NL7408711A - - Google Patents
Info
- Publication number
- NL7408711A NL7408711A NL7408711A NL7408711A NL7408711A NL 7408711 A NL7408711 A NL 7408711A NL 7408711 A NL7408711 A NL 7408711A NL 7408711 A NL7408711 A NL 7408711A NL 7408711 A NL7408711 A NL 7408711A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/027—Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
- H10P95/06—Planarisation of inorganic insulating materials
- H10P95/062—Planarisation of inorganic insulating materials involving a dielectric removal step
- H10P95/064—Planarisation of inorganic insulating materials involving a dielectric removal step the removal being chemical etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
- H10W20/42—Vias, e.g. via plugs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/45—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts
- H10W20/48—Insulating materials thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/913—Active solid-state devices, e.g. transistors, solid-state diodes with means to absorb or localize unwanted impurities or defects from semiconductors, e.g. heavy metal gettering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/91—Controlling charging state at semiconductor-insulator interface
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US375295A US3887994A (en) | 1973-06-29 | 1973-06-29 | Method of manufacturing a semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7408711A true NL7408711A (https=) | 1974-12-31 |
Family
ID=23480293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7408711A NL7408711A (https=) | 1973-06-29 | 1974-06-27 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3887994A (https=) |
| JP (1) | JPS5323067B2 (https=) |
| AU (1) | AU474451B2 (https=) |
| CA (1) | CA1032658A (https=) |
| CH (1) | CH568655A5 (https=) |
| DE (1) | DE2425185C3 (https=) |
| FR (1) | FR2235485B1 (https=) |
| GB (1) | GB1466679A (https=) |
| IT (1) | IT1010166B (https=) |
| NL (1) | NL7408711A (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4290184A (en) * | 1978-03-20 | 1981-09-22 | Texas Instruments Incorporated | Method of making post-metal programmable MOS read only memory |
| US4230504B1 (en) * | 1978-04-27 | 1997-03-04 | Texas Instruments Inc | Method of making implant programmable N-channel rom |
| US4268950A (en) * | 1978-06-05 | 1981-05-26 | Texas Instruments Incorporated | Post-metal ion implant programmable MOS read only memory |
| JPS55140986U (https=) * | 1979-03-28 | 1980-10-08 | ||
| JPS56114159A (en) * | 1980-02-15 | 1981-09-08 | Pioneer Electronic Corp | Disc insertion detecting mechanism of autoloading player |
| DE3217026A1 (de) * | 1981-05-06 | 1982-12-30 | Mitsubishi Denki K.K., Tokyo | Halbleitervorrichtung |
| US4439261A (en) * | 1983-08-26 | 1984-03-27 | International Business Machines Corporation | Composite pallet |
| US4584026A (en) * | 1984-07-25 | 1986-04-22 | Rca Corporation | Ion-implantation of phosphorus, arsenic or boron by pre-amorphizing with fluorine ions |
| GB2165692B (en) * | 1984-08-25 | 1989-05-04 | Ricoh Kk | Manufacture of interconnection patterns |
| GB8729652D0 (en) * | 1987-12-19 | 1988-02-03 | Plessey Co Plc | Semi-conductive devices fabricated on soi wafers |
| JPH0750697B2 (ja) * | 1989-02-20 | 1995-05-31 | 株式会社東芝 | 半導体装置の製造方法 |
| US5468974A (en) * | 1994-05-26 | 1995-11-21 | Lsi Logic Corporation | Control and modification of dopant distribution and activation in polysilicon |
| US5432128A (en) * | 1994-05-27 | 1995-07-11 | Texas Instruments Incorporated | Reliability enhancement of aluminum interconnects by reacting aluminum leads with a strengthening gas |
| US6093936A (en) * | 1995-06-07 | 2000-07-25 | Lsi Logic Corporation | Integrated circuit with isolation of field oxidation by noble gas implantation |
| EP0776040A3 (en) * | 1995-09-27 | 1999-11-03 | Texas Instruments Incorporated | Integrated circuit interconnect and method |
| US6391754B1 (en) | 1996-09-27 | 2002-05-21 | Texas Instruments Incorporated | Method of making an integrated circuit interconnect |
| US6613671B1 (en) * | 2000-03-03 | 2003-09-02 | Micron Technology, Inc. | Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby |
| DE102015120848B4 (de) * | 2015-12-01 | 2017-10-26 | Infineon Technologies Ag | Herstellen einer Kontaktschicht auf einem Halbleiterkörper |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3515956A (en) * | 1967-10-16 | 1970-06-02 | Ion Physics Corp | High-voltage semiconductor device having a guard ring containing substitutionally active ions in interstitial positions |
| US3600797A (en) * | 1967-12-26 | 1971-08-24 | Hughes Aircraft Co | Method of making ohmic contacts to semiconductor bodies by indirect ion implantation |
| JPS4837232B1 (https=) * | 1968-12-04 | 1973-11-09 | ||
| BE759057A (https=) * | 1969-11-19 | 1971-05-17 | Philips Nv | |
| US3682729A (en) * | 1969-12-30 | 1972-08-08 | Ibm | Method of changing the physical properties of a metallic film by ion beam formation and devices produced thereby |
| JPS5137465B2 (https=) * | 1971-09-13 | 1976-10-15 | ||
| US3756861A (en) * | 1972-03-13 | 1973-09-04 | Bell Telephone Labor Inc | Bipolar transistors and method of manufacture |
-
1973
- 1973-06-29 US US375295A patent/US3887994A/en not_active Expired - Lifetime
-
1974
- 1974-04-24 GB GB1782374A patent/GB1466679A/en not_active Expired
- 1974-04-29 IT IT21997/74A patent/IT1010166B/it active
- 1974-05-03 AU AU68568/74A patent/AU474451B2/en not_active Expired
- 1974-05-17 JP JP5462874A patent/JPS5323067B2/ja not_active Expired
- 1974-05-21 FR FR7418493A patent/FR2235485B1/fr not_active Expired
- 1974-05-24 DE DE2425185A patent/DE2425185C3/de not_active Expired
- 1974-06-04 CA CA201,600A patent/CA1032658A/en not_active Expired
- 1974-06-06 CH CH772274A patent/CH568655A5/xx not_active IP Right Cessation
- 1974-06-27 NL NL7408711A patent/NL7408711A/xx not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| CH568655A5 (https=) | 1975-10-31 |
| DE2425185C3 (de) | 1978-07-06 |
| DE2425185A1 (de) | 1975-01-16 |
| GB1466679A (en) | 1977-03-09 |
| FR2235485B1 (https=) | 1976-12-24 |
| AU6856874A (en) | 1975-11-06 |
| JPS5323067B2 (https=) | 1978-07-12 |
| AU474451B2 (en) | 1976-07-22 |
| DE2425185B2 (de) | 1977-11-10 |
| JPS5024081A (https=) | 1975-03-14 |
| CA1032658A (en) | 1978-06-06 |
| IT1010166B (it) | 1977-01-10 |
| US3887994A (en) | 1975-06-10 |
| FR2235485A1 (https=) | 1975-01-24 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BC | A request for examination has been filed | ||
| A85 | Still pending on 85-01-01 | ||
| BV | The patent application has lapsed |