FR2128477A1 - - Google Patents

Info

Publication number
FR2128477A1
FR2128477A1 FR7207072A FR7207072A FR2128477A1 FR 2128477 A1 FR2128477 A1 FR 2128477A1 FR 7207072 A FR7207072 A FR 7207072A FR 7207072 A FR7207072 A FR 7207072A FR 2128477 A1 FR2128477 A1 FR 2128477A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7207072A
Other languages
French (fr)
Inventor
C Dobson
K Willmott
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB574571A external-priority patent/GB1391063A/en
Priority claimed from GB2778871A external-priority patent/GB1392292A/en
Application filed by Individual filed Critical Individual
Publication of FR2128477A1 publication Critical patent/FR2128477A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7207072A 1971-03-02 1972-03-01 Withdrawn FR2128477A1 (en:Method)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB574571A GB1391063A (en) 1971-03-02 1971-03-02 Apparatus for vacuum deposition
GB2778871A GB1392292A (en) 1971-06-14 1971-06-14 Apparatus for vacuum deposition
GB2835771 1971-06-17

Publications (1)

Publication Number Publication Date
FR2128477A1 true FR2128477A1 (en:Method) 1972-10-20

Family

ID=27254698

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7207072A Withdrawn FR2128477A1 (en:Method) 1971-03-02 1972-03-01

Country Status (4)

Country Link
DE (1) DE2209857A1 (en:Method)
FR (1) FR2128477A1 (en:Method)
IT (1) IT952883B (en:Method)
NL (1) NL7202729A (en:Method)

Also Published As

Publication number Publication date
DE2209857A1 (de) 1972-09-14
NL7202729A (en:Method) 1972-09-05
IT952883B (it) 1973-07-30

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Legal Events

Date Code Title Description
ST Notification of lapse