Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/67005—Apparatus not specifically provided for elsewhere
  • H01L21/67011—Apparatus for manufacture or treatment
  • H01L21/67017—Apparatus for fluid treatment
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
  • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
  • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T403/00—Joints and connections
  • Y10T403/32—Articulated members
  • Y10T403/32008—Plural distinct articulation axes
  • Y10T403/32041—Universal
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T403/00—Joints and connections
  • Y10T403/32—Articulated members
  • Y10T403/32606—Pivoted
  • Y10T403/32631—Universal ball and socket
  • Y10T403/32786—Divided socket-type coupling

Landscapes

• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Mechanical Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• Physics & Mathematics (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Materials Engineering (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
• Furnace Details (AREA)
• Discharge Heating (AREA)
• Automatic Assembly (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=4384529

Family Applications (1)

Country Status (18)

Families Citing this family (4)

Family Cites Families (3)

• 1972
  • 1972-08-25 CH CH1259472A patent/CH542024A/de not_active IP Right Cessation
• 1973
  • 1973-07-04 JP JP48074918A patent/JPS517624B2/ja not_active Expired
  • 1973-08-03 HU HUEE2168A patent/HU169517B/hu unknown
  • 1973-08-06 DE DE2339711A patent/DE2339711C2/de not_active Expired
  • 1973-08-08 US US386507A patent/US3865451A/en not_active Expired - Lifetime
  • 1973-08-13 GB GB3826573A patent/GB1435546A/en not_active Expired
  • 1973-08-21 IT IT28043/73A patent/IT998416B/it active
  • 1973-08-21 SE SE7311343A patent/SE384043B/xx unknown
  • 1973-08-21 FR FR7330291A patent/FR2196956B1/fr not_active Expired
  • 1973-08-22 CA CA179,408A patent/CA1010405A/en not_active Expired
  • 1973-08-23 DD DD173044A patent/DD110520A5/xx unknown
  • 1973-08-23 PL PL1973164812A patent/PL92566B1/pl unknown
  • 1973-08-23 LU LU68292A patent/LU68292A1/xx unknown
  • 1973-08-24 ES ES418155A patent/ES418155A1/es not_active Expired
  • 1973-08-24 AT AT738973A patent/AT323500B/de not_active IP Right Cessation
  • 1973-08-24 BE BE134931A patent/BE804018A/xx unknown
  • 1973-08-24 NL NL7311678A patent/NL7311678A/xx not_active Application Discontinuation
  • 1973-08-24 CS CS5934A patent/CS172873B2/cs unknown

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