NL7202729A - - Google Patents

Info

Publication number
NL7202729A
NL7202729A NL7202729A NL7202729A NL7202729A NL 7202729 A NL7202729 A NL 7202729A NL 7202729 A NL7202729 A NL 7202729A NL 7202729 A NL7202729 A NL 7202729A NL 7202729 A NL7202729 A NL 7202729A
Authority
NL
Netherlands
Application number
NL7202729A
Inventor
C Dobson
K Willmott
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB574571A external-priority patent/GB1391063A/en
Priority claimed from GB2778871A external-priority patent/GB1392292A/en
Application filed filed Critical
Publication of NL7202729A publication Critical patent/NL7202729A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7202729A 1971-03-02 1972-03-01 NL7202729A (en:Method)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB574571A GB1391063A (en) 1971-03-02 1971-03-02 Apparatus for vacuum deposition
GB2778871A GB1392292A (en) 1971-06-14 1971-06-14 Apparatus for vacuum deposition
GB2835771 1971-06-17

Publications (1)

Publication Number Publication Date
NL7202729A true NL7202729A (en:Method) 1972-09-05

Family

ID=27254698

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7202729A NL7202729A (en:Method) 1971-03-02 1972-03-01

Country Status (4)

Country Link
DE (1) DE2209857A1 (en:Method)
FR (1) FR2128477A1 (en:Method)
IT (1) IT952883B (en:Method)
NL (1) NL7202729A (en:Method)

Also Published As

Publication number Publication date
DE2209857A1 (de) 1972-09-14
FR2128477A1 (en:Method) 1972-10-20
IT952883B (it) 1973-07-30

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