NL7012346A - - Google Patents
Info
- Publication number
- NL7012346A NL7012346A NL7012346A NL7012346A NL7012346A NL 7012346 A NL7012346 A NL 7012346A NL 7012346 A NL7012346 A NL 7012346A NL 7012346 A NL7012346 A NL 7012346A NL 7012346 A NL7012346 A NL 7012346A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691950327 DE1950327B2 (de) | 1969-09-30 | 1969-09-30 | Korpuskularstrahlgeraet mit magnetischen mitteln zur querverstellung von teilen |
| DE19691950320 DE1950320A1 (de) | 1969-09-30 | 1969-09-30 | Verfahren zum Kennzeichnen von Stellungen eines in Vakuumraum eines Korpuskularstrahlgeraetes verstellbar angeordneten Teiles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7012346A true NL7012346A (xx) | 1971-04-01 |
Family
ID=25757975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7012346A NL7012346A (xx) | 1969-09-30 | 1970-08-20 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3678270A (xx) |
| DE (2) | DE1950320A1 (xx) |
| GB (1) | GB1281132A (xx) |
| NL (1) | NL7012346A (xx) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2542360C2 (de) * | 1975-09-19 | 1977-11-17 | Siemens AG, 1000 Berlin und 8000 München | Korpuskularstrahlgerät mit einem Goniometer |
| US4374327A (en) * | 1981-01-27 | 1983-02-15 | George Christov | Device for indicating specimen stage positions in an electron microscope |
| US4506154A (en) * | 1982-10-22 | 1985-03-19 | Scire Fredric E | Planar biaxial micropositioning stage |
| US4532426A (en) * | 1983-06-17 | 1985-07-30 | Hughes Aircraft Company | Wafer height correction system for focused beam system |
| DE3628170A1 (de) * | 1986-08-20 | 1988-02-25 | Max Planck Gesellschaft | Verstellbare praeparathalterung fuer ein korpuskularstrahlenmikroskop |
| US4782236A (en) * | 1987-02-17 | 1988-11-01 | Anwar Chitayat | Means for locking a workpiece to a beam-generating apparatus |
| NL8803101A (nl) * | 1988-12-19 | 1990-07-16 | Philips Nv | Objecthouder voor positionering van een object in een stralenbundel. |
| US5323012A (en) * | 1991-08-16 | 1994-06-21 | The Regents Of The University Of California | Apparatus for positioning a stage |
| JP3390318B2 (ja) * | 1996-02-13 | 2003-03-24 | セイコーインスツルメンツ株式会社 | 微小位置決め機構及びそれを用いた走査型プローブ顕微鏡及び微小領域加工機 |
| DE19722272A1 (de) | 1997-05-28 | 1998-12-03 | Leybold Systems Gmbh | Vorrichtung zur Erzeugung von Plasma |
| US9435642B2 (en) * | 2012-04-20 | 2016-09-06 | Canon Kabushiki Kaisha | Position measuring apparatus, pattern transfer apparatus, and method for manufacturing a device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2496051A (en) * | 1948-04-28 | 1950-01-31 | Rca Corp | Positioning the specimen stage of optical apparatus |
-
1969
- 1969-09-30 DE DE19691950320 patent/DE1950320A1/de active Pending
- 1969-09-30 DE DE19691950327 patent/DE1950327B2/de active Granted
-
1970
- 1970-08-20 NL NL7012346A patent/NL7012346A/xx unknown
- 1970-09-08 US US70014A patent/US3678270A/en not_active Expired - Lifetime
- 1970-09-25 GB GB45756/70A patent/GB1281132A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1950327B2 (de) | 1972-07-06 |
| DE1950320A1 (de) | 1971-04-01 |
| GB1281132A (en) | 1972-07-12 |
| DE1950327A1 (de) | 1971-04-08 |
| US3678270A (en) | 1972-07-18 |