FR2007376A1 - - Google Patents

Info

Publication number
FR2007376A1
FR2007376A1 FR6909986A FR6909986A FR2007376A1 FR 2007376 A1 FR2007376 A1 FR 2007376A1 FR 6909986 A FR6909986 A FR 6909986A FR 6909986 A FR6909986 A FR 6909986A FR 2007376 A1 FR2007376 A1 FR 2007376A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6909986A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2007376A1 publication Critical patent/FR2007376A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes
    • H01J37/292—Reflection microscopes using scanning ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR6909986A 1968-04-03 1969-04-02 Withdrawn FR2007376A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB05933/68A GB1188417A (en) 1968-04-03 1968-04-03 Electron Beam Apparatus
GB05936/68A GB1187901A (en) 1968-04-03 1968-04-03 Electron Beam Apparatus.

Publications (1)

Publication Number Publication Date
FR2007376A1 true FR2007376A1 (fr) 1970-01-09

Family

ID=26251645

Family Applications (2)

Application Number Title Priority Date Filing Date
FR6909986A Withdrawn FR2007376A1 (fr) 1968-04-03 1969-04-02
FR6909987A Withdrawn FR2007377A1 (fr) 1968-04-03 1969-04-02

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR6909987A Withdrawn FR2007377A1 (fr) 1968-04-03 1969-04-02

Country Status (5)

Country Link
US (1) US3657593A (fr)
DE (2) DE1917065B2 (fr)
FR (2) FR2007376A1 (fr)
GB (2) GB1187901A (fr)
NL (2) NL6905171A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2207546A1 (de) * 1972-02-18 1973-08-23 Ibm Deutschland Verfahren zum pruefen des elektrischen durchganges
US3801784A (en) * 1972-04-14 1974-04-02 Research Corp Scanning electron microscope operating in area scan and angle scan modes
GB1443562A (en) * 1973-08-14 1976-07-21 Ontario Research Foundation Method and apparatus for displaying images stereoscopically and for deriving signals from a scanning electron microscope for producing steroscopic images
US3930181A (en) * 1973-12-28 1975-12-30 Ibm Lens and deflection unit arrangement for electron beam columns
DE3138992A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Abtastverfahren zur schnellen potentialbestimmung inder elektronenstrahl-messtechnik
GB2139411B (en) * 1983-05-05 1987-01-07 Cambridge Instr Ltd Charged particle deflection
DE3477710D1 (en) * 1984-02-18 1989-05-18 Leybold Ag Device for measuring the angular distribution of charged particles diffracted on a sample surface
US6452175B1 (en) * 1999-04-15 2002-09-17 Applied Materials, Inc. Column for charged particle beam device
US8921782B2 (en) 2012-11-30 2014-12-30 Kla-Tencor Corporation Tilt-imaging scanning electron microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2675501A (en) * 1950-10-31 1954-04-13 Rca Corp Electron beam focusing system
US2672575A (en) * 1951-10-11 1954-03-16 Rca Corp Apparatus for reproducing images in color
BE522075A (fr) * 1952-08-13

Also Published As

Publication number Publication date
DE1917066A1 (de) 1969-11-13
DE1917065A1 (de) 1969-10-23
DE1917065B2 (de) 1978-02-09
US3657593A (en) 1972-04-18
NL6905171A (fr) 1969-10-07
FR2007377A1 (fr) 1970-01-09
GB1188417A (en) 1970-04-15
NL6905284A (fr) 1969-10-07
GB1187901A (en) 1970-04-15

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Legal Events

Date Code Title Description
ST Notification of lapse