NL6804435A - - Google Patents

Info

Publication number
NL6804435A
NL6804435A NL6804435A NL6804435A NL6804435A NL 6804435 A NL6804435 A NL 6804435A NL 6804435 A NL6804435 A NL 6804435A NL 6804435 A NL6804435 A NL 6804435A NL 6804435 A NL6804435 A NL 6804435A
Authority
NL
Netherlands
Application number
NL6804435A
Other versions
NL153718B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6804435A publication Critical patent/NL6804435A/xx
Publication of NL153718B publication Critical patent/NL153718B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)
NL686804435A 1967-03-30 1968-03-29 Inrichting voor het analyseren van de energie van een elektronenbundel. NL153718B (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1953467 1967-03-30

Publications (2)

Publication Number Publication Date
NL6804435A true NL6804435A (enrdf_load_stackoverflow) 1968-10-01
NL153718B NL153718B (nl) 1977-06-15

Family

ID=12001980

Family Applications (1)

Application Number Title Priority Date Filing Date
NL686804435A NL153718B (nl) 1967-03-30 1968-03-29 Inrichting voor het analyseren van de energie van een elektronenbundel.

Country Status (5)

Country Link
US (1) US3619607A (enrdf_load_stackoverflow)
DE (1) DE1639280C3 (enrdf_load_stackoverflow)
FR (1) FR1558166A (enrdf_load_stackoverflow)
GB (1) GB1226872A (enrdf_load_stackoverflow)
NL (1) NL153718B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145221B2 (enrdf_load_stackoverflow) * 1973-01-31 1976-12-02
FR2220871B1 (enrdf_load_stackoverflow) * 1973-07-27 1978-01-20 Jeol Ltd
US4929838A (en) * 1988-02-16 1990-05-29 Fujitsu Limited Magnetic object lens for an electron beam exposure apparatus which processes a wafer carried on a continuously moving stage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB962086A (en) * 1962-03-27 1964-06-24 Hitachi Ltd Energy-selecting electron microscopes
US3374346A (en) * 1964-07-15 1968-03-19 Hitachi Ltd Spectroscopic electron microscope wherein a specimen is irradiated with x-rays and the electrons emitted are energy analyzed

Also Published As

Publication number Publication date
DE1639280A1 (de) 1972-03-16
NL153718B (nl) 1977-06-15
US3619607A (en) 1971-11-09
FR1558166A (enrdf_load_stackoverflow) 1969-02-21
GB1226872A (enrdf_load_stackoverflow) 1971-03-31
DE1639280C3 (de) 1974-01-31
DE1639280B2 (de) 1973-07-12

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee
NL80 Information provided on patent owner name for an already discontinued patent

Owner name: TAKEO