NL7113366A - - Google Patents

Info

Publication number
NL7113366A
NL7113366A NL7113366A NL7113366A NL7113366A NL 7113366 A NL7113366 A NL 7113366A NL 7113366 A NL7113366 A NL 7113366A NL 7113366 A NL7113366 A NL 7113366A NL 7113366 A NL7113366 A NL 7113366A
Authority
NL
Netherlands
Application number
NL7113366A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7113366A publication Critical patent/NL7113366A/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00Grinding, lapping or polishing of wafers, substrates or parts of devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/60Wet etching
    • H10P50/64Wet etching of semiconductor materials
    • H10P50/642Chemical etching
    • H10P50/644Anisotropic liquid etching
NL7113366A 1970-09-30 1971-09-29 NL7113366A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7677770A 1970-09-30 1970-09-30

Publications (1)

Publication Number Publication Date
NL7113366A true NL7113366A (https=) 1972-04-05

Family

ID=22134121

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7113366A NL7113366A (https=) 1970-09-30 1971-09-29

Country Status (9)

Country Link
JP (1) JPS5010095B1 (https=)
BE (1) BE773286A (https=)
CA (1) CA926035A (https=)
DE (1) DE2147703A1 (https=)
ES (2) ES395341A1 (https=)
FR (1) FR2108602A5 (https=)
GB (1) GB1297235A (https=)
NL (1) NL7113366A (https=)
SE (1) SE382772B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5284894A (en) * 1975-12-30 1977-07-14 Matsushita Electric Works Ltd Shoulder patting device circuit configuration
JPS5284893A (en) * 1975-12-30 1977-07-14 Matsushita Electric Works Ltd Shoulder patting device circuit configuration
JP4515790B2 (ja) * 2004-03-08 2010-08-04 株式会社東芝 半導体装置の製造方法及びその製造装置

Also Published As

Publication number Publication date
ES395341A1 (es) 1974-12-16
GB1297235A (https=) 1972-11-22
FR2108602A5 (https=) 1972-05-19
JPS5010095B1 (https=) 1975-04-18
BE773286A (fr) 1972-01-17
DE2147703A1 (de) 1972-04-06
ES419651A1 (es) 1976-05-16
AU3334071A (en) 1973-03-15
CA926035A (en) 1973-05-08
SE382772B (sv) 1976-02-16

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