NL7002789A - - Google Patents
Info
- Publication number
- NL7002789A NL7002789A NL7002789A NL7002789A NL7002789A NL 7002789 A NL7002789 A NL 7002789A NL 7002789 A NL7002789 A NL 7002789A NL 7002789 A NL7002789 A NL 7002789A NL 7002789 A NL7002789 A NL 7002789A
- Authority
- NL
- Netherlands
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multi-focusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
- H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
- H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
- H10P76/2041—Photolithographic processes
- H10P76/2042—Photolithographic processes using lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Polarising Elements (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691910546 DE1910546C (de) | 1969-03-01 | Elektro oder magneto optische Anord nung zur Herstellung und Bearbeitung von integrierten Schaltungen und ahnlichen Ob jekten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7002789A true NL7002789A (https=) | 1970-09-03 |
Family
ID=5726854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7002789A NL7002789A (https=) | 1969-03-01 | 1970-02-26 |
Country Status (7)
| Country | Link |
|---|---|
| BE (1) | BE746704A (https=) |
| BR (1) | BR7017138D0 (https=) |
| CH (1) | CH504784A (https=) |
| ES (1) | ES376993A1 (https=) |
| FR (1) | FR2041059B1 (https=) |
| GB (1) | GB1305605A (https=) |
| NL (1) | NL7002789A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2441472A1 (de) * | 1974-08-29 | 1976-03-11 | Siemens Ag | Anordnung zum lichtoptischen rechnergesteuerten zeichnen von masken fuer halbleiter-bauelemente |
| JPS57198631A (en) * | 1981-05-29 | 1982-12-06 | Ibm | Exposing method and device |
| FR2615635B1 (fr) * | 1987-05-19 | 1991-10-11 | Thomson Csf | Dispositif de controle d'un faisceau lumineux dans un grand champ angulaire et application a un dispositif de detection |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1565007A1 (de) * | 1965-05-25 | 1970-05-21 | Philips Patentverwaltung | Verfahren und Geraet zur thermischen Materialbearbeitung mittels Laserstrahlen |
-
1970
- 1970-02-26 GB GB937870A patent/GB1305605A/en not_active Expired
- 1970-02-26 NL NL7002789A patent/NL7002789A/xx unknown
- 1970-02-26 CH CH284270A patent/CH504784A/de not_active IP Right Cessation
- 1970-02-27 ES ES376993A patent/ES376993A1/es not_active Expired
- 1970-02-27 BE BE746704D patent/BE746704A/nl unknown
- 1970-02-27 FR FR7007171A patent/FR2041059B1/fr not_active Expired
- 1970-03-02 BR BR217138/70A patent/BR7017138D0/pt unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2041059B1 (https=) | 1974-05-24 |
| BR7017138D0 (pt) | 1973-01-16 |
| GB1305605A (https=) | 1973-02-07 |
| CH504784A (de) | 1971-03-15 |
| BE746704A (nl) | 1970-08-27 |
| FR2041059A1 (https=) | 1971-01-29 |
| DE1910546A1 (de) | 1970-09-17 |
| DE1910546B2 (de) | 1972-04-06 |
| ES376993A1 (es) | 1972-05-16 |