IT952883B - Dispositivo per il supporto e lo spostamento di pezzi all interno di un apparecchio di deposizione sotto vuoto - Google Patents

Dispositivo per il supporto e lo spostamento di pezzi all interno di un apparecchio di deposizione sotto vuoto

Info

Publication number
IT952883B
IT952883B IT6765272A IT6765272A IT952883B IT 952883 B IT952883 B IT 952883B IT 6765272 A IT6765272 A IT 6765272A IT 6765272 A IT6765272 A IT 6765272A IT 952883 B IT952883 B IT 952883B
Authority
IT
Italy
Prior art keywords
supporting
storage appliance
vacuum storage
moving pieces
pieces inside
Prior art date
Application number
IT6765272A
Other languages
English (en)
Italian (it)
Original Assignee
Dobson C
Willmott K
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB574571A external-priority patent/GB1391063A/en
Priority claimed from GB2778871A external-priority patent/GB1392292A/en
Application filed by Dobson C, Willmott K filed Critical Dobson C
Application granted granted Critical
Publication of IT952883B publication Critical patent/IT952883B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT6765272A 1971-03-02 1972-03-01 Dispositivo per il supporto e lo spostamento di pezzi all interno di un apparecchio di deposizione sotto vuoto IT952883B (it)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB574571A GB1391063A (en) 1971-03-02 1971-03-02 Apparatus for vacuum deposition
GB2778871A GB1392292A (en) 1971-06-14 1971-06-14 Apparatus for vacuum deposition
GB2835771 1971-06-17

Publications (1)

Publication Number Publication Date
IT952883B true IT952883B (it) 1973-07-30

Family

ID=27254698

Family Applications (1)

Application Number Title Priority Date Filing Date
IT6765272A IT952883B (it) 1971-03-02 1972-03-01 Dispositivo per il supporto e lo spostamento di pezzi all interno di un apparecchio di deposizione sotto vuoto

Country Status (4)

Country Link
DE (1) DE2209857A1 (en:Method)
FR (1) FR2128477A1 (en:Method)
IT (1) IT952883B (en:Method)
NL (1) NL7202729A (en:Method)

Also Published As

Publication number Publication date
DE2209857A1 (de) 1972-09-14
FR2128477A1 (en:Method) 1972-10-20
NL7202729A (en:Method) 1972-09-05

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