NL6910695A - - Google Patents

Info

Publication number
NL6910695A
NL6910695A NL6910695A NL6910695A NL6910695A NL 6910695 A NL6910695 A NL 6910695A NL 6910695 A NL6910695 A NL 6910695A NL 6910695 A NL6910695 A NL 6910695A NL 6910695 A NL6910695 A NL 6910695A
Authority
NL
Netherlands
Application number
NL6910695A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6910695A publication Critical patent/NL6910695A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • C01B33/181Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
    • C01B33/183Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G1/00Methods of preparing compounds of metals not covered by subclasses C01B, C01C, C01D, or C01F, in general
    • C01G1/06Halides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415Reactant delivery systems
    • C03B19/1423Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1484Means for supporting, rotating or translating the article being formed
    • C03B19/1492Deposition substrates, e.g. targets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/06Concentric circular ports
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/12Nozzle or orifice plates
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/20Specific substances in specified ports, e.g. all gas flows specified
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/42Assembly details; Material or dimensions of burner; Manifolds or supports

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Silicon Compounds (AREA)
NL6910695A 1968-07-12 1969-07-11 NL6910695A (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74456868A 1968-07-12 1968-07-12

Publications (1)

Publication Number Publication Date
NL6910695A true NL6910695A (enExample) 1970-01-14

Family

ID=24993182

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6910695A NL6910695A (enExample) 1968-07-12 1969-07-11

Country Status (5)

Country Link
US (1) US3609829A (enExample)
DE (1) DE1934932A1 (enExample)
FR (1) FR2022101A1 (enExample)
GB (1) GB1278802A (enExample)
NL (1) NL6910695A (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6915771A (enExample) * 1968-10-30 1970-05-04
DE2009459A1 (de) * 1970-02-28 1971-09-09 Consortium Elektrochem Ind Verfahren zur Herstellung von Sihciumformkorpern
GB1384319A (en) * 1971-04-19 1975-02-19 Sherwood Refractories Vitreous silica and process and apparatus for making same
US3961003A (en) * 1972-05-17 1976-06-01 Dow Corning Corporation Method and apparatus for making elongated Si and SiC structures
US4058579A (en) * 1975-02-27 1977-11-15 Union Carbide Corporation Process for producing an improved boron nitride crucible
US3971336A (en) * 1975-06-27 1976-07-27 Owens-Corning Fiberglas Corporation Control system for controlling translation speed of carriage with respect to rotational speed of mandrel
US4204850A (en) * 1977-08-26 1980-05-27 Corning Glass Works Carbon coating for a starting member used in producing optical waveguide
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
DE3001371C2 (de) * 1980-01-16 1983-10-27 Langlet, Weber KG Oberflächenveredlung Nachf., 5270 Gummersbach Verfahren zur Herstellung eines keramischen, bindemittelfreien Hohlkörpers
US4935046A (en) * 1987-12-03 1990-06-19 Shin-Etsu Handotai Company, Limited Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
US5609922A (en) * 1994-12-05 1997-03-11 Mcdonald; Robert R. Method of manufacturing molds, dies or forming tools having a cavity formed by thermal spraying
DE102004017572B3 (de) * 2004-04-07 2005-11-24 Heraeus Tenevo Ag Verfahren zur Herstellung eines Hohlzylinders aus synthetischem Quarzglas unter Einsatz einer Haltevorrichtung
CN105210173A (zh) * 2013-05-23 2015-12-30 应用材料公司 用于半导体处理腔室的经涂布的衬里组件

Also Published As

Publication number Publication date
DE1934932A1 (de) 1970-01-15
FR2022101A1 (enExample) 1970-07-31
US3609829A (en) 1971-10-05
GB1278802A (en) 1972-06-21

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