NL7311976A - - Google Patents

Info

Publication number
NL7311976A
NL7311976A NL7311976A NL7311976A NL7311976A NL 7311976 A NL7311976 A NL 7311976A NL 7311976 A NL7311976 A NL 7311976A NL 7311976 A NL7311976 A NL 7311976A NL 7311976 A NL7311976 A NL 7311976A
Authority
NL
Netherlands
Application number
NL7311976A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7311976A publication Critical patent/NL7311976A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
NL7311976A 1972-08-31 1973-08-30 NL7311976A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7230978A FR2198000B1 (en) 1972-08-31 1972-08-31

Publications (1)

Publication Number Publication Date
NL7311976A true NL7311976A (en) 1974-03-04

Family

ID=9103749

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7311976A NL7311976A (en) 1972-08-31 1973-08-30

Country Status (6)

Country Link
JP (1) JPS4966577A (en)
CH (1) CH579154A5 (en)
DE (1) DE2342376A1 (en)
FR (1) FR2198000B1 (en)
GB (1) GB1383189A (en)
NL (1) NL7311976A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH633729A5 (en) * 1978-01-04 1982-12-31 Georgy Alexandrovich Kovalsky Device for coating products
JPS58195438U (en) * 1982-06-22 1983-12-26 日本電気株式会社 integrated circuit transport vehicle
EP0306612B2 (en) * 1987-08-26 1996-02-28 Balzers Aktiengesellschaft Process for depositing layers on substrates
GB8720415D0 (en) * 1987-08-28 1987-10-07 Vg Instr Group Vacuum evaporation & deposition
DE3832693A1 (en) * 1988-09-27 1990-03-29 Leybold Ag DEVICE FOR APPLYING DIELECTRIC OR METAL MATERIALS

Also Published As

Publication number Publication date
FR2198000B1 (en) 1975-01-03
DE2342376A1 (en) 1974-03-14
FR2198000A1 (en) 1974-03-29
CH579154A5 (en) 1976-08-31
GB1383189A (en) 1975-02-05
JPS4966577A (en) 1974-06-27

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