NL7214721A - - Google Patents
Info
- Publication number
- NL7214721A NL7214721A NL7214721A NL7214721A NL7214721A NL 7214721 A NL7214721 A NL 7214721A NL 7214721 A NL7214721 A NL 7214721A NL 7214721 A NL7214721 A NL 7214721A NL 7214721 A NL7214721 A NL 7214721A
- Authority
- NL
- Netherlands
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/02—Exposure apparatus for contact printing
- G03B27/14—Details
- G03B27/16—Illumination arrangements, e.g. positioning of lamps, positioning of reflectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/201—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Holders For Sensitive Materials And Originals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US19444771A | 1971-11-01 | 1971-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7214721A true NL7214721A (https=) | 1973-05-03 |
Family
ID=22717636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7214721A NL7214721A (https=) | 1971-11-01 | 1972-10-31 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3697178A (https=) |
| JP (1) | JPS5147573B2 (https=) |
| AU (1) | AU476473B2 (https=) |
| CA (1) | CA963981A (https=) |
| DE (1) | DE2253492A1 (https=) |
| FR (1) | FR2158339B1 (https=) |
| GB (1) | GB1388167A (https=) |
| IT (1) | IT969625B (https=) |
| NL (1) | NL7214721A (https=) |
| SE (1) | SE391988B (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3815993A (en) * | 1972-02-15 | 1974-06-11 | M Tarabocchia | Light projection apparatus and method for photoprinting |
| GB1537703A (en) * | 1976-01-27 | 1979-01-04 | Rca Corp | Fabrication of rectangular relief profiles in photoresist |
| US4157935A (en) * | 1977-12-23 | 1979-06-12 | International Business Machines Corporation | Method for producing nozzle arrays for ink jet printers |
| US4226522A (en) * | 1978-11-17 | 1980-10-07 | Energy Conversion Devices, Inc. | Imaging device |
| FR2465255B1 (fr) * | 1979-09-10 | 1987-02-20 | Roumiguieres Jean Louis | Procede pour reporter sur un support l'ombre fidele d'un masque perce de fentes distribuees periodiquement, et application de ce procede notamment en photolithogravure |
| DE19810055A1 (de) * | 1998-03-09 | 1999-09-23 | Suess Kg Karl | Verfahren zur Nahfeldbelichtung mit im wesentlichen parallelem Licht |
| DE10308328A1 (de) * | 2003-02-26 | 2004-09-09 | Giesecke & Devrient Gmbh | Verfahren zur Herstellung eines belichteten Substrats |
| US7771803B2 (en) * | 2004-10-27 | 2010-08-10 | Palo Alto Research Center Incorporated | Oblique parts or surfaces |
| US8309297B2 (en) | 2007-10-05 | 2012-11-13 | Micron Technology, Inc. | Methods of lithographically patterning a substrate |
| US8524443B2 (en) * | 2010-07-07 | 2013-09-03 | Eulitha A.G. | Method and apparatus for printing a periodic pattern with a large depth of focus |
| WO2013029985A2 (en) | 2011-09-02 | 2013-03-07 | Suss Microtec Lithography Gmbh | Method for manufacturing periodic structures on a surface of a substrate |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3423205A (en) * | 1964-10-30 | 1969-01-21 | Bunker Ramo | Method of making thin-film circuits |
| GB1144815A (en) * | 1965-08-20 | 1969-03-12 | Fuji Photo Film Co Ltd | A method of, and apparatus for, reversing and/or controlling the contrast of an image |
| US3469916A (en) * | 1966-10-12 | 1969-09-30 | Dennison Mfg Co | Photographic copying apparatus |
| DE1277661B (de) * | 1967-04-28 | 1968-09-12 | Zindler Lumoprint Kg | Belichtungsvorrichtung fuer ein Kopiergeraet |
| US3615449A (en) * | 1969-09-25 | 1971-10-26 | Rca Corp | Method of generating high area-density periodic arrays by diffraction imaging |
-
1971
- 1971-11-01 US US194447A patent/US3697178A/en not_active Expired - Lifetime
-
1972
- 1972-09-18 CA CA151,975A patent/CA963981A/en not_active Expired
- 1972-10-16 AU AU47788/72A patent/AU476473B2/en not_active Expired
- 1972-10-17 IT IT30572/72A patent/IT969625B/it active
- 1972-10-30 FR FR7238365A patent/FR2158339B1/fr not_active Expired
- 1972-10-30 SE SE7214006A patent/SE391988B/xx unknown
- 1972-10-31 JP JP47109368A patent/JPS5147573B2/ja not_active Expired
- 1972-10-31 DE DE2253492A patent/DE2253492A1/de active Pending
- 1972-10-31 NL NL7214721A patent/NL7214721A/xx not_active Application Discontinuation
- 1972-11-01 GB GB5038872A patent/GB1388167A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5147573B2 (https=) | 1976-12-15 |
| DE2253492A1 (de) | 1973-05-03 |
| FR2158339B1 (https=) | 1977-12-23 |
| AU4778872A (en) | 1974-04-26 |
| IT969625B (it) | 1974-04-10 |
| JPS4853255A (https=) | 1973-07-26 |
| AU476473B2 (en) | 1976-09-23 |
| FR2158339A1 (https=) | 1973-06-15 |
| GB1388167A (en) | 1975-03-26 |
| SE391988B (sv) | 1977-03-07 |
| CA963981A (en) | 1975-03-04 |
| US3697178A (en) | 1972-10-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BV | The patent application has lapsed |