GB1234183A - - Google Patents
Info
- Publication number
- GB1234183A GB1234183A GB3825067A GB1234183DA GB1234183A GB 1234183 A GB1234183 A GB 1234183A GB 3825067 A GB3825067 A GB 3825067A GB 1234183D A GB1234183D A GB 1234183DA GB 1234183 A GB1234183 A GB 1234183A
- Authority
- GB
- United Kingdom
- Prior art keywords
- coil
- aug
- cone
- degrees
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 238000004453 electron probe microanalysis Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000035699 permeability Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
1,234,183. Electron beam focusing apparatus. MINISTER OF TECHNOLOGY 13 Aug., 1968 [18 Aug., 1967], No. 38250/67. Heading HiD. A focusing lens for an electron probe microanalysis apparatus or the like comprises a coil 20 of frusto-conical shape, thereby increasing the angle # 2 within which may be placed a detector D for measuring X-rays emitted by the specimen 19. The coil may comprise a plurality (e.g. six) of separate concurrently laid lengths of conducting wire extending between conductive segments provided at each end of the cone (Fig. 1, not shown). A cooling block may be arranged within the coil (Fig. 4, not shown), and the coil may be surrounded by a sheath of material of high magnetic permeability (Fig. 5, not shown). The distance between points on the axis where the field of the coil is half the maximum field should be not less than twice the distance d, and the slant height of the coil should be at least five times its radial depth. The half-angle of the cone is preferably 45 degrees and should be between 20 and 85 degrees.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3825067 | 1967-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1234183A true GB1234183A (en) | 1971-06-03 |
Family
ID=10402251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3825067A Expired GB1234183A (en) | 1967-08-18 | 1967-08-18 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3707628A (en) |
| DE (1) | DE1764835A1 (en) |
| FR (1) | FR1594573A (en) |
| GB (1) | GB1234183A (en) |
| NL (1) | NL6811733A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2238426A (en) * | 1989-11-16 | 1991-05-29 | Jeol Ltd | Electromagnetic lens. |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1594465A (en) * | 1977-03-23 | 1981-07-30 | Nat Res Dev | Electron beam apparatus |
| FR2477827A1 (en) * | 1980-03-04 | 1981-09-11 | Cgr Mev | ACCELERATOR DEVICE OF CHARGED PARTICLES OPERATING IN METRIC WAVES |
| US4541890A (en) * | 1982-06-01 | 1985-09-17 | International Business Machines Corporation | Hall ion generator for working surfaces with a low energy high intensity ion beam |
| JPS6091544A (en) * | 1983-10-24 | 1985-05-22 | Anelva Corp | Auger mass spectrometer device |
| JP2772821B2 (en) * | 1989-05-30 | 1998-07-09 | セイコーインスツルメンツ株式会社 | Electron beam equipment |
| US5079428A (en) * | 1989-08-31 | 1992-01-07 | Bell Communications Research, Inc. | Electron microscope with an asymmetrical immersion lens |
| US5311028A (en) * | 1990-08-29 | 1994-05-10 | Nissin Electric Co., Ltd. | System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions |
| JP2809917B2 (en) * | 1992-01-13 | 1998-10-15 | 富士通株式会社 | Charged particle beam exposure method and apparatus |
| JP2816458B2 (en) * | 1992-02-24 | 1998-10-27 | 株式会社村田製作所 | Saddle deflection coil |
| US7345287B2 (en) * | 2005-09-30 | 2008-03-18 | Applied Materials, Inc. | Cooling module for charged particle beam column elements |
| US10486232B2 (en) * | 2015-04-21 | 2019-11-26 | Varian Semiconductor Equipment Associates, Inc. | Semiconductor manufacturing device with embedded fluid conduits |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL145716B (en) * | 1964-06-06 | 1975-04-15 | Philips Nv | ELECTRON BEAM DEVICE. |
| US3346736A (en) * | 1964-09-22 | 1967-10-10 | Applied Res Lab Inc | Electron probe apparatus having an objective lens with an aperture for restricting fluid flow |
| US3374349A (en) * | 1966-11-14 | 1968-03-19 | Victor G. Macres | Electron probe having a specific shortfocal length magnetic lens and light microscope |
-
1967
- 1967-08-18 GB GB3825067A patent/GB1234183A/en not_active Expired
-
1968
- 1968-08-16 DE DE19681764835 patent/DE1764835A1/en active Pending
- 1968-08-16 FR FR1594573D patent/FR1594573A/fr not_active Expired
- 1968-08-16 NL NL6811733A patent/NL6811733A/xx unknown
-
1971
- 1971-03-22 US US126930A patent/US3707628A/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2238426A (en) * | 1989-11-16 | 1991-05-29 | Jeol Ltd | Electromagnetic lens. |
| GB2238426B (en) * | 1989-11-16 | 1994-04-13 | Jeol Ltd | Electromagnetic lens |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1764835A1 (en) | 1971-11-04 |
| NL6811733A (en) | 1969-02-20 |
| FR1594573A (en) | 1970-06-08 |
| US3707628A (en) | 1972-12-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |