NL7105374A - - Google Patents
Info
- Publication number
- NL7105374A NL7105374A NL7105374A NL7105374A NL7105374A NL 7105374 A NL7105374 A NL 7105374A NL 7105374 A NL7105374 A NL 7105374A NL 7105374 A NL7105374 A NL 7105374A NL 7105374 A NL7105374 A NL 7105374A
- Authority
- NL
- Netherlands
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7014414A FR2088675A5 (hu) | 1970-04-21 | 1970-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7105374A true NL7105374A (hu) | 1971-10-25 |
Family
ID=9054322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7105374A NL7105374A (hu) | 1970-04-21 | 1971-04-21 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3715599A (hu) |
| JP (1) | JPS5228008B1 (hu) |
| DE (1) | DE2119486C3 (hu) |
| FR (1) | FR2088675A5 (hu) |
| GB (1) | GB1345381A (hu) |
| NL (1) | NL7105374A (hu) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE354115B (hu) * | 1971-10-13 | 1973-02-26 | Lasergruppen Konsuit Ab | |
| FR2216556B2 (hu) * | 1973-02-02 | 1977-08-26 | Cem Comp Electro Mec | |
| US3919545A (en) * | 1974-05-06 | 1975-11-11 | Minnesota Mining & Mfg | Object positioning apparatus |
| US4025786A (en) * | 1975-01-02 | 1977-05-24 | George Henry Hamilton | Solar energy power generating array |
| CH609149A5 (hu) * | 1975-10-23 | 1979-02-15 | Heidenhain Gmbh Dr Johannes | |
| US4117341A (en) * | 1976-08-02 | 1978-09-26 | American Optical Corporation | Control means |
| US4203672A (en) * | 1976-11-18 | 1980-05-20 | E. I. Du Pont De Nemours And Company | Scanning beam displacement compensation control system |
| FR2396954A1 (fr) * | 1977-07-08 | 1979-02-02 | Sopelem | Dispositif de mesure et de controle de rectitude |
| US4261107A (en) * | 1980-03-06 | 1981-04-14 | Caterpillar Tractor Co. | Coordinate locating device |
| US4349274A (en) * | 1980-07-23 | 1982-09-14 | General Electric Company | Optical triangulation apparatus and method |
| US4371946A (en) * | 1980-10-09 | 1983-02-01 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Servomechanism for doppler shift compensation in optical correlator for synthetic aperture radar |
| JPS58127868U (ja) * | 1982-02-19 | 1983-08-30 | カルソニックカンセイ株式会社 | フラツトモ−タ |
| US4570065A (en) * | 1983-01-28 | 1986-02-11 | Pryor Timothy R | Robotic compensation systems |
| DE3306840A1 (de) * | 1983-02-26 | 1984-09-06 | GdA Gesellschaft für digitale Automation mbH, 8000 München | Messanordnung zum justieren des werkzeugflansches eines industrieroboters |
| DD220698A1 (de) * | 1983-08-03 | 1985-04-03 | Ilmenau Tech Hochschule | Vorrichtung insbesondere zur wegmessung |
| JPS60237307A (ja) * | 1984-05-11 | 1985-11-26 | Yokogawa Hewlett Packard Ltd | レ−ザ測長器 |
| GB8616431D0 (en) * | 1986-07-05 | 1986-08-13 | Renishaw Plc | Locating co-ordinates of object |
| US4884889A (en) * | 1987-11-19 | 1989-12-05 | Brown & Sharpe Manufacturing Company | Calibration system for coordinate measuring machine |
| US4939678A (en) * | 1987-11-19 | 1990-07-03 | Brown & Sharpe Manufacturing Company | Method for calibration of coordinate measuring machine |
| GB8730169D0 (en) * | 1987-12-24 | 1988-02-03 | Renishaw Plc | Optical apparatus for use with interferometric measuring devices |
| DE3937020A1 (de) * | 1989-11-07 | 1991-05-08 | Du Pont Deutschland | Verfahren und vorrichtung fuer den linearen transport bahn- und blattfoermiger materialien |
| JP3217522B2 (ja) * | 1992-03-02 | 2001-10-09 | キヤノン株式会社 | 精密位置決め装置 |
| EP1200853B1 (de) * | 1999-07-28 | 2003-03-12 | Leica Geosystems AG | Verfahren und anordnung zur bestimmung von räumlichen positionen und orientierungen |
| US6603562B1 (en) * | 1999-10-29 | 2003-08-05 | Yokogawa Electric Corporation | Two-dimensional positioning apparatus and method for measuring laser light from the apparatus |
| DE102012012197B4 (de) * | 2012-05-02 | 2016-10-13 | Wenzel Präzision GmbH | Koordinatenmessgerät sowie Verfahren zum Betreiben eines Koordinatenmessgeräts |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2853917A (en) * | 1954-03-30 | 1958-09-30 | Genevoise Instr Physique | Apparatus for precisely measuring lengths |
| US3213282A (en) * | 1960-10-10 | 1965-10-19 | Stewart Warner Corp | Photosensitive line tracing apparatus |
| US3114842A (en) * | 1961-11-15 | 1963-12-17 | Davidson Optronics Inc | Optical instrument for determining rotation of a remote object |
| US3434787A (en) * | 1965-11-15 | 1969-03-25 | Optomechanisms Inc | Double axes interferometer |
| US3588254A (en) * | 1968-09-13 | 1971-06-28 | Gen Electric | Frequency control for tunable laser utilized in a position control system |
| US3573849A (en) * | 1969-02-04 | 1971-04-06 | Bell Telephone Labor Inc | Pattern generating apparatus |
| BE755054A (fr) * | 1969-08-21 | 1971-02-01 | Doall Co | Procede et dispositif pour la commande du mouvement et de la mise en position des parties mobiles, notamment d'une machine-outil, au moyen de donnees numeriques |
| US3622244A (en) * | 1970-01-29 | 1971-11-23 | Optomechanisms Inc | Dual axes interferometer |
-
1970
- 1970-04-21 FR FR7014414A patent/FR2088675A5/fr not_active Expired
-
1971
- 1971-04-20 GB GB1025771*[A patent/GB1345381A/en not_active Expired
- 1971-04-20 US US00135659A patent/US3715599A/en not_active Expired - Lifetime
- 1971-04-21 NL NL7105374A patent/NL7105374A/xx unknown
- 1971-04-21 JP JP46025358A patent/JPS5228008B1/ja active Pending
- 1971-04-21 DE DE2119486A patent/DE2119486C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5228008B1 (hu) | 1977-07-23 |
| US3715599A (en) | 1973-02-06 |
| DE2119486A1 (de) | 1971-11-04 |
| DE2119486C3 (de) | 1978-08-10 |
| FR2088675A5 (hu) | 1972-01-07 |
| GB1345381A (en) | 1974-01-30 |
| DE2119486B2 (de) | 1977-12-08 |