN112885693A (en) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
CN112885692A (en) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
JP7527928B2 (en) | 2019-12-02 | 2024-08-05 | エーエスエム・アイピー・ホールディング・ベー・フェー | Substrate processing apparatus and substrate processing method |
KR20210070898A (en) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
TW202125596A (en) | 2019-12-17 | 2021-07-01 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
KR20210089079A (en) | 2020-01-06 | 2021-07-15 | 에이에스엠 아이피 홀딩 비.브이. | Channeled lift pin |
TW202140135A (en) | 2020-01-06 | 2021-11-01 | 荷蘭商Asm Ip私人控股有限公司 | Gas supply assembly and valve plate assembly |
US11993847B2 (en) | 2020-01-08 | 2024-05-28 | Asm Ip Holding B.V. | Injector |
KR102675856B1 (en) | 2020-01-20 | 2024-06-17 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming thin film and method of modifying surface of thin film |
TW202130846A (en) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming structures including a vanadium or indium layer |
TW202146882A (en) | 2020-02-04 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | Method of verifying an article, apparatus for verifying an article, and system for verifying a reaction chamber |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
TW202203344A (en) | 2020-02-28 | 2022-01-16 | 荷蘭商Asm Ip控股公司 | System dedicated for parts cleaning |
KR20210116249A (en) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | lockout tagout assembly and system and method of using same |
KR20210116240A (en) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate handling device with adjustable joints |
CN113394086A (en) | 2020-03-12 | 2021-09-14 | Asm Ip私人控股有限公司 | Method for producing a layer structure having a target topological profile |
KR20210124042A (en) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | Thin film forming method |
TW202146689A (en) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | Method for forming barrier layer and method for manufacturing semiconductor device |
TW202145344A (en) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | Apparatus and methods for selectively etching silcon oxide films |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
KR20210128343A (en) | 2020-04-15 | 2021-10-26 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming chromium nitride layer and structure including the chromium nitride layer |
US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
TW202146831A (en) | 2020-04-24 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | Vertical batch furnace assembly, and method for cooling vertical batch furnace |
JP2021172884A (en) | 2020-04-24 | 2021-11-01 | エーエスエム・アイピー・ホールディング・ベー・フェー | Method of forming vanadium nitride-containing layer and structure comprising vanadium nitride-containing layer |
KR20210132600A (en) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
KR20210134226A (en) | 2020-04-29 | 2021-11-09 | 에이에스엠 아이피 홀딩 비.브이. | Solid source precursor vessel |
KR20210134869A (en) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Fast FOUP swapping with a FOUP handler |
KR20210141379A (en) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | Laser alignment fixture for a reactor system |
TW202146699A (en) | 2020-05-15 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming a silicon germanium layer, semiconductor structure, semiconductor device, method of forming a deposition layer, and deposition system |
KR20210143653A (en) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
KR20210145078A (en) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | Structures including multiple carbon layers and methods of forming and using same |
KR102702526B1 (en) | 2020-05-22 | 2024-09-03 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus for depositing thin films using hydrogen peroxide |
TW202201602A (en) | 2020-05-29 | 2022-01-01 | 荷蘭商Asm Ip私人控股有限公司 | Substrate processing device |
TW202212620A (en) | 2020-06-02 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | Apparatus for processing substrate, method of forming film, and method of controlling apparatus for processing substrate |
TW202218133A (en) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | Method for forming a layer provided with silicon |
TW202217953A (en) | 2020-06-30 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | Substrate processing method |
KR102707957B1 (en) | 2020-07-08 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | Method for processing a substrate |
