NL6905171A - - Google Patents
Info
- Publication number
- NL6905171A NL6905171A NL6905171A NL6905171A NL6905171A NL 6905171 A NL6905171 A NL 6905171A NL 6905171 A NL6905171 A NL 6905171A NL 6905171 A NL6905171 A NL 6905171A NL 6905171 A NL6905171 A NL 6905171A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/29—Reflection microscopes
- H01J37/292—Reflection microscopes using scanning ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB05933/68A GB1188417A (en) | 1968-04-03 | 1968-04-03 | Electron Beam Apparatus |
| GB05936/68A GB1187901A (en) | 1968-04-03 | 1968-04-03 | Electron Beam Apparatus. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6905171A true NL6905171A (xx) | 1969-10-07 |
Family
ID=26251645
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6905171A NL6905171A (xx) | 1968-04-03 | 1969-04-02 | |
| NL6905284A NL6905284A (xx) | 1968-04-03 | 1969-04-03 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6905284A NL6905284A (xx) | 1968-04-03 | 1969-04-03 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3657593A (xx) |
| DE (2) | DE1917065B2 (xx) |
| FR (2) | FR2007376A1 (xx) |
| GB (2) | GB1187901A (xx) |
| NL (2) | NL6905171A (xx) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2207546A1 (de) * | 1972-02-18 | 1973-08-23 | Ibm Deutschland | Verfahren zum pruefen des elektrischen durchganges |
| US3801784A (en) * | 1972-04-14 | 1974-04-02 | Research Corp | Scanning electron microscope operating in area scan and angle scan modes |
| GB1443562A (en) * | 1973-08-14 | 1976-07-21 | Ontario Research Foundation | Method and apparatus for displaying images stereoscopically and for deriving signals from a scanning electron microscope for producing steroscopic images |
| US3930181A (en) * | 1973-12-28 | 1975-12-30 | Ibm | Lens and deflection unit arrangement for electron beam columns |
| DE3138992A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Abtastverfahren zur schnellen potentialbestimmung inder elektronenstrahl-messtechnik |
| GB2139411B (en) * | 1983-05-05 | 1987-01-07 | Cambridge Instr Ltd | Charged particle deflection |
| DE3477710D1 (en) * | 1984-02-18 | 1989-05-18 | Leybold Ag | Device for measuring the angular distribution of charged particles diffracted on a sample surface |
| US6452175B1 (en) * | 1999-04-15 | 2002-09-17 | Applied Materials, Inc. | Column for charged particle beam device |
| US8921782B2 (en) | 2012-11-30 | 2014-12-30 | Kla-Tencor Corporation | Tilt-imaging scanning electron microscope |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2675501A (en) * | 1950-10-31 | 1954-04-13 | Rca Corp | Electron beam focusing system |
| US2672575A (en) * | 1951-10-11 | 1954-03-16 | Rca Corp | Apparatus for reproducing images in color |
| BE522075A (xx) * | 1952-08-13 |
-
1968
- 1968-04-03 GB GB05936/68A patent/GB1187901A/en not_active Expired
- 1968-04-03 GB GB05933/68A patent/GB1188417A/en not_active Expired
-
1969
- 1969-04-02 NL NL6905171A patent/NL6905171A/xx unknown
- 1969-04-02 DE DE19691917065 patent/DE1917065B2/de not_active Withdrawn
- 1969-04-02 FR FR6909986A patent/FR2007376A1/fr not_active Withdrawn
- 1969-04-02 FR FR6909987A patent/FR2007377A1/fr not_active Withdrawn
- 1969-04-02 DE DE19691917066 patent/DE1917066A1/de active Pending
- 1969-04-03 US US813241A patent/US3657593A/en not_active Expired - Lifetime
- 1969-04-03 NL NL6905284A patent/NL6905284A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1917066A1 (de) | 1969-11-13 |
| DE1917065A1 (de) | 1969-10-23 |
| DE1917065B2 (de) | 1978-02-09 |
| US3657593A (en) | 1972-04-18 |
| FR2007377A1 (xx) | 1970-01-09 |
| GB1188417A (en) | 1970-04-15 |
| NL6905284A (xx) | 1969-10-07 |
| FR2007376A1 (xx) | 1970-01-09 |
| GB1187901A (en) | 1970-04-15 |