NL6603676A - - Google Patents

Info

Publication number
NL6603676A
NL6603676A NL6603676A NL6603676A NL6603676A NL 6603676 A NL6603676 A NL 6603676A NL 6603676 A NL6603676 A NL 6603676A NL 6603676 A NL6603676 A NL 6603676A NL 6603676 A NL6603676 A NL 6603676A
Authority
NL
Netherlands
Application number
NL6603676A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6603676A publication Critical patent/NL6603676A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/067Replacing parts of guns; Mutual adjustment of electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/065Construction of guns or parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
NL6603676A 1965-03-25 1966-03-21 NL6603676A (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US442580A US3333136A (en) 1965-03-25 1965-03-25 Electron-beam gun with adjustable filament baffle

Publications (1)

Publication Number Publication Date
NL6603676A true NL6603676A (en:Method) 1966-09-26

Family

ID=23757341

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6603676A NL6603676A (en:Method) 1965-03-25 1966-03-21

Country Status (5)

Country Link
US (2) US3333136A (en:Method)
BE (1) BE678411A (en:Method)
DE (1) DE1565892C3 (en:Method)
GB (1) GB1129957A (en:Method)
NL (1) NL6603676A (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3454814A (en) * 1966-07-29 1969-07-08 Atomic Energy Commission Tubular vapor source
JPS6023455B2 (ja) * 1978-10-17 1985-06-07 株式会社東芝 直熱形陰極構体
EP0698907A3 (de) * 1994-07-20 1996-05-01 Mishnarodnij Zentr Elektronno Elektronenkanone.

Also Published As

Publication number Publication date
DE1565892B2 (de) 1973-03-15
US3333136A (en) 1967-07-25
DE1565892A1 (de) 1970-03-26
USB333136I5 (en:Method)
BE678411A (en:Method) 1966-09-26
DE1565892C3 (de) 1973-09-27
GB1129957A (en) 1968-10-09

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