Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
  • H01J9/02—Manufacture of electrodes or electrode systems
  • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/26—Bombardment with radiation
  • H01L21/263—Bombardment with radiation with high-energy radiation
  • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
  • H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• High Energy & Nuclear Physics (AREA)
• Computer Hardware Design (AREA)
• Toxicology (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Health & Medical Sciences (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
• Electron Sources, Ion Sources (AREA)
• Physical Or Chemical Processes And Apparatus (AREA)
• Vessels And Coating Films For Discharge Lamps (AREA)
• Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=5683999

Family Applications (1)

Country Status (7)

Families Citing this family (7)

Family Cites Families (7)

• 1969
  • 1969-03-08 NL NL6903628A patent/NL6903628A/xx unknown
  • 1969-03-11 US US806192A patent/US3630587A/en not_active Expired - Lifetime
  • 1969-03-12 CH CH374769A patent/CH489114A/de not_active IP Right Cessation
  • 1969-03-13 ES ES364745A patent/ES364745A1/es not_active Expired
  • 1969-03-13 BE BE729828D patent/BE729828A/xx unknown
  • 1969-03-17 FR FR6907598A patent/FR2004044A1/fr not_active Withdrawn
  • 1969-03-17 GB GB03772/69A patent/GB1207091A/en not_active Expired

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