Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Publication of NL7402296ApublicationCriticalpatent/NL7402296A/xx
Publication of NL177057BpublicationCriticalpatent/NL177057B/xx
Application grantedgrantedCritical
Publication of NL177057CpublicationCriticalpatent/NL177057C/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/06—Electron sources; Electron guns
H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/248—Components associated with high voltage supply
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Electron Sources, Ion Sources
(AREA)
NL7402296A1973-03-031974-02-20Elektronenkanon van het veldemissie-type.
NL177057C
(nl)