NL6811733A - - Google Patents
Info
- Publication number
- NL6811733A NL6811733A NL6811733A NL6811733A NL6811733A NL 6811733 A NL6811733 A NL 6811733A NL 6811733 A NL6811733 A NL 6811733A NL 6811733 A NL6811733 A NL 6811733A NL 6811733 A NL6811733 A NL 6811733A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3825067 | 1967-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6811733A true NL6811733A (de) | 1969-02-20 |
Family
ID=10402251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6811733A NL6811733A (de) | 1967-08-18 | 1968-08-16 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3707628A (de) |
| DE (1) | DE1764835A1 (de) |
| FR (1) | FR1594573A (de) |
| GB (1) | GB1234183A (de) |
| NL (1) | NL6811733A (de) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1594465A (en) * | 1977-03-23 | 1981-07-30 | Nat Res Dev | Electron beam apparatus |
| FR2477827A1 (fr) * | 1980-03-04 | 1981-09-11 | Cgr Mev | Dispositif accelerateur de particules chargees fonctionnant en ondes metriques |
| US4541890A (en) * | 1982-06-01 | 1985-09-17 | International Business Machines Corporation | Hall ion generator for working surfaces with a low energy high intensity ion beam |
| JPS6091544A (ja) * | 1983-10-24 | 1985-05-22 | Anelva Corp | オ−ジエ分析装置 |
| JP2772821B2 (ja) * | 1989-05-30 | 1998-07-09 | セイコーインスツルメンツ株式会社 | 電子線装置 |
| US5079428A (en) * | 1989-08-31 | 1992-01-07 | Bell Communications Research, Inc. | Electron microscope with an asymmetrical immersion lens |
| JP2744823B2 (ja) * | 1989-11-16 | 1998-04-28 | 日本電子株式会社 | 電子レンズ |
| US5311028A (en) * | 1990-08-29 | 1994-05-10 | Nissin Electric Co., Ltd. | System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions |
| JP2809917B2 (ja) * | 1992-01-13 | 1998-10-15 | 富士通株式会社 | 荷電粒子ビーム露光方法および装置 |
| JP2816458B2 (ja) * | 1992-02-24 | 1998-10-27 | 株式会社村田製作所 | 鞍型偏向コイル |
| US7345287B2 (en) * | 2005-09-30 | 2008-03-18 | Applied Materials, Inc. | Cooling module for charged particle beam column elements |
| US10486232B2 (en) * | 2015-04-21 | 2019-11-26 | Varian Semiconductor Equipment Associates, Inc. | Semiconductor manufacturing device with embedded fluid conduits |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL145716B (nl) * | 1964-06-06 | 1975-04-15 | Philips Nv | Elektronenstraalapparaat. |
| US3346736A (en) * | 1964-09-22 | 1967-10-10 | Applied Res Lab Inc | Electron probe apparatus having an objective lens with an aperture for restricting fluid flow |
| US3374349A (en) * | 1966-11-14 | 1968-03-19 | Victor G. Macres | Electron probe having a specific shortfocal length magnetic lens and light microscope |
-
1967
- 1967-08-18 GB GB3825067A patent/GB1234183A/en not_active Expired
-
1968
- 1968-08-16 FR FR1594573D patent/FR1594573A/fr not_active Expired
- 1968-08-16 DE DE19681764835 patent/DE1764835A1/de active Pending
- 1968-08-16 NL NL6811733A patent/NL6811733A/xx unknown
-
1971
- 1971-03-22 US US126930A patent/US3707628A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR1594573A (de) | 1970-06-08 |
| US3707628A (en) | 1972-12-26 |
| DE1764835A1 (de) | 1971-11-04 |
| GB1234183A (de) | 1971-06-03 |