TW202219628A (en) | 2020-07-17 | 2022-05-16 | 荷蘭商Asm Ip私人控股有限公司 | Structures and methods for use in photolithography |
TW202204662A (en) | 2020-07-20 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | Method and system for depositing molybdenum layers |
US12040177B2 (en) | 2020-08-18 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes |
KR20220027026A (en) | 2020-08-26 | 2022-03-07 | 에이에스엠 아이피 홀딩 비.브이. | Method and system for forming metal silicon oxide and metal silicon oxynitride |
TW202229601A (en) | 2020-08-27 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | Method of forming patterned structures, method of manipulating mechanical property, device structure, and substrate processing system |
USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
US12009224B2 (en) | 2020-09-29 | 2024-06-11 | Asm Ip Holding B.V. | Apparatus and method for etching metal nitrides |
KR20220045900A (en) | 2020-10-06 | 2022-04-13 | 에이에스엠 아이피 홀딩 비.브이. | Deposition method and an apparatus for depositing a silicon-containing material |
CN114293174A (en) | 2020-10-07 | 2022-04-08 | Asm Ip私人控股有限公司 | Gas supply unit and substrate processing apparatus including the same |
TW202229613A (en) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | Method of depositing material on stepped structure |
KR20220053482A (en) | 2020-10-22 | 2022-04-29 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing vanadium metal, structure, device and a deposition assembly |
TW202223136A (en) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | Method for forming layer on substrate, and semiconductor processing system |
TW202235649A (en) | 2020-11-24 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | Methods for filling a gap and related systems and devices |
TW202235675A (en) | 2020-11-30 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | Injector, and substrate processing apparatus |
US11946137B2 (en) | 2020-12-16 | 2024-04-02 | Asm Ip Holding B.V. | Runout and wobble measurement fixtures |
TW202231903A (en) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | Transition metal deposition method, transition metal layer, and deposition assembly for depositing transition metal on substrate |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR686869A (en) * | 1930-12-31 | 1930-07-31 | Jacob Ets | Mixer tap |
US2240163A (en) * | 1938-09-30 | 1941-04-29 | Permutit Co | Valve apparatus for controlling hydraulic or pneumatic machines |
US2441253A (en) * | 1944-10-30 | 1948-05-11 | Rohim Mfg Company Inc | Valve |
GB1337173A (en) * | 1971-05-17 | 1973-11-14 | Tecalemit Engineering | Fluid flow control |
FR2517790A1 (en) * | 1981-12-07 | 1983-06-10 | British Nuclear Fuels Ltd | Process gas valve esp. of uranium isotope separator - with sealed operating arrangement providing back-up for bellows seal |
-
1990
- 1990-06-25 NL NL9001451A patent/NL9001451A/en not_active Application Discontinuation
-
1991
- 1991-06-25 WO PCT/NL1991/000108 patent/WO1992000477A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
WO1992000477A1 (en) | 1992-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NL9001451A (en) | THREE-WAY VALVE. | |
CA1168063A (en) | Cleanable sampling valve | |
US4924903A (en) | `Breech-block` tap for the supply of cold or hot water with ceramic sealing plates | |
RU2259507C2 (en) | Half-ball valve | |
ATE147245T1 (en) | AUTOMATIC ACTUATING DEVICE FOR A FLOW CONTROL VALVE | |
NO157673B (en) | MOLDING VALVE DEVICE. | |
EP0430664B1 (en) | Valve assembley | |
JPH06146705A (en) | Floor-hinge | |
US3116748A (en) | Pressure responsive mixing valve | |
ES1027387U (en) | Flow control valve. | |
US4328830A (en) | Fluid mixing valve | |
US4538640A (en) | Multiposition selector valve | |
US3817287A (en) | Orifice fitting | |
GB2300896A (en) | A valve | |
US4662394A (en) | Tight shut-off valve with flow control element | |
US4501295A (en) | Transfer valve | |
US4222413A (en) | Shut-off valve | |
US4586538A (en) | Spindle valve for a tube system for liquids | |
CA1096355A (en) | Eccentrically rotatable valve | |
US3364944A (en) | Valve | |
US2966172A (en) | Overlapping valve assembly | |
US630124A (en) | Rotary valve. | |
US4295491A (en) | Double angled-disc diverter valve or the like | |
US24369A (en) | bramwbll | |
US4354664A (en) | Fail-safe valve |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A1B | A search report has been drawn up | ||
BV | The patent application has lapsed |