NL6811733A - - Google Patents

Info

Publication number
NL6811733A
NL6811733A NL6811733A NL6811733A NL6811733A NL 6811733 A NL6811733 A NL 6811733A NL 6811733 A NL6811733 A NL 6811733A NL 6811733 A NL6811733 A NL 6811733A NL 6811733 A NL6811733 A NL 6811733A
Authority
NL
Netherlands
Application number
NL6811733A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6811733A publication Critical patent/NL6811733A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL6811733A 1967-08-18 1968-08-16 NL6811733A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3825067 1967-08-18

Publications (1)

Publication Number Publication Date
NL6811733A true NL6811733A (enrdf_load_stackoverflow) 1969-02-20

Family

ID=10402251

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6811733A NL6811733A (enrdf_load_stackoverflow) 1967-08-18 1968-08-16

Country Status (5)

Country Link
US (1) US3707628A (enrdf_load_stackoverflow)
DE (1) DE1764835A1 (enrdf_load_stackoverflow)
FR (1) FR1594573A (enrdf_load_stackoverflow)
GB (1) GB1234183A (enrdf_load_stackoverflow)
NL (1) NL6811733A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1594465A (en) * 1977-03-23 1981-07-30 Nat Res Dev Electron beam apparatus
FR2477827A1 (fr) * 1980-03-04 1981-09-11 Cgr Mev Dispositif accelerateur de particules chargees fonctionnant en ondes metriques
US4541890A (en) * 1982-06-01 1985-09-17 International Business Machines Corporation Hall ion generator for working surfaces with a low energy high intensity ion beam
JPS6091544A (ja) * 1983-10-24 1985-05-22 Anelva Corp オ−ジエ分析装置
JP2772821B2 (ja) * 1989-05-30 1998-07-09 セイコーインスツルメンツ株式会社 電子線装置
US5079428A (en) * 1989-08-31 1992-01-07 Bell Communications Research, Inc. Electron microscope with an asymmetrical immersion lens
JP2744823B2 (ja) * 1989-11-16 1998-04-28 日本電子株式会社 電子レンズ
US5311028A (en) * 1990-08-29 1994-05-10 Nissin Electric Co., Ltd. System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
JP2809917B2 (ja) * 1992-01-13 1998-10-15 富士通株式会社 荷電粒子ビーム露光方法および装置
JP2816458B2 (ja) * 1992-02-24 1998-10-27 株式会社村田製作所 鞍型偏向コイル
US7345287B2 (en) * 2005-09-30 2008-03-18 Applied Materials, Inc. Cooling module for charged particle beam column elements
US10486232B2 (en) * 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL145716B (nl) * 1964-06-06 1975-04-15 Philips Nv Elektronenstraalapparaat.
US3346736A (en) * 1964-09-22 1967-10-10 Applied Res Lab Inc Electron probe apparatus having an objective lens with an aperture for restricting fluid flow
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope

Also Published As

Publication number Publication date
FR1594573A (enrdf_load_stackoverflow) 1970-06-08
US3707628A (en) 1972-12-26
DE1764835A1 (de) 1971-11-04
GB1234183A (enrdf_load_stackoverflow) 1971-06-03

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