NL7300915A - - Google Patents
Info
- Publication number
- NL7300915A NL7300915A NL7300915A NL7300915A NL7300915A NL 7300915 A NL7300915 A NL 7300915A NL 7300915 A NL7300915 A NL 7300915A NL 7300915 A NL7300915 A NL 7300915A NL 7300915 A NL7300915 A NL 7300915A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB315272A GB1405453A (en) | 1972-01-22 | 1972-01-22 | Alignment and holding device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7300915A true NL7300915A (Direct) | 1973-07-24 |
Family
ID=9752924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7300915A NL7300915A (Direct) | 1972-01-22 | 1973-01-22 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5012966A (Direct) |
| DE (1) | DE2302897A1 (Direct) |
| GB (1) | GB1405453A (Direct) |
| NL (1) | NL7300915A (Direct) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6110761Y2 (Direct) * | 1980-10-31 | 1986-04-05 | ||
| JPS61263136A (ja) * | 1985-05-15 | 1986-11-21 | Nitto Electric Ind Co Ltd | 薄板物品の支持テ−ブル |
| JPH07110455B2 (ja) * | 1992-10-27 | 1995-11-29 | 住友電気工業株式会社 | ウェハ固定装置 |
| CN102744697A (zh) * | 2012-07-17 | 2012-10-24 | 天脊煤化工集团股份有限公司 | 一种鲁奇炉灰锁上阀导向筒找正装置 |
-
1972
- 1972-01-22 GB GB315272A patent/GB1405453A/en not_active Expired
-
1973
- 1973-01-22 JP JP875473A patent/JPS5012966A/ja active Pending
- 1973-01-22 NL NL7300915A patent/NL7300915A/xx unknown
- 1973-01-22 DE DE2302897A patent/DE2302897A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2302897A1 (de) | 1973-07-19 |
| GB1405453A (en) | 1975-09-10 |
| JPS5012966A (Direct) | 1975-02-10 |