NL6908364A - - Google Patents

Info

Publication number
NL6908364A
NL6908364A NL6908364A NL6908364A NL6908364A NL 6908364 A NL6908364 A NL 6908364A NL 6908364 A NL6908364 A NL 6908364A NL 6908364 A NL6908364 A NL 6908364A NL 6908364 A NL6908364 A NL 6908364A
Authority
NL
Netherlands
Application number
NL6908364A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6908364A publication Critical patent/NL6908364A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
NL6908364A 1968-06-05 1969-06-02 NL6908364A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US73475968A 1968-06-05 1968-06-05

Publications (1)

Publication Number Publication Date
NL6908364A true NL6908364A (fr) 1969-12-09

Family

ID=24952973

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6908364A NL6908364A (fr) 1968-06-05 1969-06-02

Country Status (5)

Country Link
US (1) US3635683A (fr)
DE (1) DE1927961A1 (fr)
FR (1) FR2010175A1 (fr)
GB (1) GB1270441A (fr)
NL (1) NL6908364A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3805736A (en) * 1971-12-27 1974-04-23 Ibm Apparatus for diffusion limited mass transport
US5845189A (en) * 1973-12-20 1998-12-01 Litton Systems, Inc. Process for stabilizing a microchannel plate
US4315968A (en) * 1980-02-06 1982-02-16 Avco Corporation Silicon coated silicon carbide filaments and method
US4444812A (en) * 1980-07-28 1984-04-24 Monsanto Company Combination gas curtains for continuous chemical vapor deposition production of silicon bodies
US6090202A (en) 1998-04-29 2000-07-18 Sawyer Research Products, Inc. Method and apparatus for growing crystals

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3004866A (en) * 1957-11-04 1961-10-17 Union Carbide Corp Method and apparatus for gas plating nickel films with uniformity of resistance
US2907626A (en) * 1958-01-15 1959-10-06 Bjorksten Res Lab Inc Metal coating of glass fibers at high speeds
NL256017A (fr) * 1959-09-23 1900-01-01
NL262949A (fr) * 1960-04-02 1900-01-01
US3055741A (en) * 1960-12-22 1962-09-25 Sylvania Electric Prod Method for producing silicon
DE1297086B (de) * 1965-01-29 1969-06-12 Siemens Ag Verfahren zum Herstellen einer Schicht von einkristallinem Halbleitermaterial
US3424629A (en) * 1965-12-13 1969-01-28 Ibm High capacity epitaxial apparatus and method

Also Published As

Publication number Publication date
DE1927961A1 (de) 1969-12-11
GB1270441A (en) 1972-04-12
FR2010175A1 (fr) 1970-02-13
US3635683A (en) 1972-01-18

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