FR2041059A1 - - Google Patents

Info

Publication number
FR2041059A1
FR2041059A1 FR7007171A FR7007171A FR2041059A1 FR 2041059 A1 FR2041059 A1 FR 2041059A1 FR 7007171 A FR7007171 A FR 7007171A FR 7007171 A FR7007171 A FR 7007171A FR 2041059 A1 FR2041059 A1 FR 2041059A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7007171A
Other languages
French (fr)
Other versions
FR2041059B1 (https=
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691910546 external-priority patent/DE1910546C/de
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2041059A1 publication Critical patent/FR2041059A1/fr
Application granted granted Critical
Publication of FR2041059B1 publication Critical patent/FR2041059B1/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multi-focusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H10P76/2042—Photolithographic processes using lasers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Polarising Elements (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
FR7007171A 1969-03-01 1970-02-27 Expired FR2041059B1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691910546 DE1910546C (de) 1969-03-01 Elektro oder magneto optische Anord nung zur Herstellung und Bearbeitung von integrierten Schaltungen und ahnlichen Ob jekten

Publications (2)

Publication Number Publication Date
FR2041059A1 true FR2041059A1 (https=) 1971-01-29
FR2041059B1 FR2041059B1 (https=) 1974-05-24

Family

ID=5726854

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7007171A Expired FR2041059B1 (https=) 1969-03-01 1970-02-27

Country Status (7)

Country Link
BE (1) BE746704A (https=)
BR (1) BR7017138D0 (https=)
CH (1) CH504784A (https=)
ES (1) ES376993A1 (https=)
FR (1) FR2041059B1 (https=)
GB (1) GB1305605A (https=)
NL (1) NL7002789A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2283466A1 (fr) * 1974-08-29 1976-03-26 Siemens Ag Dispositif pour dessiner optiquement des masques pour des composants a semi-conducteurs sous la commande d'un calculateur
EP0292353A1 (fr) * 1987-05-19 1988-11-23 Thomson-Csf Dispositif de contrôle d'un faisceau lumineux dans un grand champ angulaire, et application à un dispositif de détection

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198631A (en) * 1981-05-29 1982-12-06 Ibm Exposing method and device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1480898A (fr) * 1965-05-25 1967-05-12 Philips Nv Procédé et dispositif pour le traitement thermique de matériaux au moyen de faisceaux laser

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1480898A (fr) * 1965-05-25 1967-05-12 Philips Nv Procédé et dispositif pour le traitement thermique de matériaux au moyen de faisceaux laser

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
REVUE AMERICAINE "IBM TECHNICAL DISCLOSURE BULLETIN" VOLUME 11 NO.9, FEVRIER 1969, PAGES 1168-1169 ARTICLE DE D.J.O'HARA ET AL. "HOLOGRAPHIC SELECTIVE HEATING SYSTEM". *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2283466A1 (fr) * 1974-08-29 1976-03-26 Siemens Ag Dispositif pour dessiner optiquement des masques pour des composants a semi-conducteurs sous la commande d'un calculateur
EP0292353A1 (fr) * 1987-05-19 1988-11-23 Thomson-Csf Dispositif de contrôle d'un faisceau lumineux dans un grand champ angulaire, et application à un dispositif de détection
FR2615635A1 (fr) * 1987-05-19 1988-11-25 Thomson Csf Dispositif de controle d'un faisceau lumineux dans un grand champ angulaire et application a un dispositif de detection
US4836629A (en) * 1987-05-19 1989-06-06 Thomson-Csf Device to control a light beam in a wide angle field and application to a sensing device

Also Published As

Publication number Publication date
FR2041059B1 (https=) 1974-05-24
BR7017138D0 (pt) 1973-01-16
GB1305605A (https=) 1973-02-07
CH504784A (de) 1971-03-15
BE746704A (nl) 1970-08-27
DE1910546A1 (de) 1970-09-17
DE1910546B2 (de) 1972-04-06
ES376993A1 (es) 1972-05-16
NL7002789A (https=) 1970-09-03

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Legal Events

Date Code Title Description
ST Notification of lapse