NL6616165A - - Google Patents

Info

Publication number
NL6616165A
NL6616165A NL6616165A NL6616165A NL6616165A NL 6616165 A NL6616165 A NL 6616165A NL 6616165 A NL6616165 A NL 6616165A NL 6616165 A NL6616165 A NL 6616165A NL 6616165 A NL6616165 A NL 6616165A
Authority
NL
Netherlands
Application number
NL6616165A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6616165A publication Critical patent/NL6616165A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Drying Of Semiconductors (AREA)
NL6616165A 1966-02-11 1966-11-16 NL6616165A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0101951 1966-02-11

Publications (1)

Publication Number Publication Date
NL6616165A true NL6616165A (enrdf_load_stackoverflow) 1967-08-14

Family

ID=7524100

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6616165A NL6616165A (enrdf_load_stackoverflow) 1966-02-11 1966-11-16

Country Status (7)

Country Link
AT (1) AT265371B (enrdf_load_stackoverflow)
CH (1) CH485325A (enrdf_load_stackoverflow)
DE (1) DE1521990A1 (enrdf_load_stackoverflow)
FR (1) FR1511237A (enrdf_load_stackoverflow)
GB (1) GB1113489A (enrdf_load_stackoverflow)
NL (1) NL6616165A (enrdf_load_stackoverflow)
SE (1) SE340027B (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2186424A (en) * 1986-01-30 1987-08-12 Plessey Co Plc Method for producing integrated circuit interconnects

Also Published As

Publication number Publication date
AT265371B (de) 1968-10-10
CH485325A (de) 1970-01-31
SE340027B (enrdf_load_stackoverflow) 1971-11-01
FR1511237A (fr) 1968-01-26
DE1521990A1 (de) 1970-02-05
GB1113489A (en) 1968-05-15

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