BE678411A - - Google Patents
Info
- Publication number
- BE678411A BE678411A BE678411DA BE678411A BE 678411 A BE678411 A BE 678411A BE 678411D A BE678411D A BE 678411DA BE 678411 A BE678411 A BE 678411A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US442580A US3333136A (en) | 1965-03-25 | 1965-03-25 | Electron-beam gun with adjustable filament baffle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE678411A true BE678411A (en:Method) | 1966-09-26 |
Family
ID=23757341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE678411D BE678411A (en:Method) | 1965-03-25 | 1966-03-24 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US3333136A (en:Method) |
| BE (1) | BE678411A (en:Method) |
| DE (1) | DE1565892C3 (en:Method) |
| GB (1) | GB1129957A (en:Method) |
| NL (1) | NL6603676A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3454814A (en) * | 1966-07-29 | 1969-07-08 | Atomic Energy Commission | Tubular vapor source |
| JPS6023455B2 (ja) * | 1978-10-17 | 1985-06-07 | 株式会社東芝 | 直熱形陰極構体 |
| EP0698907A3 (de) * | 1994-07-20 | 1996-05-01 | Mishnarodnij Zentr Elektronno | Elektronenkanone. |
-
0
- US US333136D patent/USB333136I5/en active Pending
-
1965
- 1965-03-25 US US442580A patent/US3333136A/en not_active Expired - Lifetime
-
1966
- 1966-03-21 NL NL6603676A patent/NL6603676A/xx unknown
- 1966-03-23 DE DE1565892A patent/DE1565892C3/de not_active Expired
- 1966-03-24 BE BE678411D patent/BE678411A/xx unknown
- 1966-03-25 GB GB13348/66A patent/GB1129957A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1565892B2 (de) | 1973-03-15 |
| NL6603676A (en:Method) | 1966-09-26 |
| US3333136A (en) | 1967-07-25 |
| DE1565892A1 (de) | 1970-03-26 |
| USB333136I5 (en:Method) | |
| DE1565892C3 (de) | 1973-09-27 |
| GB1129957A (en) | 1968-10-09 |